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Patent applications and USPTO patent grants for Stulen; Richard H..The latest application filed is for "self-cleaning optic for extreme ultraviolet lithography".
Patent | Date |
---|---|
Self-cleaning optic for extreme ultraviolet lithography Grant 6,664,554 - Klebanoff , et al. December 16, 2 | 2003-12-16 |
Self-cleaning optic for extreme ultraviolet lithography App 20020084425 - Klebanoff, Leonard E. ;   et al. | 2002-07-04 |
Mitigation Of Radiation Induced Surface Contamination App 20010053414 - KLEBANOFF, LEONARD E. ;   et al. | 2001-12-20 |
Method for maskless lithography Grant 6,060,224 - Sweatt , et al. May 9, 2 | 2000-05-09 |
Maskless lithography Grant 5,870,176 - Sweatt , et al. February 9, 1 | 1999-02-09 |
Manipulator having thermally conductive rotary joint for transferring heat from a test specimen Grant 4,538,068 - Haney , et al. August 27, 1 | 1985-08-27 |
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