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Su; Yen-Shuo Patent Filings

Su; Yen-Shuo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Su; Yen-Shuo.The latest application filed is for "target control in extreme ultraviolet lithography systems using aberration of reflection image".

Company Profile
10.16.21
  • Su; Yen-Shuo - Hsinchu TW
  • SU; Yen-Shuo - Hsinchu City TW
  • Su; Yen-Shuo - Hsinchu County TW
  • SU; Yen-Shuo - Zhubei City TW
  • Su; Yen-Shuo - Zhubei TW
  • Su; Yen-Shuo - Hsin-Chu TW
  • Su; Yen-Shuo - Hsin-Chu City TW
  • SU; Yen-Shuo - Jhubei City TW
  • Su; Yen-Shuo - Jhubei TW
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Shock wave visualization for extreme ultraviolet plasma optimization
Grant 11,452,197 - Su , et al. September 20, 2
2022-09-20
Target Control In Extreme Ultraviolet Lithography Systems Using Aberration Of Reflection Image
App 20220283507 - CHENG; Ting-Ya ;   et al.
2022-09-08
Target control in extreme ultraviolet lithography systems using aberration of reflection image
Grant 11,340,531 - Cheng , et al. May 24, 2
2022-05-24
Target Control In Extreme Ultraviolet Lithography Systems Using Aberration Of Reflection Image
App 20220011675 - CHENG; Ting-Ya ;   et al.
2022-01-13
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,153,959 - Hsu , et al. October 19, 2
2021-10-19
Thermal Controlling Method In Lithography System
App 20210318625 - YANG; Chi ;   et al.
2021-10-14
Method for fabricating magnetic core
Grant 11,133,374 - Su , et al. September 28, 2
2021-09-28
Control System For Plasma Chamber Having Controllable Valve
App 20210010137 - SU; Yen-Shuo ;   et al.
2021-01-14
Control system for plasma chamber having controllable valve and method of using the same
Grant 10,787,742 - Su , et al. September 29, 2
2020-09-29
Shock Wave Visualization For Extreme Ultraviolet Plasma Optimization
App 20200137864 - SU; Yen-Shuo ;   et al.
2020-04-30
Method For Fabricating Magnetic Core
App 20200066832 - SU; Yen-Shuo ;   et al.
2020-02-27
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20200060015 - HSU; Chun-Chia ;   et al.
2020-02-20
Euv Light Source And Apparatus For Lithography
App 20200008290 - SU; Yen-Shuo ;   et al.
2020-01-02
Method for fabricating magnetic core
Grant 10,461,145 - Su , et al. Oc
2019-10-29
Wind-proof umbrella
Grant 10,264,861 - Su
2019-04-23
Magnetic memory with metal oxide etch stop layer and method for manufacturing the same
Grant 10,170,536 - Hsu , et al. J
2019-01-01
Magnetic Memory With Metal Oxide Etch Stop Layer And Method For Manufacturing The Same
App 20180366536 - HSU; HUNG-WEN ;   et al.
2018-12-20
Wind-proof Umbrella
App 20180271238 - Su; Yen-Shuo
2018-09-27
Method For Fabricating Magnetic Core
App 20180166527 - SU; Yen-Shuo ;   et al.
2018-06-14
Control System For Plasma Chamber Having Controllable Valve And Method Of Using The Same
App 20180073144 - SU; Yen-Shuo ;   et al.
2018-03-15
Magnetic core, inductor, and method for fabricating the magnetic core
Grant 9,893,141 - Su , et al. February 13, 2
2018-02-13
Multi-zone EPD detectors
Grant 9,887,071 - Chen , et al. February 6, 2
2018-02-06
Plasma chamber having an upper electrode having controllable valves and a method of using the same
Grant 9,840,778 - Su , et al. December 12, 2
2017-12-12
Integrated magnetic core inductor and methods of fabrications thereof
Grant 9,799,721 - Kuo , et al. October 24, 2
2017-10-24
Integrated Magnetic Core Inductor and Methods of Fabrications Thereof
App 20160307991 - Kuo; Chun-Tsung ;   et al.
2016-10-20
Magnetic Core, Inductor, And Method For Fabricating The Magnetic Core
App 20160254342 - SU; Yen-Shuo ;   et al.
2016-09-01
Plasma Chamber Having An Upper Electrode Having Controllable Valves And A Method Of Using The Same
App 20130319612 - SU; Yen-Shuo ;   et al.
2013-12-05
Multi-zone EPD Detectors
App 20130157387 - Chen; Chien-An ;   et al.
2013-06-20
Double Patterning Strategy For Forming Fine Patterns In Photolithography
App 20110059407 - LIN; Li-Te S. ;   et al.
2011-03-10
Metal-insulator-metal capacitor structure
Grant 6,934,143 - Chou , et al. August 23, 2
2005-08-23
Metal-insulator-metal capacitor structure
App 20050073800 - Chou, You-Hua ;   et al.
2005-04-07

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