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Stone; Stanley W. Patent Filings

Stone; Stanley W.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Stone; Stanley W..The latest application filed is for "system for semiconductor wafer retention and sensing in a vacuum load lock".

Company Profile
0.7.8
  • Stone; Stanley W. - Gloucester MA
  • Stone; Stanley W. - Rockport MA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
System for semiconductor wafer retention and sensing in a vacuum load lock
Grant 10,573,541 - Stone Feb
2020-02-25
System For Semiconductor Wafer Retention And Sensing In A Vacuum Load Lock
App 20180151407 - Stone; Stanley W.
2018-05-31
Electrostatic chuck shielding mechanism
Grant 9,611,540 - Ota , et al. April 4, 2
2017-04-04
In-vacuum high speed pre-chill and post-heat stations
Grant 9,236,216 - Lee , et al. January 12, 2
2016-01-12
In-vacuum High Speed Pre-chill And Post-heat Stations
App 20140034846 - Lee; William D. ;   et al.
2014-02-06
Electrostatic Chuck Shielding Mechanism
App 20100159153 - Ota; Kan ;   et al.
2010-06-24
Wafer Handler Method and System
App 20070173044 - Stone; Stanley W.
2007-07-26
Automated robot alignment system and method using kinematic pins and end effector sensor
Grant 7,236,853 - Stone , et al. June 26, 2
2007-06-26
Wafer handler method and system
Grant 7,214,027 - Stone May 8, 2
2007-05-08
Automated robot alignment system and method using kinematic pins and end effector sensor
App 20050240290 - Stone, Stanley W. ;   et al.
2005-10-27
Auto-calibration method and device for wafer handler robots
App 20050228542 - Stone, Stanley W. ;   et al.
2005-10-13
Wafer handler method and system
App 20050095090 - Stone, Stanley W.
2005-05-05

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