| Patent | Date |
|---|
Optical component and phase contrast microscope using optical component
Grant 8,351,116 - Suenaga January 8, 2 | 2013-01-08 |
Optical Component And Phase Contrast Microscope Using Optical Component
App 20110032608 - Suenaga; Yutaka | 2011-02-10 |
Catadioptric optical system and exposure apparatus equipped with the same
Grant 7,079,314 - Suenaga , et al. July 18, 2 | 2006-07-18 |
Relay image optical system, and illuminating optical device and exposure system provided with the optical system
Grant 6,856,377 - Suenaga February 15, 2 | 2005-02-15 |
Projection optical system and exposure apparatus having the projection optical system
App 20050024617 - Suenaga, Yutaka | 2005-02-03 |
Projection optical system and exposure apparatus having the projection optical system
Grant 6,844,919 - Suenaga January 18, 2 | 2005-01-18 |
Relay image optical system, and illuminating optical device and exposure system provided with the optical system
App 20040070742 - Suenaga, Yutaka | 2004-04-15 |
Exposure apparatus and method
Grant 6,707,601 - Suenaga , et al. March 16, 2 | 2004-03-16 |
Projection Optical System And Exposure Apparatus Having The Projection Optical System
App 20040021844 - Suenaga, Yutaka | 2004-02-05 |
Projection optical system and projection exposure apparatus
Grant RE38,403 - Sasaya , et al. January 27, 2 | 2004-01-27 |
Exposure apparatus and method
App 20030210459 - Suenaga, Yutaka ; et al. | 2003-11-13 |
Exposure apparatus and method
Grant 6,646,797 - Suenaga , et al. November 11, 2 | 2003-11-11 |
Projection optical system and exposure apparatus having the projection optical system
Grant 6,633,365 - Suenaga October 14, 2 | 2003-10-14 |
Exposure apparatus and method
App 20030090786 - Suenaga, Yutaka ; et al. | 2003-05-15 |
Projection optical system and exposure apparatus having the projection optical system
App 20030030916 - Suenaga, Yutaka | 2003-02-13 |
Condenser optical system and illumination optical apparatus provided with the optical system
App 20020171944 - Suenaga, Yutaka ; et al. | 2002-11-21 |
Exposure apparatus and method
Grant 6,451,507 - Suenaga , et al. September 17, 2 | 2002-09-17 |
Catoptric reduction projection optical system and exposure apparatus and method using same
Grant 6,302,548 - Takahashi , et al. October 16, 2 | 2001-10-16 |
Catadioptric reduction projection optical system
App 20010024330 - Hashimoto, Sumio ; et al. | 2001-09-27 |
Device and method for dark field illumination
Grant 6,259,557 - Miyashita , et al. July 10, 2 | 2001-07-10 |
Catoptric reduction projection optical system and exposure apparatus and method using same
App 20010002155 - Takahashi, Tomowaki ; et al. | 2001-05-31 |
Catadioptric reduction projection optical system and method
Grant 6,108,140 - Hashimoto , et al. August 22, 2 | 2000-08-22 |
Exposure apparatus
Grant 6,084,723 - Matsuzawa , et al. July 4, 2 | 2000-07-04 |
Adapters for correcting spherical aberrations of objective lens
Grant 5,978,155 - Suenaga November 2, 1 | 1999-11-02 |
Projection optical system and projection exposure apparatus
Grant 5,943,172 - Sasaya , et al. August 24, 1 | 1999-08-24 |
Microscope objective lens with variable correction of aberrations imparted by transparent body between the specimen and the objective lens
Grant 5,940,220 - Suenaga , et al. August 17, 1 | 1999-08-17 |
Projection optical system and method of using such system for manufacturing devices
Grant 5,930,049 - Suenaga , et al. July 27, 1 | 1999-07-27 |
Microscope objective lens
Grant 5,920,432 - Suenaga , et al. July 6, 1 | 1999-07-06 |
Zoom lens system
Grant 5,835,282 - Suenaga , et al. November 10, 1 | 1998-11-10 |
Projection optical system and exposure apparatus using the same
Grant 5,835,285 - Matsuzawa , et al. November 10, 1 | 1998-11-10 |
Projection optical system and projection exposure apparatus
Grant 5,831,776 - Sasaya , et al. November 3, 1 | 1998-11-03 |
Projection optical system and exposure apparatus provided therewith
Grant 5,831,770 - Matsuzawa , et al. November 3, 1 | 1998-11-03 |
Projection optical system and projection exposure apparatus
Grant 5,805,344 - Sasaya , et al. September 8, 1 | 1998-09-08 |
Projection optical system and exposure apparatus with the same
Grant 5,781,278 - Matsuzawa , et al. July 14, 1 | 1998-07-14 |
Shake-preventing correction optical system
Grant 5,751,486 - Misawa , et al. May 12, 1 | 1998-05-12 |
Objective lens system
Grant 5,708,531 - Yamada , et al. January 13, 1 | 1998-01-13 |
Catadioptric reduction projection optical system and exposure apparatus employing the same
Grant 5,694,241 - Ishiyama , et al. December 2, 1 | 1997-12-02 |
Catadioptric reduction projection optical system
Grant 5,668,673 - Suenaga , et al. September 16, 1 | 1997-09-16 |
Catadioptric optical system
Grant 5,592,329 - Ishiyama , et al. January 7, 1 | 1997-01-07 |
Retrofocus-type wide angle lens system having a fixed front lens group and a movable rear lens group
Grant 5,589,988 - Suenaga December 31, 1 | 1996-12-31 |
Inverse telescopic wide angle lens
Grant 5,477,388 - Ishiyama , et al. December 19, 1 | 1995-12-19 |
Cata-dioptric reduction projection optical system
Grant 5,220,454 - Ichihara , et al. June 15, 1 | 1993-06-15 |
Projection type exposure apparatus
Grant 4,795,244 - Uehara , et al. January 3, 1 | 1989-01-03 |
Optical apparatus for the detection of position
Grant 4,723,845 - Mizutani , et al. February 9, 1 | 1988-02-09 |
Dark field illumination apparatus for epi-illumination system
Grant 4,626,079 - Nakamura , et al. December 2, 1 | 1986-12-02 |
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