Suematsu; Kenichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Suematsu; Kenichi.The latest application filed is for "electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus".

Company Profile

1.18.18

Suematsu; Kenichi - Tokyo JP
Suematsu; Kenichi - Kanagawa-ken JP
Suematsu; Kenichi - Yokohama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus Grant 10,446,404 - Tajima , et al. Oc	2019-10-15
Inspection system and inspection image data generation method Grant 10,074,510 - Suematsu , et al. September 11, 2	2018-09-11
Electron-beam Irradiated Area Adjustment Method And Adjustment System, Electron-beam Irradiated Region Correction Method, And Electron Beam Irradiation Apparatus App 20180233374 - TAJIMA; Ryo ; et al.	2018-08-16
Inspection device Grant 10,002,740 - Hatakeyama , et al. June 19, 2	2018-06-19
Inspection Device App 20180040452 - HATAKEYAMA; Masahiro ; et al.	2018-02-08
Surface processing apparatus Grant 9,852,878 - Hatakeyama , et al. December 26, 2	2017-12-26
Control unit for generating timing signal for imaging unit in inspection system and method for sending out timing signal to imaging unit Grant 9,760,984 - Suematsu September 12, 2	2017-09-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2	2016-08-02
Surface Processing Apparatus App 20150371813 - HATAKEYAMA; Masahiro ; et al.	2015-12-24
Control Unit For Generating Timing Signal For Imaging Unit In Inspection System And Method For Sending Out Timing Signal To Imaging Unit App 20150285746 - SUEMATSU; Kenichi	2015-10-08
Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded Grant 9,105,445 - Tajima , et al. August 11, 2	2015-08-11
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ; et al.	2015-05-07
Inspection System And Inspection Image Data Generation Method App 20150041646 - Suematsu; Kenichi ; et al.	2015-02-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2	2015-02-03
Inspection System, Inspection Image Data Generation Method, Inspection Display Unit, Defect Determination Method, And Storage Medium On Which Inspection Display Program Is Recorded App 20140291515 - TAJIMA; Ryo ; et al.	2014-10-02
Detector and inspecting apparatus Grant 8,796,621 - Hatakeyama , et al. August 5, 2	2014-08-05
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ; et al.	2014-06-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2	2014-06-03
Detector And Inspecting Apparatus App 20130228684 - Hatakeyama; Masahiro ; et al.	2013-09-05
Detector and inspecting apparatus Grant 8,431,892 - Hatakeyama , et al. April 30, 2	2013-04-30
Detector and inspecting apparatus Grant 7,928,382 - Hatakeyama , et al. April 19, 2	2011-04-19
Detector And Inspecting Apparatus App 20110024623 - HATAKEYAMA; Masahiro ; et al.	2011-02-03
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ; et al.	2010-09-23
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2	2010-06-22
Detector And Inspecting Apparatus App 20090224151 - Hatakeyama; Masahiro ; et al.	2009-09-10
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ; et al.	2009-04-23
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20080315095 - Nakasuji; Mamoru ; et al.	2008-12-25
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method Grant 7,425,703 - Nakasuji , et al. September 16, 2	2008-09-16
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2	2008-04-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2	2006-11-21
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ; et al.	2006-08-03
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20050214958 - Nakasuji, Mamoru ; et al.	2005-09-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ; et al.	2005-03-03

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