SUBRAMANIAN; Ramkumar

Patent Applications and Registrations

Patent applications and USPTO patent grants for SUBRAMANIAN; Ramkumar.The latest application filed is for "real time detection and monitoring of fluid volume and flow rate".

Company Profile

6.190.66

SUBRAMANIAN; Ramkumar - San Diego CA
SUBRAMANIAN; Ramkumar - Hyderabad IN
Subramanian; Ramkumar - Fremont CA
Subramanian; Ramkumar - Telangana IN
Subramanian; Ramkumar - Banjara Hills Hyderabad
Subramanian; Ramkumar - Sunnyvale CA US
Subramanian; Ramkumar - Peoria IL
Subramanian; Ramkumar - San Jose CA
Subramanian; Ramkumar - Redmond WA
Subramanian; Ramkumar - Kirkland WA
Subramanian; Ramkumar - Dallas TX
Subramanian; Ramkumar - Mountain View CA
Subramanian, Ramkumar - Sunnyval CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Real Time Detection And Monitoring Of Fluid Volume And Flow Rate App 20220126020 - ABAL; Daniel M. ; et al.	2022-04-28
Intravenous Fluid Container Volume Monitoring System App 20210401670 - ABAL; Daniel M. ; et al.	2021-12-30
Secure Inventory Access And Control Mechanism App 20210383631 - RAHILLY; Michael K. ; et al.	2021-12-09
Integrated Liquid Flow Closed Loop Sensing And Control App 20210369963 - ABAL; Daniel M. ; et al.	2021-12-02
Infusion Pump Sensing System App 20210369962 - ABAL; Daniel M. ; et al.	2021-12-02
Real Time Drip Chamber Monitor App 20210369959 - ABAL; Daniel M. ; et al.	2021-12-02
Wasting Station For Medications App 20210358257 - Abal; Daniel ; et al.	2021-11-18
Pyrrolo-pyridazine Derivatives As Muscarinic M1 Receptor Positive Allosteric Modulators App 20210340148 - NIROGI; Ramakrishna ; et al.	2021-11-04
Interactive Inventory Storage Device, System, And Method App 20210304135 - RAHILLY; Michael K. ; et al.	2021-09-30
Interactive inventory storage device, system, and method Grant 11,113,661 - Rahilly , et al. September 7, 2	2021-09-07
Modular Witnessing Device App 20210265032 - Burgess; Brendan John ; et al.	2021-08-26
Secure inventory access and control mechanism Grant 11,100,741 - Rahilly , et al. August 24, 2	2021-08-24
Secure Smart Container Assembly, Systems, And Methods App 20210201256 - RAHILLY; Michael K. ; et al.	2021-07-01
Secure smart container assembly, systems, and methods Grant 10,956,864 - Rahilly , et al. March 23, 2	2021-03-23
Smart Wasting Station For Medications App 20210027259 - Burgess; Brendan J. ; et al.	2021-01-28
Interactive Inventory Storage Device, System, And Method App 20200410446 - RAHILLY; Michael ; et al.	2020-12-31
Secure Smart Container Assembly, Systems, And Methods App 20200410433 - RAHILLY; Michael ; et al.	2020-12-31
Secure Inventory Access And Control Mechanism App 20200410801 - RAHILLY; Michael ; et al.	2020-12-31
Method of tungsten etching Grant RE47,650 - Subramanian , et al. Oc	2019-10-15
Fluoroindole derivatives as muscarinic M1 receptor positive allosteric modulators Grant 10,294,217 - Nirogi , et al.	2019-05-21
System and method for detecting a process point in multi-mode pulse processes Grant 10,242,849 - Kabouzi , et al.	2019-03-26
Fluoroindole Derivatives as Muscarinic M1 Receptor Positive Allosteric Modulators App 20180244655 - Nirogi; Ramakrishna ; et al.	2018-08-30
Amide compounds as 5-HT4 receptor agonists Grant 9,957,257 - Nirogi , et al. May 1, 2	2018-05-01
Amide Compounds As 5-ht4 Receptor Agonists App 20180051011 - NIROGI; Ramakrishna ; et al.	2018-02-22
System And Method For Detecting A Process Point In Mult-mode Pulse Processes App 20170207070 - Kabouzi; Yassine ; et al.	2017-07-20
System and Method for Detecting a Process Point in Multi-Mode Pulse Processes App 20160111261 - Kabouzi; Yassine ; et al.	2016-04-21
Method of tungsten etching Grant 9,230,825 - Subramanian , et al. January 5, 2	2016-01-05
In-situ generation of the molecular etcher carbonyl fluoride or any of its variants and its use Grant 8,932,406 - Mitchell , et al. January 13, 2	2015-01-13
Method Of Tungsten Etching App 20140120727 - SUBRAMANIAN; Ramkumar ; et al.	2014-05-01
