Su; Huei-Chia
Patent Applications and Registrations
Patent applications and USPTO patent grants for Su; Huei-Chia.The latest application filed is for "substrate carrier unit for a film deposition apparatus".
- Su; Huei-Chia - Taichung TW
- Su; Huei-Chia - Taichung City TW
| Patent | Date |
|---|---|
| Substrate carrier unit for a film deposition apparatus Grant 9,771,649 - Yeh , et al. September 26, 2 | 2017-09-26 |
| Film deposition system having a substrate carrier and a cooling device Grant 9,611,542 - Yeh , et al. April 4, 2 | 2017-04-04 |
| Substrate Carrier Unit for a Film Deposition Apparatus App 20160326637 - Yeh; Chung-Yu ; et al. | 2016-11-10 |
| Film Deposition System Having a Substrate Carrier and a Cooling Device App 20160318061 - Yeh; Cheng-Peng ; et al. | 2016-11-03 |
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