Storm; Arnoldus Jan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Storm; Arnoldus Jan.The latest application filed is for "optical element and optical system for euv lithography, and method for treating such an optical element".

Company Profile

1.4.6

Storm; Arnoldus Jan - Delft NL
Storm; Arnoldus Jan - HT Leiden NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical element and optical system for EUV lithography, and method for treating such an optical element Grant 10,690,812 - Bekman , et al.	2020-06-23
Optical Element And Optical System For Euv Lithography, And Method For Treating Such An Optical Element App 20160187543 - BEKMAN; Hermanus Hendricus Petrus Theodorus ; et al.	2016-06-30
Particle cleaning of optical elements for microlithography Grant 8,477,285 - Ehm , et al. July 2, 2	2013-07-02
Hydrogen Radical Generator App 20120006258 - Schasfoort; Gerard Frans Jozef ; et al.	2012-01-12
Particle Cleaning Of Optical Elements For Microlithography App 20110188011 - EHM; Dirk Heinrich ; et al.	2011-08-04
Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element Grant 7,959,310 - Ehm , et al. June 14, 2	2011-06-14
Lithographic apparatus and method App 20080151201 - Storm; Arnoldus Jan ; et al.	2008-06-26
Optical Arrangement And Euv Lithography Device With At Least One Heated Optical Element, Operating Methods, And Methods For Cleaning As Well As For Providing An Optical Element App 20080143981 - EHM; Dirk Heinrich ; et al.	2008-06-19
Method and apparatus for controlled manufacturing of nanometer-scale apertures App 20060231774 - Storm; Arnoldus Jan ; et al.	2006-10-19

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