In-situ Generation Of The Molecular Etcher Carbonyl Fluoride Or Any Of Its Variants And Its Use App 20140060571 - Mitchell; Glenn ; et al.	2014-03-06
In-situ Tco Chamber Clean App 20140060574 - Wyse; Carrie ; et al.	2014-03-06
Systems and methods that control liquid temperature in immersion lithography to maintain temperature gradient to reduce turbulence Grant 8,547,521 - Dakshina-Murthy , et al. October 1, 2	2013-10-01
Vehicle collision avoidance system Grant 8,423,280 - Edwards , et al. April 16, 2	2013-04-16
Vehicle Collision Avoidance System App 20130027559 - EDWARDS; David ; et al.	2013-01-31
Vehicle collision avoidance system Grant 8,280,621 - Edwards , et al. October 2, 2	2012-10-02
Vehicle Collision Avoidance System App 20120245798 - Coats; Robert Martin ; et al.	2012-09-27
Vehicle collision avoidance system Grant 8,170,787 - Coats , et al. May 1, 2	2012-05-01
Machine guidance system Grant 8,099,205 - Coats , et al. January 17, 2	2012-01-17
System and method for imprint lithography to facilitate dual damascene integration with two imprint acts Grant 8,007,631 - Dakshina-Murthy , et al. August 30, 2	2011-08-30
Inverse resist coating process Grant 7,943,289 - Rangarajan , et al. May 17, 2	2011-05-17
Colorization Of Bitmaps App 20110043535 - Kwiatkowski; Paul J. ; et al.	2011-02-24
Surface treatment with an acidic composition to prevent substrate and environmental contamination Grant 7,799,514 - Subramanian , et al. September 21, 2	2010-09-21
Machine guidance system App 20100010703 - Coats; Robert M. ; et al.	2010-01-14
Mask having sidewall absorbers to enable the printing of finer features in nanoprint lithography (1XMASK) Grant 7,604,903 - Singh , et al. October 20, 2	2009-10-20
Vehicle collision avoidance system App 20090259400 - Coats; Robert Martin ; et al.	2009-10-15
Vehicle collision avoidance system App 20090259401 - Edwards; David ; et al.	2009-10-15
Recirculation and reuse of dummy dispensed resist Grant 7,591,902 - Rangarajan , et al. September 22, 2	2009-09-22
Personalization of user accessibility options Grant 7,554,522 - Sinclair, II , et al. June 30, 2	2009-06-30
Positioning of nanoparticles and fabrication of single election devices Grant 7,465,953 - Koh , et al. December 16, 2	2008-12-16
Feedback control of imprint mask feature profile using scatterometry and spacer etchback Grant 7,449,348 - Dakshina-Murthy , et al. November 11, 2	2008-11-11
Imprint lithography mask trimming for imprint mask using etch Grant 7,384,569 - Dakshina-Murthy , et al. June 10, 2	2008-06-10
Post fabrication CD modification on imprint lithography mask Grant 7,386,162 - Dakshina-Murthy , et al. June 10, 2	2008-06-10
Using supercritical fluids to clean lenses and monitor defects Grant 7,381,278 - Subramanian , et al. June 3, 2	2008-06-03
Topography compensation of imprint lithography patterning Grant 7,376,259 - Dakshina-Murthy , et al. May 20, 2	2008-05-20
Method of making an organic memory cell Grant 7,374,654 - Chang , et al. May 20, 2	2008-05-20
Two mask photoresist exposure pattern for dense and isolated regions Grant 7,368,225 - Subramanian , et al. May 6, 2	2008-05-06
Silicon-containing resist to pattern organic low k-dielectrics Grant 7,309,659 - Subramanian , et al. December 18, 2	2007-12-18
Extraction of tool independent line-edge-roughness (LER) measurements using in-line programmed LER and reliability structures Grant 7,310,155 - Capodieci , et al. December 18, 2	2007-12-18
System And Method For Imprint Lithography To Facilitate Dual Damascene Integration With Two Imprint Acts App 20070283883 - Dakshina-Murthy; Srikanteswara ; et al.	2007-12-13
Method for manufacturing place & route based on 2-D forbidden patterns Grant 7,305,645 - Capodieci , et al. December 4, 2	2007-12-04
Recirculation And Reuse Of Dummy Dispensed Resist App 20070261636 - Rangarajan; Bharath ; et al.	2007-11-15
Systems and methods of imprint lithography with adjustable mask Grant 7,295,288 - Subramanian , et al. November 13, 2	2007-11-13
Frame structure for turbulence control in immersion lithography Grant 7,289,193 - Subramanian , et al. October 30, 2	2007-10-30
