Subramani; Anantha

Patent Applications and Registrations

Patent applications and USPTO patent grants for Subramani; Anantha.The latest application filed is for "photoresist deposition using independent multichannel showerhead".

Company Profile

13.34.47

Subramani; Anantha - San Jose CA
SUBRAMANI; Anantha - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Photoresist Deposition Using Independent Multichannel Showerhead App 20220155689 - Houshmand; Farzad ; et al.	2022-05-19
Apparatus Design For Photoresist Deposition App 20220049350 - Houshmand; Farzad ; et al.	2022-02-17
Clean Unit For Chamber Exhaust Cleaning App 20210391156 - Chan; Kelvin ; et al.	2021-12-16
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices App 20210328104 - Zhu; Mingwei ; et al.	2021-10-21
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices Grant 11,081,623 - Zhu , et al. August 3, 2	2021-08-03
PVD buffer layers for LED fabrication Grant 11,011,676 - Zhu , et al. May 18, 2	2021-05-18
Processing tool having a monitoring device Grant 10,957,565 - Mao , et al. March 23, 2	2021-03-23
Cooled reflective adapter plate for a deposition chamber Grant 10,903,067 - Goel , et al. January 26, 2	2021-01-26
Processing Tool Having A Monitoring Device App 20200357669 - Mao; Shimin ; et al.	2020-11-12
Processing tool having a monitoring device Grant 10,763,143 - Mao , et al. Sep	2020-09-01
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices App 20200127164 - Zhu; Mingwei ; et al.	2020-04-23
Cooled Reflective Adapter Plate For A Deposition Chamber App 20200098559 - GOEL; Ashish ; et al.	2020-03-26
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices Grant 10,546,973 - Zhu , et al. Ja	2020-01-28
Cooled reflective adapter plate for a deposition chamber Grant 10,504,719 - Goel , et al. Dec	2019-12-10
Single Process Volume To Perform High-pressure And Low-pressure Processes With Features To Reduce Cross-contamination App 20190352774 - Chan; Kelvin ; et al.	2019-11-21
Multi-zone Collimator For Selective Pvd App 20190353919 - MEBARKI; BENCHERKI ; et al.	2019-11-21
Resonant Process Monitor App 20190287758 - PAN; Yaoling ; et al.	2019-09-19
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices App 20190172973 - Zhu; Mingwei ; et al.	2019-06-06
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices Grant 10,236,412 - Zhu , et al.	2019-03-19
Processing Tool Having A Monitoring Device App 20190057889 - Mao; Shimin ; et al.	2019-02-21
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices Grant 10,193,014 - Zhu , et al. Ja	2019-01-29
Aluminum-nitride buffer and active layers by physical vapor deposition Grant 10,109,481 - Zhu , et al. October 23, 2	2018-10-23
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices App 20180261720 - ZHU; Mingwei ; et al.	2018-09-13
Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices Grant 9,929,310 - Zhu , et al. March 27, 2	2018-03-27
Off-angled heating of the underside of a substrate using a lamp assembly Grant 9,863,038 - Ewert , et al. January 9, 2	2018-01-09
Apparatus and method for depositing electronically conductive pasting material Grant 9,666,416 - Forster , et al. May 30, 2	2017-05-30
Pvd Buffer Layers For Led Fabrication App 20160293798 - Zhu; Mingwei ; et al.	2016-10-06
PVD buffer layers for LED fabrication Grant 9,396,933 - Zhu , et al. July 19, 2	2016-07-19
Edge ring for a deposition chamber Grant 9,376,752 - Goel , et al. June 28, 2	2016-06-28
Apparatus And Method For Depositing Electronically Conductive Pasting Material App 20160086775 - FORSTER; John C. ; et al.	2016-03-24
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices App 20160035937 - Zhu; Mingwei ; et al.	2016-02-04
Apparatus and method for depositing electrically conductive pasting material Grant 9,224,582 - Forster , et al. December 29, 2	2015-12-29
