SUEN; Shich-Chang
Patent Applications and Registrations
Patent applications and USPTO patent grants for SUEN; Shich-Chang.The latest application filed is for "post-cmp cleaning composition for germanium- containing substrate".
Company Profile
12.24.30
- SUEN; Shich-Chang - Hsinchu TW
- Suen; Shich-Chang - Hsinchu City TW
- Suen; Shich-Chang - Hsin-Chu TW
- Suen; Shich-Chang - Hsin-Chu City TW
Patent Activity
| Patent | Date |
|---|---|
| Post-cmp Cleaning Composition For Germanium- Containing Substrate App 20210371774 - CUI; Ji ; et al. | 2021-12-02 |
| Fin Field-Effect Transistor Device and Method of Forming the Same App 20210296173 - Suen; Shich-Chang ; et al. | 2021-09-23 |
| Chemical mechanical polishing composition and method Grant 11,117,239 - Suen , et al. September 14, 2 | 2021-09-14 |
| Chemical Mechanical Polishing Apparatus and Method App 20210220962 - Suen; Shich-Chang ; et al. | 2021-07-22 |
| Fin field-effect transistor device and method of forming the same Grant 11,024,540 - Suen , et al. June 1, 2 | 2021-06-01 |
| Chemical mechanical polishing apparatus and method Grant 10,967,478 - Suen , et al. April 6, 2 | 2021-04-06 |
| Method for Metal Gate Surface Clean App 20210082688 - Suen; Shich-Chang ; et al. | 2021-03-18 |
| Method for metal gate surface clean Grant 10,847,359 - Suen , et al. November 24, 2 | 2020-11-24 |
| Systems and methods for chemical mechanical polish and clean Grant 10,755,934 - Suen , et al. A | 2020-08-25 |
| Systems and Methods for Chemical Mechanical Polish and Clean App 20200118823 - SUEN; Shich-Chang ; et al. | 2020-04-16 |
| Fin Field-Effect Transistor Device and Method of Forming the Same App 20200105599 - Suen; Shich-Chang ; et al. | 2020-04-02 |
| Systems and methods for chemical mechanical polish and clean Grant 10,515,808 - Suen , et al. Dec | 2019-12-24 |
| Fin Field-Effect Transistor device and method of forming the same Grant 10,504,782 - Suen , et al. Dec | 2019-12-10 |
| Chemical Mechanical Polishing Apparatus And Method App 20190099854 - Suen; Shich-Chang ; et al. | 2019-04-04 |
| Chemical Mechanical Polishing Composition and Method App 20190099853 - Suen; Shich-Chang ; et al. | 2019-04-04 |
| Fin Field-effect Transistor Device And Method Of Forming The Same App 20190103312 - Suen; Shich-Chang ; et al. | 2019-04-04 |
| Semiconductor device and method Grant 10,164,053 - Chung , et al. Dec | 2018-12-25 |
| Advanced polishing system Grant 10,160,088 - Chung , et al. Dec | 2018-12-25 |
| Method for operating a polishing head and method for polishing a substrate Grant 9,987,720 - Suen , et al. June 5, 2 | 2018-06-05 |
| Oxidation and etching post metal gate CMP Grant 9,917,173 - Liu , et al. March 13, 2 | 2018-03-13 |
| Advanced Polishing System App 20180043495 - Chung; Che-Liang ; et al. | 2018-02-15 |
| Advanced polishing system Grant 9,802,292 - Chung , et al. October 31, 2 | 2017-10-31 |
| Advanced Polishing System App 20170239777 - Chung; Che-Liang ; et al. | 2017-08-24 |
| Method For Metal Gate Surface Clean App 20170221700 - Suen; Shich-Chang ; et al. | 2017-08-03 |
| Oxidation and Etching Post Metal Gate CMP App 20170125549 - Liu; Chi-Jen ; et al. | 2017-05-04 |
| Mechanisms for removing debris from polishing pad Grant 9,630,295 - Peng , et al. April 25, 2 | 2017-04-25 |
| Method for metal gate surface clean Grant 9,633,832 - Suen , et al. April 25, 2 | 2017-04-25 |
| Oxidation and etching post metal gate CMP Grant 9,564,511 - Liu , et al. February 7, 2 | 2017-02-07 |
| Mechanism for forming metal gate structure Grant 9,553,161 - Liu , et al. January 24, 2 | 2017-01-24 |
| Systems and Methods for Chemical Mechanical Polish and Clean App 20170004972 - Suen; Shich-Chang ; et al. | 2017-01-05 |
| Methods and systems for chemical mechanical polish and clean Grant 9,449,841 - Suen , et al. September 20, 2 | 2016-09-20 |
| Method For Metal Gate Surface Clean App 20160172186 - SUEN; Shich-Chang ; et al. | 2016-06-16 |
| Platen assembly, chemical-mechanical polisher, and method for polishing substrate Grant 9,352,443 - Suen , et al. May 31, 2 | 2016-05-31 |
| Method For Operating A Polishing Head And Method For Polishing A Substrate App 20160136777 - SUEN; Shich-Chang ; et al. | 2016-05-19 |
| Oxidation and Etching Post Metal Gate CMP App 20160064518 - Liu; Chi-Jen ; et al. | 2016-03-03 |
| Polishing head, and chemical-mechanical polishing system for polishing substrate Grant 9,272,386 - Suen , et al. March 1, 2 | 2016-03-01 |
| Method for cleaning metal gate surface Grant 9,269,585 - Suen , et al. February 23, 2 | 2016-02-23 |
| Oxidation and etching post metal gate CMP Grant 9,209,272 - Liu , et al. December 8, 2 | 2015-12-08 |
| Mechanism For Forming Metal Gate Structure App 20150295063 - LIU; Chi-Jen ; et al. | 2015-10-15 |
| Method For Metal Gate Surface Clean App 20150200089 - SUEN; Shich-Chang ; et al. | 2015-07-16 |
| Mechanism for forming metal gate structure Grant 9,076,766 - Liu , et al. July 7, 2 | 2015-07-07 |
| Methods And Systems For Chemical Mechanical Polish And Clean App 20150179432 - Suen; Shich-Chang ; et al. | 2015-06-25 |
| Platen Assembly, Chemical-Mechanical Polisher, and Method for Polishing Substrate App 20150133033 - Suen; Shich-Chang ; et al. | 2015-05-14 |
| Polishing Head, Chemical-Mechanical Polishing System, and Method for Polishing Substrate App 20150111477 - SUEN; Shich-Chang ; et al. | 2015-04-23 |
| Apparatus And Method Of Manufacturing Metal Gate Semiconductor Device App 20150087144 - LIU; CHI-JEN ; et al. | 2015-03-26 |
| Oxidation and Etching Post Metal Gate CMP App 20150072511 - Liu; Chi-Jen ; et al. | 2015-03-12 |
| Mechanisms For Removing Debris From Polishing Pad App 20150024661 - PENG; He-Hui ; et al. | 2015-01-22 |
| Mechanism For Forming Metal Gate Structure App 20140367801 - LIU; Chi-Jen ; et al. | 2014-12-18 |
| Process for forming contact plugs Grant 8,703,612 - Suen , et al. April 22, 2 | 2014-04-22 |
| Semiconductor Device Surface Clean App 20130061876 - Suen; Shich-Chang ; et al. | 2013-03-14 |
| Process for Forming Contact Plugs App 20130065394 - Suen; Shich-Chang ; et al. | 2013-03-14 |
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