Organic BARC with adjustable etch rate Grant 7,262,138 - Singh , et al. August 28, 2	2007-08-28
Use of supercritical fluid to dry wafer and clean lens in immersion lithography Grant 7,262,422 - Subramanian , et al. August 28, 2	2007-08-28
Osmotic dosage form with controlled release and fast release aspects App 20070190137 - Iran; Reyes ; et al.	2007-08-16
In-situ reticle contamination detection system at exposure wavelength Grant 7,251,033 - Phan , et al. July 31, 2	2007-07-31
Using scatterometry to verify contact hole opening during tapered bilayer etch Grant 7,235,414 - Subramanian , et al. June 26, 2	2007-06-26
System and method for imprint lithography to facilitate dual damascene integration with two imprint acts Grant 7,235,474 - Dakshina-Murthy , et al. June 26, 2	2007-06-26
In-situ defect monitor and control system for immersion medium in immersion lithography Grant 7,224,456 - Phan , et al. May 29, 2	2007-05-29
Composite alignment mark scheme for multi-layers in lithography Grant 7,221,060 - Singh , et al. May 22, 2	2007-05-22
Systems and methods that employ exposure compensation to provide uniform CD control on reticle during fabrication Grant 7,187,796 - Phan , et al. March 6, 2	2007-03-06
Use of supercritical fluid to dry wafer and clean lens in immersion lithography App 20070026345 - Subramanian; Ramkumar ; et al.	2007-02-01
Real time immersion medium control using scatterometry Grant 7,158,896 - Singh , et al. January 2, 2	2007-01-02
Using supercritical fluids to clean lenses and monitor defects Grant 7,156,925 - Subramanian , et al. January 2, 2	2007-01-02
Re-circulation and reuse of dummy-dispensed resist Grant 7,153,364 - Rangarajan , et al. December 26, 2	2006-12-26
SO.sub.2 treatment of oxidized CuO for copper sulfide formation of memory element growth Grant 7,115,440 - Lyons , et al. October 3, 2	2006-10-03
Surface oxide tabulation and photo process control and cost savings Grant 7,109,046 - Subramanian , et al. September 19, 2	2006-09-19
System and method for creation of semiconductor multi-sloped features Grant 7,084,988 - Rangarajan , et al. August 1, 2	2006-08-01
Dual layer patterning scheme to make dual damascene Grant 7,078,348 - Singh , et al. July 18, 2	2006-07-18
Scatterometry and acoustic based active control of thin film deposition process Grant 7,079,975 - Halliyal , et al. July 18, 2	2006-07-18
Scatterometry monitor in cluster process tool environment for advanced process control (APC) Grant 7,076,320 - Phan , et al. July 11, 2	2006-07-11
Personalization of user accessibility options App 20060139312 - Sinclair; Robert E. II ; et al.	2006-06-29
Optical monitoring and control of two layers of liquid immersion media Grant 7,065,427 - Dakshina-Murthy , et al. June 20, 2	2006-06-20
Non-lithographic shrink techniques for improving line edge roughness and using imperfect (but simpler) BARCs Grant 7,064,846 - Amblard , et al. June 20, 2	2006-06-20
Shallow trench isolation polish stop layer for reduced topography Grant 7,056,804 - Lyons , et al. June 6, 2	2006-06-06
System and method using in situ scatterometry to detect photoresist pattern integrity during the photolithography process Grant 7,052,921 - Plat , et al. May 30, 2	2006-05-30
System and method for active control of etch process Grant 7,052,575 - Rangarajan , et al. May 30, 2	2006-05-30
System and method for defect identification and location using an optical indicia device Grant 7,034,930 - Subramanian , et al. April 25, 2	2006-04-25
Patterning for elongated V.sub.SS contact flash memory Grant 7,018,922 - Kim , et al. March 28, 2	2006-03-28
Sidewall formation for high density polymer memory element array Grant 7,015,504 - Lyons , et al. March 21, 2	2006-03-21
Metal bridging monitor for etch and CMP endpoint detection Grant 7,011,762 - Lyons , et al. March 14, 2	2006-03-14
Damascene process for a T-shaped gate electrode Grant 7,008,832 - Subramanian , et al. March 7, 2	2006-03-07
