Sugarman; Michael N.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sugarman; Michael N..The latest application filed is for "single wafer dryer and drying methods".

Company Profile

0.14.7

Sugarman; Michael N. - San Francisco CA
Sugarman; Michael N - San Francisco CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Single Wafer Dryer And Drying Methods App 20090241996 - Achkire; Younes ; et al.	2009-10-01
Single wafer dryer and drying methods Grant 7,513,062 - Achkire , et al. April 7, 2	2009-04-07
Methods and apparatus for determining scrubber brush pressure Grant 7,507,296 - Sugarman , et al. March 24, 2	2009-03-24
Methods And Apparatus For Determining Scrubber Brush Pressure App 20070221249 - Sugarman; Michael N. ; et al.	2007-09-27
Methods and apparatus for determining scrubber brush pressure Grant 7,229,504 - Sugarman , et al. June 12, 2	2007-06-12
Methods and apparatus for determining scrubber brush pressure App 20060090774 - Sugarman; Michael N. ; et al.	2006-05-04
Methods and apparatus for determining scrubber brush pressure Grant 6,986,185 - Sugarman , et al. January 17, 2	2006-01-17
Single wafer dryer and drying methods App 20050229426 - Achkire, Younes ; et al.	2005-10-20
Method and associated apparatus for tilting a substrate upon entry for metal deposition App 20030201184 - Dordi, Yezdi N. ; et al.	2003-10-30
Segmenting of processing system into wet and dry areas App 20030168346 - Hey, H. Peter W. ; et al.	2003-09-11
Method and associated apparatus for tilting a substrate upon entry for metal deposition Grant 6,582,578 - Dordi , et al. June 24, 2	2003-06-24
Methods and apparatus for determining scrubber brush pressure App 20030111095 - Sugarman, Michael N. ; et al.	2003-06-19
Segmenting of processing system into wet and dry areas Grant 6,551,488 - Hey , et al. April 22, 2	2003-04-22
Method and apparatus for reducing thermal gradients within a substrate support Grant 6,469,283 - Burkhart , et al. October 22, 2	2002-10-22
Apparatus for transferring semiconductor substrates using an input module Grant 6,406,359 - Birang , et al. June 18, 2	2002-06-18
Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system Grant 6,219,219 - Hausmann , et al. April 17, 2	2001-04-17
Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system Grant 6,081,414 - Flanigan , et al. June 27, 2	2000-06-27
Wafer spacing mask for a substrate support chuck and method of fabricating same Grant 5,656,093 - Burkhart , et al. August 12, 1	1997-08-12
Method for supporting a wafer in a combined wafer support and temperature monitoring device Grant 5,567,909 - Sugarman , et al. October 22, 1	1996-10-22
Combined wafer support and temperature monitoring device Grant 5,356,486 - Sugarman , et al. October 18, 1	1994-10-18
Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport Grant 5,129,994 - Ebbing , et al. July 14, 1	1992-07-14

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