Aluminum-nitride Buffer And Active Layers By Physical Vapor Deposition App 20150348773 - ZHU; Mingwei ; et al.	2015-12-03
Wafer processing deposition shielding components Grant 9,062,379 - Riker , et al. June 23, 2	2015-06-23
Wafer Processing Deposition Shielding Components App 20150162171 - Riker; Martin Lee ; et al.	2015-06-11
Oxygen Controlled PVD Aluminum Nitride Buffer for Gallium Nitride-Based Optoelectronic and Electronic Devices App 20140264363 - Zhu; Mingwei ; et al.	2014-09-18
Post deposition treatments for CVD cobalt films Grant 8,765,601 - Lei , et al. July 1, 2	2014-07-01
Wafer processing deposition shielding components Grant 8,696,878 - Riker , et al. April 15, 2	2014-04-15
Post Deposition Treatments For Cvd Cobalt Films App 20140011354 - LEI; Yu ; et al.	2014-01-09
Wafer Processing Deposition Shielding Components App 20130334038 - Riker; Martin Lee ; et al.	2013-12-19
Method And Apparatus For Substrate Preclean With Hydrogen Containing High Frequency Rf Plasma App 20130330920 - Liu; Guojun ; et al.	2013-12-12
Cooled Reflective Adapter Plate For A Deposition Chamber App 20130284096 - GOEL; Ashish ; et al.	2013-10-31
Pvd Buffer Layers For Led Fabrication App 20130285065 - Zhu; Mingwei ; et al.	2013-10-31
Edge Ring For A Deposition Chamber App 20130264035 - GOEL; Ashish ; et al.	2013-10-10
Post deposition treatments for CVD cobalt films Grant 8,524,600 - Lei , et al. September 3, 2	2013-09-03
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20130196514 - EWERT; Maurice E. ; et al.	2013-08-01
Post Deposition Treatments For Cvd Cobalt Films App 20120252207 - Lei; Yu ; et al.	2012-10-04
Wafer Processing Deposition Shielding Components App 20120211359 - Riker; Martin Lee ; et al.	2012-08-23
Ground shield with reentrant feature Grant 7,718,045 - Tiller , et al. May 18, 2	2010-05-18
Wafer Processing Deposition Shielding Components App 20090260982 - Riker; Martin Lee ; et al.	2009-10-22
Apparatus And Method For Depositing Electrically Conductive Pasting Material App 20090142512 - FORSTER; John ; et al.	2009-06-04
Resputtered Copper Seed Layer App 20080190760 - TANG; XIANMIN ; et al.	2008-08-14
Ground Shield With Reentrant Feature App 20070295602 - Tiller; Jennifer W. ; et al.	2007-12-27
Simultaneous ion milling and sputter deposition App 20070051622 - Tang; Xianmin ; et al.	2007-03-08
Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system Grant 7,163,607 - Stimson , et al. January 16, 2	2007-01-16
Magnetron for a vault shaped sputtering target having two opposed sidewall magnets Grant 6,790,326 - Subramani , et al. September 14, 2	2004-09-14
Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system App 20040173156 - Stimson, Bradley O. ; et al.	2004-09-09
Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system Grant 6,723,214 - Stimson , et al. April 20, 2	2004-04-20
Aluminum deposition shield Grant 6,589,407 - Subramani , et al. July 8, 2	2003-07-08
Magnetron for a vault shaped sputtering target having two opposed sidewall magnets App 20020148725 - Subramani, Anantha ; et al.	2002-10-17
Magnetron with a rotating center magnet for a vault shaped sputtering target Grant 6,406,599 - Subramani , et al. June 18, 2	2002-06-18
Apparatus for improved power coupling through a workpiece in a semiconductor waffer processing system App 20020053513 - Stimson, Bradley O. ; et al.	2002-05-09
Recessed coil for generating a plasma App 20010019016 - Subramani, Anantha ; et al.	2001-09-06
Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system Grant 6,219,219 - Hausmann , et al. April 17, 2	2001-04-17
Embossed semiconductor fabrication parts Grant 6,162,297 - Mintz , et al. December 19, 2	2000-12-19

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.