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Laser Device, And Extreme Ultraviolet Light Generation System App 20190157833 - SUGANUMA; Takashi | 2019-05-23 |
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Laser Apparatus And Extreme Ultraviolet Light Generation System App 20180351322 - KUROSAWA; Yoshiaki ;   et al. | 2018-12-06 |
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Beam Dump Apparatus, Laser Apparatus Equipped With The Beam Dump Apparatus, And Extreme Ultraviolet Light Generating Apparatus App 20170299857 - KUROSAWA; Yoshiaki ;   et al. | 2017-10-19 |
Beam Delivery System And Control Method Therefor App 20170280544 - UENO; Yoshifumi ;   et al. | 2017-09-28 |
Extreme Ultraviolet Light Generating Apparatus App 20170250517 - SUZUKI; Toru ;   et al. | 2017-08-31 |
Laser amplifier, laser apparatus, and extreme ultraviolet light generating system Grant 9,685,756 - Suganuma , et al. June 20, 2 | 2017-06-20 |
Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier Grant 9,680,277 - Nowak , et al. June 13, 2 | 2017-06-13 |
Laser apparatus and extreme ultraviolet light generation system Grant 9,667,019 - Moriya , et al. May 30, 2 | 2017-05-30 |
Laser unit and extreme ultraviolet light generating system Grant 9,647,406 - Suganuma , et al. May 9, 2 | 2017-05-09 |
Laser Unit And Extreme Ultraviolet Light Generating System App 20160285222 - SUGANUMA; Takashi ;   et al. | 2016-09-29 |
Laser Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generating System App 20160172820 - SUGANUMA; Takashi ;   et al. | 2016-06-16 |
Laser Unit And Extreme Ultraviolet Light Generating System App 20160172814 - SUGANUMA; Takashi ;   et al. | 2016-06-16 |
Optical device, laser apparatus, and extreme ultraviolet light generation system Grant 9,362,703 - Mizoguchi , et al. June 7, 2 | 2016-06-07 |
Laser Apparatus And Extreme Ultraviolet Light Generation System App 20150351208 - SUGANUMA; Takashi ;   et al. | 2015-12-03 |
Laser Apparatus And Extreme Ultraviolet Light Generation System App 20150340838 - MORIYA; Masato ;   et al. | 2015-11-26 |
Laser apparatus and extreme ultraviolet light generation system Grant 9,184,551 - Suganuma , et al. November 10, 2 | 2015-11-10 |
Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 9,153,927 - Nowak , et al. October 6, 2 | 2015-10-06 |
Slab Amplifier, And Laser Apparatus And Extreme Ultraviolet Light Generation Apparatus Including Slab Amplifier App 20150188277 - NOWAK; Krzysztof ;   et al. | 2015-07-02 |
Slab amplification device, laser apparatus, and extreme ultraviolet light generation system Grant 9,036,251 - Nowak , et al. May 19, 2 | 2015-05-19 |
Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20140374605 - MIZOGUCHI; Hakaru ;   et al. | 2014-12-25 |
Laser Apparatus And Extreme Ultraviolet Light Generation System App 20140348188 - SUGANUMA; Takashi ;   et al. | 2014-11-27 |
Laser Apparatus, Laser System, And Extreme Ultraviolet Light Generation Apparatus App 20140346375 - NOWAK; Krzysztof ;   et al. | 2014-11-27 |
Optical device, laser apparatus, and extreme ultraviolet light generation system Grant 8,891,161 - Mizoguchi , et al. November 18, 2 | 2014-11-18 |
Laser apparatus and extreme ultraviolet light source apparatus Grant 8,804,778 - Wakabayashi , et al. August 12, 2 | 2014-08-12 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus Grant 8,804,902 - Someya , et al. August 12, 2 | 2014-08-12 |
Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 8,749,876 - Nowak , et al. June 10, 2 | 2014-06-10 |
Extreme ultra violet light source apparatus Grant 8,698,116 - Moriya , et al. April 15, 2 | 2014-04-15 |
Regenerative Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20130315272 - NOWAK; Krzysztof ;   et al. | 2013-11-28 |