Means of delivering drugs in an ascending zero order release pattern App 20060034927 - Casadevall; Gemma ; et al.	2006-02-16
Refractive index system monitor and control for immersion lithography Grant 6,999,254 - Phan , et al. February 14, 2	2006-02-14
Scatterometry with grating to observe resist removal rate during etch Grant 6,982,043 - Subramanian , et al. January 3, 2	2006-01-03
Using scatterometry to detect and control undercut for ARC with developable BARCs Grant 6,972,201 - Subramanian , et al. December 6, 2	2005-12-06
Artificial intelligence system for track defect problem solving Grant 6,954,678 - Phan , et al. October 11, 2	2005-10-11
Organic memory cell formation on Ag substrate Grant 6,936,545 - Xie , et al. August 30, 2	2005-08-30
Copper oxide monitoring by scatterometry/ellipsometry during nitride or BLOK removal in damascene process Grant 6,934,032 - Subramanian , et al. August 23, 2	2005-08-23
Feed forward process control using scatterometry for reticle fabrication Grant 6,931,618 - Tabery , et al. August 16, 2	2005-08-16
Inverse resist coating process App 20050164133 - Rangarajan, Bharath ; et al.	2005-07-28
Comprehensive integrated lithographic process control system based on product design and yield feedback system Grant 6,915,177 - Phan , et al. July 5, 2	2005-07-05
Using scatterometry to obtain measurements of in circuit structures Grant 6,912,438 - Choo , et al. June 28, 2	2005-06-28
Growing copper vias or lines within a patterned resist using a copper seed layer Grant 6,905,950 - Subramanian , et al. June 14, 2	2005-06-14
Contact etch resistant spacers App 20050121738 - Gabriel, Calvin T. ; et al.	2005-06-09
Patterning for elliptical Vss contact on flash memory Grant 6,900,124 - Kim , et al. May 31, 2	2005-05-31
System for rapidly and uniformly cooling resist Grant 6,889,763 - Subramanian , et al. May 10, 2	2005-05-10
Sidewall formation for high density polymer memory element array App 20050092983 - Lyons, Christopher F. ; et al.	2005-05-05
Fab correlation system Grant 6,878,560 - Rangarajan , et al. April 12, 2	2005-04-12
Use of scatterometry as a control tool in the manufacture of extreme UV masks Grant 6,879,406 - Rangarajan , et al. April 12, 2	2005-04-12
Photosensitive polymeric memory elements Grant 6,878,961 - Lyons , et al. April 12, 2	2005-04-12
Systems and methods to determine seed layer thickness of trench sidewalls Grant 6,879,051 - Singh , et al. April 12, 2	2005-04-12
Method for forming SAC using a dielectric as a BARC and FICD enlarger Grant 6,878,622 - Yang , et al. April 12, 2	2005-04-12
E-beam flood exposure of spin-on material to eliminate voids in vias Grant 6,869,888 - Plat , et al. March 22, 2	2005-03-22
Photosensitive Polymeric Memory Elements App 20050045877 - Lyons, Christopher F. ; et al.	2005-03-03
Monitor and control of silicidation using fourier transform infrared scatterometry Grant 6,849,469 - Thuruthiyil , et al. February 1, 2	2005-02-01
N-containing plasma etch process with reduced resist poisoning Grant 6,846,749 - Gabriel , et al. January 25, 2	2005-01-25
Refractive index system monitor and control for immersion lithography Grant 6,844,206 - Phan , et al. January 18, 2	2005-01-18
System for monitoring and analyzing diagnostic data of spin tracks Grant 6,845,345 - Singh , et al. January 18, 2	2005-01-18
System and method of forming a passive layer by a CMP process Grant 6,836,398 - Subramanian , et al. December 28, 2	2004-12-28
System and method for active control of BPSG deposition Grant 6,828,162 - Halliyal , et al. December 7, 2	2004-12-07
Lithography contrast enhancement technique by varying focus with wavelength modulation Grant 6,829,040 - Kye , et al. December 7, 2	2004-12-07
Photosensitive polymeric memory elements Grant 6,825,060 - Lyons , et al. November 30, 2	2004-11-30
Apparatus of monitoring and optimizing the development of a photoresist material Grant 6,819,427 - Subramanian , et al. November 16, 2	2004-11-16
In situ monitoring of sheet resistivity of silicides during rapid thermal annealing using electrical methods Grant 6,815,229 - Halliyal , et al. November 9, 2	2004-11-09
