Patent | Date |
---|
Shock wave visualization for extreme ultraviolet plasma optimization Grant 11,452,197 - Su , et al. September 20, 2 | 2022-09-20 |
Target Control In Extreme Ultraviolet Lithography Systems Using Aberration Of Reflection Image App 20220283507 - CHENG; Ting-Ya ;   et al. | 2022-09-08 |
Target control in extreme ultraviolet lithography systems using aberration of reflection image Grant 11,340,531 - Cheng , et al. May 24, 2 | 2022-05-24 |
Target Control In Extreme Ultraviolet Lithography Systems Using Aberration Of Reflection Image App 20220011675 - CHENG; Ting-Ya ;   et al. | 2022-01-13 |
Apparatus and method for generating extreme ultraviolet radiation Grant 11,153,959 - Hsu , et al. October 19, 2 | 2021-10-19 |
Thermal Controlling Method In Lithography System App 20210318625 - YANG; Chi ;   et al. | 2021-10-14 |
Method for fabricating magnetic core Grant 11,133,374 - Su , et al. September 28, 2 | 2021-09-28 |
Control System For Plasma Chamber Having Controllable Valve App 20210010137 - SU; Yen-Shuo ;   et al. | 2021-01-14 |
Control system for plasma chamber having controllable valve and method of using the same Grant 10,787,742 - Su , et al. September 29, 2 | 2020-09-29 |
Shock Wave Visualization For Extreme Ultraviolet Plasma Optimization App 20200137864 - SU; Yen-Shuo ;   et al. | 2020-04-30 |
Method For Fabricating Magnetic Core App 20200066832 - SU; Yen-Shuo ;   et al. | 2020-02-27 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation App 20200060015 - HSU; Chun-Chia ;   et al. | 2020-02-20 |
Euv Light Source And Apparatus For Lithography App 20200008290 - SU; Yen-Shuo ;   et al. | 2020-01-02 |
Method for fabricating magnetic core Grant 10,461,145 - Su , et al. Oc | 2019-10-29 |
Wind-proof umbrella Grant 10,264,861 - Su | 2019-04-23 |
Magnetic memory with metal oxide etch stop layer and method for manufacturing the same Grant 10,170,536 - Hsu , et al. J | 2019-01-01 |
Magnetic Memory With Metal Oxide Etch Stop Layer And Method For Manufacturing The Same App 20180366536 - HSU; HUNG-WEN ;   et al. | 2018-12-20 |
Wind-proof Umbrella App 20180271238 - Su; Yen-Shuo | 2018-09-27 |
Method For Fabricating Magnetic Core App 20180166527 - SU; Yen-Shuo ;   et al. | 2018-06-14 |
Control System For Plasma Chamber Having Controllable Valve And Method Of Using The Same App 20180073144 - SU; Yen-Shuo ;   et al. | 2018-03-15 |
Magnetic core, inductor, and method for fabricating the magnetic core Grant 9,893,141 - Su , et al. February 13, 2 | 2018-02-13 |
Multi-zone EPD detectors Grant 9,887,071 - Chen , et al. February 6, 2 | 2018-02-06 |
Plasma chamber having an upper electrode having controllable valves and a method of using the same Grant 9,840,778 - Su , et al. December 12, 2 | 2017-12-12 |
Integrated magnetic core inductor and methods of fabrications thereof Grant 9,799,721 - Kuo , et al. October 24, 2 | 2017-10-24 |
Integrated Magnetic Core Inductor and Methods of Fabrications Thereof App 20160307991 - Kuo; Chun-Tsung ;   et al. | 2016-10-20 |
Magnetic Core, Inductor, And Method For Fabricating The Magnetic Core App 20160254342 - SU; Yen-Shuo ;   et al. | 2016-09-01 |
Plasma Chamber Having An Upper Electrode Having Controllable Valves And A Method Of Using The Same App 20130319612 - SU; Yen-Shuo ;   et al. | 2013-12-05 |
Multi-zone EPD Detectors App 20130157387 - Chen; Chien-An ;   et al. | 2013-06-20 |
Double Patterning Strategy For Forming Fine Patterns In Photolithography App 20110059407 - LIN; Li-Te S. ;   et al. | 2011-03-10 |
Metal-insulator-metal capacitor structure Grant 6,934,143 - Chou , et al. August 23, 2 | 2005-08-23 |
Metal-insulator-metal capacitor structure App 20050073800 - Chou, You-Hua ;   et al. | 2005-04-07 |