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Patent applications and USPTO patent grants for Subrahmanyam; Sudhakar.The latest application filed is for "film to tie up loose fluorine in the chamber after a clean process".
Patent | Date |
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Film to tie up loose fluorine in the chamber after a clean process Grant 6,223,685 - Gupta , et al. May 1, 2 | 2001-05-01 |
Method and apparatus for improving film stability of halogen-doped silicon oxide films Grant 6,090,167 - Bhan , et al. July 18, 2 | 2000-07-18 |
Method and apparatus for determining the endpoint in a plasma cleaning process Grant 6,079,426 - Subrahmanyam , et al. June 27, 2 | 2000-06-27 |
Film to tie up loose fluorine in the chamber after a clean process Grant 6,020,035 - Gupta , et al. February 1, 2 | 2000-02-01 |
Method and apparatus for improving film stability of halogen-doped silicon oxide films Grant 6,001,728 - Bhan , et al. December 14, 1 | 1999-12-14 |
Method for improving film stability of fluorosilicate glass films Grant 5,827,785 - Bhan , et al. October 27, 1 | 1998-10-27 |
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