Topographically aligned layers and method for adjusting the relative alignment of layers and apparatus therefor Grant 6,813,574 - Yedur , et al. November 2, 2	2004-11-02
Model based metal overetch control Grant 6,808,591 - Phan , et al. October 26, 2	2004-10-26
System and method to monitor reticle heating Grant 6,809,793 - Phan , et al. October 26, 2	2004-10-26
Two mask photoresist exposure pattern for dense and isolated regions Grant 6,803,178 - Subramanian , et al. October 12, 2	2004-10-12
Silicon containing material for patterning polymeric memory element Grant 6,803,267 - Subramanian , et al. October 12, 2	2004-10-12
Methods and dosage forms with modified layer geometry App 20040197407 - Subramanian, Ramkumar ; et al.	2004-10-07
Polymer memory device formed in via opening Grant 6,787,458 - Tripsas , et al. September 7, 2	2004-09-07
Methods and dosage forms with modified viscosity layers App 20040166160 - Subramanian, Ramkumar ; et al.	2004-08-26
Methods of forming passive layers in organic memory cells Grant 6,773,954 - Subramanian , et al. August 10, 2	2004-08-10
Scatterometry based measurements of a rotating substrate Grant 6,771,374 - Rangarajan , et al. August 3, 2	2004-08-03
Scatterometry of grating structures to monitor wafer stress Grant 6,771,356 - Lyons , et al. August 3, 2	2004-08-03
System and method for control of hardmask etch to prevent pattern collapse of ultra-thin resists Grant 6,762,133 - Rangarajan , et al. July 13, 2	2004-07-13
System and method for developer endpoint detection by reflectometry or scatterometry Grant 6,758,612 - Tabery , et al. July 6, 2	2004-07-06
Method of enhancing gate patterning properties with reflective hard mask Grant 6,753,266 - Lukanc , et al. June 22, 2	2004-06-22
Method(s) facilitating formation of memory cell(s) and patterned conductive Grant 6,753,247 - Okoroanyanwu , et al. June 22, 2	2004-06-22
Effect of substrate surface treatment on 193 NM resist processing Grant 6,746,973 - Labelle , et al. June 8, 2	2004-06-08
Method and system to monitor and control electro-static discharge Grant 6,741,445 - Phan , et al. May 25, 2	2004-05-25
Dual damascene process utilizing a bi-layer imaging layer Grant 6,737,222 - Subramanian , et al. May 18, 2	2004-05-18
Gate oxide thickness measurement and control using scatterometry Grant 6,727,995 - Halliyal , et al. April 27, 2	2004-04-27
Using scatterometry to obtain measurements of in circuit structures App 20040078108 - Choo, Bryan K. ; et al.	2004-04-22
Monitoring of concentration of nitrogen in nitrided gate oxides, and gate oxide interfaces Grant 6,721,046 - Halliyal , et al. April 13, 2	2004-04-13
Comprehensive integrated lithographic process control system based on product design and yield feedback system App 20040063009 - Phan, Khoi A. ; et al.	2004-04-01
Use of scatterometry/reflectometry to measure thin film delamination during CMP Grant 6,702,648 - Avanzino , et al. March 9, 2	2004-03-09
Scatterometry based measurements of a moving substrate Grant 6,704,101 - Rangarajan , et al. March 9, 2	2004-03-09
Process for forming a photoresist mask Grant 6,689,541 - Bell , et al. February 10, 2	2004-02-10
System using hot and cold fluids to heat and cool plate Grant 6,685,467 - Subramanian February 3, 2	2004-02-03
Dual damascene trench depth monitoring Grant 6,686,270 - Subramanian , et al. February 3, 2	2004-02-03
Sensor to predict void free films using various grating structures and characterize fill performance Grant 6,684,172 - Subramanian , et al. January 27, 2	2004-01-27
Growing a dual damascene structure using a copper seed layer and a damascene resist structure Grant 6,670,271 - Subramanian , et al. December 30, 2	2003-12-30
Vapor drying for cleaning photoresists Grant 6,663,723 - Templeton , et al. December 16, 2	2003-12-16
Process for etching an organic dielectric using a silyated photoresist mask Grant 6,660,645 - Bell , et al. December 9, 2	2003-12-09
