Patent | Date |
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Method and system for managing semiconductor manufacturing device App 20110245956 - Matsushita; Hiroshi ;   et al. | 2011-10-06 |
Method and system for managing semiconductor manufacturing device Grant 7,979,154 - Matsushita , et al. July 12, 2 | 2011-07-12 |
Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus Grant 7,970,486 - Matsushita , et al. June 28, 2 | 2011-06-28 |
Process control system, process control method, and method of manufacturing electronic apparatus Grant 7,831,330 - Sugamoto , et al. November 9, 2 | 2010-11-09 |
Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same Grant 7,742,834 - Matsushita , et al. June 22, 2 | 2010-06-22 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them Grant 7,700,381 - Arikado , et al. April 20, 2 | 2010-04-20 |
Process control system, process control method, and method of manufacturing electronic apparatus App 20090276078 - Sugamoto; Junji ;   et al. | 2009-11-05 |
Process control system, process control method, and method of manufacturing electronic apparatus Grant 7,596,421 - Sugamoto , et al. September 29, 2 | 2009-09-29 |
Method of inspecting semiconductor wafer Grant 7,531,462 - Tanzawa , et al. May 12, 2 | 2009-05-12 |
Defect detection system, defect detection method, and defect detection program Grant 7,529,631 - Matsushita , et al. May 5, 2 | 2009-05-05 |
Method And System For Managing Semiconductor Manufacturing Device App 20080147226 - MATSUSHITA; Hiroshi ;   et al. | 2008-06-19 |
Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server Grant 7,324,855 - Ushiku , et al. January 29, 2 | 2008-01-29 |
Defect detection system, defect detection method, and defect detection program App 20080004823 - Matsushita; Hiroshi ;   et al. | 2008-01-03 |
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus Grant 7,314,766 - Sugamoto , et al. January 1, 2 | 2008-01-01 |
Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same App 20070276528 - Matsushita; Hiroshi ;   et al. | 2007-11-29 |
Method and system for manufacturing a semiconductor device App 20070254482 - Kawabata; Kenji ;   et al. | 2007-11-01 |
Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus App 20070225853 - Matsushita; Hiroshi ;   et al. | 2007-09-27 |
System and method for monitoring manufacturing apparatuses Grant 7,221,991 - Matsushita , et al. May 22, 2 | 2007-05-22 |
Process control system, process control method, and method of manufacturing electronic apparatus App 20060287754 - Sugamoto; Junji ;   et al. | 2006-12-21 |
Method of inspecting semiconductor wafer App 20060281281 - Tanzawa; Katsujiro ;   et al. | 2006-12-14 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them App 20060131696 - Arikado; Tsunetoshi ;   et al. | 2006-06-22 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them Grant 7,057,259 - Arikado , et al. June 6, 2 | 2006-06-06 |
Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server App 20060064188 - Ushiku; Yukihiro ;   et al. | 2006-03-23 |
System and method for controlling manufacturing apparatuses App 20050194590 - Matsushita, Hiroshi ;   et al. | 2005-09-08 |
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus App 20040137752 - Sugamoto, Junji ;   et al. | 2004-07-15 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them App 20030003608 - Arikado, Tsunetoshi ;   et al. | 2003-01-02 |