Extreme Ultra Violet Light Source Apparatus App 20130240762 - MORIYA; Masato ;   et al. | 2013-09-19 |
Extreme ultra violet light source apparatus Grant 8,536,551 - Moriya , et al. September 17, 2 | 2013-09-17 |
Collector Mirror Exchanging Apparatus And Method For Extreme Ultraviolet Light Source Apparatus App 20130221247 - Someya; Hiroshi ;   et al. | 2013-08-29 |
Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20130208742 - Mizoguchi; Hakaru ;   et al. | 2013-08-15 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus Grant 8,477,412 - Someya , et al. July 2, 2 | 2013-07-02 |
Extreme ultraviolet light source apparatus Grant 8,450,706 - Abe , et al. May 28, 2 | 2013-05-28 |
Extreme ultraviolet light source apparatus Grant 8,445,876 - Suganuma , et al. May 21, 2 | 2013-05-21 |
Slab Amplification Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20130034116 - Nowak; Krzysztof ;   et al. | 2013-02-07 |
Extreme ultraviolet light source apparatus Grant 8,294,129 - Moriya , et al. October 23, 2 | 2012-10-23 |
Regenerative Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20120229889 - Suganuma; Takashi ;   et al. | 2012-09-13 |
Extreme ultraviolet light source apparatus Grant 8,173,984 - Moriya , et al. May 8, 2 | 2012-05-08 |
Laser Device, Extreme Ultraviolet Light Generation Device, And Method For Maintaining The Devices App 20110309270 - Yamanouchi; Yohichi ;   et al. | 2011-12-22 |
Extreme Ultraviolet Light Source Apparatus App 20110180734 - MORIYA; Masato ;   et al. | 2011-07-28 |
Extreme ultra violet light source apparatus Grant 7,923,705 - Moriya , et al. April 12, 2 | 2011-04-12 |
Slab type laser apparatus Grant 7,903,715 - Nowak , et al. March 8, 2 | 2011-03-08 |
Extreme ultra violet light source apparatus Grant 7,880,153 - Suganuma , et al. February 1, 2 | 2011-02-01 |
Laser Apparatus And Extreme Ultraviolet Light Source Apparatus App 20100193710 - Wakabayashi; Osamu ;   et al. | 2010-08-05 |
Extreme ultra violet light source apparatus App 20100176310 - Moriya; Masato ;   et al. | 2010-07-15 |
Extreme ultraviolet light source apparatus App 20100171049 - Moriya; Masato ;   et al. | 2010-07-08 |
Extreme Ultraviolet Light Source Apparatus App 20100140512 - SUGANUMA; Takashi ;   et al. | 2010-06-10 |
Extreme ultra violet light source apparatus Grant 7,683,355 - Moriya , et al. March 23, 2 | 2010-03-23 |
LPP type extreme ultra violet light source apparatus and driver laser for the same Grant 7,680,158 - Endo , et al. March 16, 2 | 2010-03-16 |
LPP type extreme ultra violet light source apparatus and driver laser for the same Grant 7,649,188 - Endo , et al. January 19, 2 | 2010-01-19 |
Extreme Ultra Violet Light Source Apparatus App 20090314967 - MORIYA; Masato ;   et al. | 2009-12-24 |
Slab Type Laser Apparatus App 20090316746 - NOWAK; Krzysztof ;   et al. | 2009-12-24 |
Exreme ultraviolet light source apparatus App 20090272919 - Abe; Tamotsu ;   et al. | 2009-11-05 |
Image reading apparatus including reading unit having conductive abutting portion Grant 7,502,146 - Hanashi , et al. March 10, 2 | 2009-03-10 |
Extreme ultra violet light source apparatus App 20080210889 - Suganuma; Takashi ;   et al. | 2008-09-04 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus App 20080104828 - Someya; Hiroshi ;   et al. | 2008-05-08 |
Extreme ultra violet light source apparatus App 20080073598 - Moriya; Masato ;   et al. | 2008-03-27 |
LPP type extreme ultra violet light source apparatus and driver laser for the same App 20070187628 - Endo; Akira ;   et al. | 2007-08-16 |
LPP type extreme ultra violet light source apparatus and driver laser for the same App 20060078017 - Endo; Akira ;   et al. | 2006-04-13 |
Image reading apparatus including reading unit having conductive abutting portion App 20030142370 - Hanashi, Ryo ;   et al. | 2003-07-31 |