Dual damascene with silicon carbide middle etch stop layer/ARC Grant 6,656,830 - Subramanian , et al. December 2, 2	2003-12-02
Spin on polymers for organic memory devices Grant 6,656,763 - Oglesby , et al. December 2, 2	2003-12-02
Method of forming a ground in SOI structures Grant 6,653,221 - Subramanian , et al. November 25, 2	2003-11-25
Controlling thermal expansion of mask substrates by scatterometry Grant 6,654,660 - Singh , et al. November 25, 2	2003-11-25
Scatterometry techniques to ascertain asymmetry profile of features and generate a feedback or feedforward process control data associated therewith Grant 6,650,422 - Singh , et al. November 18, 2	2003-11-18
System and method for in situ control of post exposure bake time and temperature Grant 6,641,963 - Rangarajan , et al. November 4, 2	2003-11-04
System for uniformly heating photoresist Grant 6,643,604 - Subramanian , et al. November 4, 2	2003-11-04
Parallel plate development Grant 6,634,805 - Templeton , et al. October 21, 2	2003-10-21
System and method for illuminating a semiconductor processing system Grant 6,632,283 - Singh , et al. October 14, 2	2003-10-14
Method for forming an interconnect structure using a CVD organic BARC to mitigate via poisoning Grant 6,632,707 - Wang , et al. October 14, 2	2003-10-14
X-ray reflectance system to determine suitability of SiON ARC layer Grant 6,633,392 - Singh , et al. October 14, 2	2003-10-14
Integrated pressure sensor for measuring multiaxis pressure gradients App 20030188829 - Rangarajan, Bharath ; et al.	2003-10-09
Active control of developer time and temperature Grant 6,629,786 - Rangarajan , et al. October 7, 2	2003-10-07
Use of scatterometry for in-situ control of gaseous phase chemical trim process Grant 6,630,361 - Singh , et al. October 7, 2	2003-10-07
System and method for facilitating selection of optimized optical proximity correction Grant 6,622,547 - Phan , et al. September 23, 2	2003-09-23
Metal bridging monitor for etch and CMP endpoint detection Grant 6,624,642 - Lyons , et al. September 23, 2	2003-09-23
Use of scatterometry to measure pattern accuracy Grant 6,617,087 - Rangarajan , et al. September 9, 2	2003-09-09
Reducing resist residue defects in open area on patterned wafer using trim mask Grant 6,613,500 - Phan , et al. September 2, 2	2003-09-02
Chemical treatment to strengthen photoresists to prevent pattern collapse Grant 6,605,413 - Lyons , et al. August 12, 2	2003-08-12
Dual bake for BARC fill without voids Grant 6,605,546 - Subramanian , et al. August 12, 2	2003-08-12
CVD plasma process to fill contact hole in damascene process Grant 6,605,855 - Singh , et al. August 12, 2	2003-08-12
Scatterometry based active control of exposure conditions Grant 6,602,727 - Rangarajan , et al. August 5, 2	2003-08-05
Slot via filled dual damascene interconnect structure without middle etch stop layer Grant 6,603,206 - Wang , et al. August 5, 2	2003-08-05
Use of organic spin on materials as a stop-layer for local interconnect, contact and via layers Grant 6,596,623 - Subramanian , et al. July 22, 2	2003-07-22
Carbon nanotubes as linewidth standards for SEM & AFM Grant 6,591,658 - Yedur , et al. July 15, 2	2003-07-15
Process integration of electrical thickness measurement of gate oxide and tunnel oxides by corona discharge technique Grant 6,593,748 - Halliyal , et al. July 15, 2	2003-07-15
Monitor CMP process using scatterometry Grant 6,594,024 - Singh , et al. July 15, 2	2003-07-15
Oxide/nitride or oxide/nitride/oxide thickness measurement using scatterometry Grant 6,589,804 - Halliyal , et al. July 8, 2	2003-07-08
Using scatterometry to measure resist thickness and control implant Grant 6,579,733 - Rangarajan , et al. June 17, 2	2003-06-17
Method of making a semiconductor device by annealing a metal layer to form metal silicide and using the metal silicide as a hard mask to pattern a polysilicon layer Grant 6,566,214 - Lyons , et al. May 20, 2	2003-05-20
Wafer based temperature sensors for characterizing chemical mechanical polishing processes Grant 6,562,185 - Avanzino , et al. May 13, 2	2003-05-13
