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Patent applications and USPTO patent grants for Suetsugu; Masumi.The latest application filed is for "chemically amplified positive resist composition".
Patent | Date |
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Chemically amplified positive resist composition Grant 7,972,763 - Suetsugu , et al. July 5, 2 | 2011-07-05 |
Chemically amplified positive resist composition Grant 7,794,913 - Akita , et al. September 14, 2 | 2010-09-14 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same Grant 7,667,050 - Shigematsu , et al. February 23, 2 | 2010-02-23 |
Negative type resist composition Grant RE40,964 - Suetsugu , et al. November 10, 2 | 2009-11-10 |
Chemically Amplified Positive Resist Composition App 20080286691 - AKITA; Makoto ;   et al. | 2008-11-20 |
Chemically amplified positive resist compostion App 20080153036 - Suetsugu; Masumi ;   et al. | 2008-06-26 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same App 20080086014 - Shigematsu; Junji ;   et al. | 2008-04-10 |
Chemical amplification type positive resist composition Grant 7,202,010 - Yamada , et al. April 10, 2 | 2007-04-10 |
Positive resist composition Grant 7,144,674 - Namba , et al. December 5, 2 | 2006-12-05 |
Chemical amplification type positive resist composition Grant 6,828,079 - Suetsugu , et al. December 7, 2 | 2004-12-07 |
Chemical amplification type positive resist composition App 20040191670 - Ando, Nobuo ;   et al. | 2004-09-30 |
Chemical amplification type positive resist composition Grant 6,762,007 - Namba , et al. July 13, 2 | 2004-07-13 |
Chemical amplification type positive resist composition Grant 6,696,218 - Ichimura , et al. February 24, 2 | 2004-02-24 |
Resist composition Grant 6,689,531 - Kim , et al. February 10, 2 | 2004-02-10 |
Positive resist composition App 20030219677 - Namba, Katsuhiko ;   et al. | 2003-11-27 |
Chemical amplification type positive resist composition App 20030180663 - Namba, Katsuhiko ;   et al. | 2003-09-25 |
Resist composition App 20030119957 - Kim, Sang Tae ;   et al. | 2003-06-26 |
Chemical amplification type positive resist composition App 20030114589 - Suetsugu, Masumi ;   et al. | 2003-06-19 |
Chemical amplification type positive resist composition App 20030099900 - Yamada, Airi ;   et al. | 2003-05-29 |
Chemical amplification type positive resist composition App 20030013038 - Ichimura, Kunihiro ;   et al. | 2003-01-16 |
Chemical amplifying type positive resist composition App 20020164540 - Nakanishi, Junji ;   et al. | 2002-11-07 |
Developer preparing apparatus and developer preparing method Grant 5,476,320 - Taguchi , et al. December 19, 1 | 1995-12-19 |
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