Critical dimension monitoring from latent image Grant 6,561,706 - Singh , et al. May 13, 2	2003-05-13
Active control of phase shift mask etching process Grant 6,562,248 - Subramanian , et al. May 13, 2	2003-05-13
Measuring BARC thickness using scatterometry Grant 6,558,965 - Singh , et al. May 6, 2	2003-05-06
Nozzle arm movement for resist development App 20030068430 - Subramanian, Ramkumar ; et al.	2003-04-10
Using scatterometry for etch end points for dual damascene process Grant 6,545,753 - Subramanian , et al. April 8, 2	2003-04-08
Wafer Based Temperature Sensors For Characterizing Chemical Mechanical Polishing Processes App 20030055526 - Avanzino, Steven C. ; et al.	2003-03-20
In-situ or ex-situ profile monitoring of phase openings on alternating phase shifting masks by scatterometry App 20030052084 - Tabery, Cyrus E. ; et al.	2003-03-20
Chemical feature doubling process Grant 6,534,243 - Templeton , et al. March 18, 2	2003-03-18
Use of silicon containing imaging layer to define sub-resolution gate structures Grant 6,534,418 - Plat , et al. March 18, 2	2003-03-18
Low k ILD process by removable ILD Grant 6,524,944 - Rangarajan , et al. February 25, 2	2003-02-25
Slotted trench dual inlaid structure and method of forming thereof Grant 6,524,947 - Subramanian , et al. February 25, 2	2003-02-25
System and method for facilitating selection of optimized optical proximity correction Grant 6,510,730 - Phan , et al. January 28, 2	2003-01-28
Critical dimension monitoring from latent image App 20030002878 - Singh, Bhanwar ; et al.	2003-01-02
Using scatterometry to develop real time etch image App 20030000922 - Subramanian, Ramkumar ; et al.	2003-01-02
Growing copper vias or lines within a patterned resist using a copper seed layer App 20030003701 - Subramanian, Ramkumar ; et al.	2003-01-02
Using scatterometry for etch end points for dual damascene process App 20030000644 - Subramanian, Ramkumar ; et al.	2003-01-02
Automated periodic focus and exposure calibration of a lithography stepper Grant 6,501,534 - Singh , et al. December 31, 2	2002-12-31
Super critical drying of low k materials Grant 6,486,078 - Rangarajan , et al. November 26, 2	2002-11-26
Method for forming self-aligned contacts and local interconnects using decoupled local interconnect process Grant 6,482,699 - Hu , et al. November 19, 2	2002-11-19
Dual damascene using removable via studs App 20020164544 - Luckanc, Todd P. ; et al.	2002-11-07
Interconnect structure with silicon containing alicyclic polymers and low-k dielectric materials and method of making same with single and dual damascene techniques Grant 6,475,904 - Okoroanyanwu , et al. November 5, 2	2002-11-05
Modification of mask layout data to improve mask fidelity App 20020160281 - Subramanian, Ramkumar ; et al.	2002-10-31
Inverse resist coating process App 20020155389 - Rangarajan, Bharath ; et al.	2002-10-24
Silicon carbide barc in dual damascene processing Grant 6,465,889 - Subramanian , et al. October 15, 2	2002-10-15
Using UV/VIS spectrophotometry to regulate developer solution during a development process Grant 6,458,607 - Rangarajan , et al. October 1, 2	2002-10-01
Scatterometry techniques to ascertain asymmetry profile of features and generate feedback or feedforward process control data associated therewith App 20020135781 - Singh, Bhanwar ; et al.	2002-09-26
Damascene processing using a silicon carbide hard mask Grant 6,455,409 - Subramanian , et al. September 24, 2	2002-09-24
Developer soluble dyed BARC for dual damascene process Grant 6,455,416 - Subramanian , et al. September 24, 2	2002-09-24
Using scatterometry to measure resist thickness and control implant Grant 6,451,621 - Rangarajan , et al. September 17, 2	2002-09-17
UV-enhanced silylation process to increase etch resistance of ultra thin resists Grant 6,451,512 - Rangarajan , et al. September 17, 2	2002-09-17
Damascene Processing Employing Low Si-sion Etch Stop Layer/arc App 20020123217 - Subramanian, Ramkumar ; et al.	2002-09-05
Modification of mask layout data to improve mask fidelity Grant 6,444,373 - Subramanian , et al. September 3, 2	2002-09-03
Electron beam flood exposure technique to reduce the carbon contamination Grant 6,444,381 - Singh , et al. September 3, 2	2002-09-03
Slot via filled dual damascene structure without middle stop layer and method for making the same App 20020106889 - Wang, Fei ; et al.	2002-08-08
Method Of Fabricating A Slot Dual Damascene Structure Without Middle Stop Layer App 20020106885 - Wang, Fei ; et al.	2002-08-08
Method of fabricating dual damascene with silicon carbide via mask/ARC Grant 6,429,121 - Hopper , et al. August 6, 2	2002-08-06
T-gate formation using a modified conventional poly process Grant 6,417,084 - Singh , et al. July 9, 2	2002-07-09
Dual damascene process utilizing a bi-layer imaging layer App 20020061470 - Subramanian, Ramkumar ; et al.	2002-05-23
Method of making a slot via filled dual damascene structure with middle stop layer Grant 6,391,766 - Wang , et al. May 21, 2	2002-05-21
RELACS process to double the frequency or pitch of small feature formation Grant 6,383,952 - Subramanian , et al. May 7, 2	2002-05-07
Method of making a dual damascene structure without middle stop layer Grant 6,383,919 - Wang , et al. May 7, 2	2002-05-07
Method for making a slot via filled dual damascene low k interconnect structure without middle stop layer Grant 6,372,635 - Wang , et al. April 16, 2	2002-04-16
Use of carbon nanotubes to calibrate conventional tips used in AFM Grant 6,354,133 - Yedur , et al. March 12, 2	2002-03-12
Method of forming self-aligned contacts using consumable spacers Grant 6,348,379 - Wang , et al. February 19, 2	2002-02-19
Use of silicon oxynitride ARC for metal layers Grant 6,326,231 - Subramanian , et al. December 4, 2	2001-12-04
Use Of Silicon Oxynitride Arc For Metal Layers App 20010046791 - SUBRAMANIAN, RAMKUMAR ; et al.	2001-11-29
T-gate formation using modified damascene processing with two masks Grant 6,319,802 - Subramanian , et al. November 20, 2	2001-11-20
Tin Contact Barc For Tungsten Polished Contacts App 20010041444 - SHIELDS, JEFFREY A. ; et al.	2001-11-15
Y-gate formation using damascene processing Grant 6,313,019 - Subramanian , et al. November 6, 2	2001-11-06
Method for using a CVD organic barc as a hard mask during via etch Grant 6,309,955 - Subramanian , et al. October 30, 2	2001-10-30
Use of dual patterning masks for printing holes of small dimensions Grant 6,306,769 - Subramanian , et al. October 23, 2	2001-10-23
Dual damascene method for backened metallization using poly stop layers App 20010027003 - Rangarajan, Bharath ; et al.	2001-10-04
Use of an existing product map as a background for making test masks Grant 6,279,147 - Buynoski , et al. August 21, 2	2001-08-21
Chemical resist thickness reduction process Grant 6,274,289 - Subramanian , et al. August 14, 2	2001-08-14
Interconnect Structure With Silicon Containing Alicyclic Polymers And Low-k Dieletric Materials And Method Of Making Same With Single And Dual Damascene Techniques App 20010012689 - OKOROANYANWU, UZODINMA ; et al.	2001-08-09
Damascene T-gate using a relacs flow Grant 6,270,929 - Lyons , et al. August 7, 2	2001-08-07
Ozone cleaning of wafers App 20010010229 - Subramanian, Ramkumar ; et al.	2001-08-02
Damascene T-gate using a spacer flow Grant 6,255,202 - Lyons , et al. July 3, 2	2001-07-03
Apparatus and method for reducing defects in a semiconductor lithographic process Grant 6,222,936 - Phan , et al. April 24, 2	2001-04-24
CVD plasma process to fill contact hole in damascene process Grant 6,187,666 - Singh , et al. February 13, 2	2001-02-13
Antireflective siliconoxynitride hardmask layer used during etching processes in integrated circuit fabrication Grant 6,060,380 - Subramanian , et al. May 9, 2	2000-05-09
Method for reducing defects in a semiconductor lithographic process Grant 5,985,497 - Phan , et al. November 16, 1	1999-11-16

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