Stone; Dale K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Stone; Dale K..The latest application filed is for "system and apparatus for enhanced substrate heating and rapid substrate cooling".
Company Profile
6.25.31
- Stone; Dale K. - Lynnfield MA
- Stone; Dale K. - Haverhill MA
Patent Activity
| Patent | Date |
|---|---|
| System And Apparatus For Enhanced Substrate Heating And Rapid Substrate Cooling App 20200381271 - Sun; Dawei ; et al. | 2020-12-03 |
| Enhanced Substrate Temperature Measurement Apparatus, System And Method App 20200378837 - Sun; Dawei ; et al. | 2020-12-03 |
| Platen for reducing particle contamination on a substrate and a method thereof Grant 10,658,207 - Suuronen , et al. | 2020-05-19 |
| Method And Apparatus For Non Line-of-sight Doping App 20200152466 - Hatem; Christopher R. ; et al. | 2020-05-14 |
| Method and apparatus for non line-of-sight doping Grant 10,541,137 - Hatem , et al. Ja | 2020-01-21 |
| Method And Apparatus For Non Line-of-sight Doping App 20190371608 - Hatem; Christopher R. ; et al. | 2019-12-05 |
| Diffusion resistant electrostatic clamp Grant 10,385,454 - Stone , et al. A | 2019-08-20 |
| Plasma Resistant Electrostatic Clamp App 20190252230 - Stone; Dale K. ; et al. | 2019-08-15 |
| Thermal shield for electrostatic chuck Grant 10,157,764 - Stone , et al. Dec | 2018-12-18 |
| Platen For Reducing Particle Contamination On A Substrate and a Method Thereof App 20180233386 - Suuronen; David E. ; et al. | 2018-08-16 |
| Platen for reducing particle contamination on a substrate and a method thereof Grant 9,953,849 - Suuronen , et al. April 24, 2 | 2018-04-24 |
| Diffusion Resistant Electrostatic Clamp App 20170335460 - Stone; Dale K. ; et al. | 2017-11-23 |
| High conductivity electrostatic chuck Grant 9,692,325 - Suuronen , et al. June 27, 2 | 2017-06-27 |
| Diffusion resistant electrostatic clamp Grant 9,644,269 - Stone , et al. May 9, 2 | 2017-05-09 |
| Apparatus for improving temperature uniformity of a workpiece Grant 9,633,875 - Sun , et al. April 25, 2 | 2017-04-25 |
| Thermal Shield For Electrostatic Chuck App 20160379861 - Stone; Dale K. ; et al. | 2016-12-29 |
| Apparatus For Improving Temperature Uniformity Of A Workpiece App 20160268150 - Sun; Dawei ; et al. | 2016-09-15 |
| Platen For Reducing Particle Contamination On A Substrate And A Method Thereof App 20150279704 - Suuronen; David E. ; et al. | 2015-10-01 |
| Plasma Resistant Electrostatic Clamp App 20150228524 - Stone; Dale K. ; et al. | 2015-08-13 |
| Diffusion Resistant Electrostatic Clamp App 20150214087 - Stone; Dale K. ; et al. | 2015-07-30 |
| Triboelectric charge controlled electrostatic clamp Grant 9,082,804 - Blake , et al. July 14, 2 | 2015-07-14 |
| High surface resistivity electrostatic chuck Grant 9,025,305 - Cooke , et al. May 5, 2 | 2015-05-05 |
| Low Emissivity Electrostatic Chuck App 20140318455 - Blake; Julian G. ; et al. | 2014-10-30 |
| Platen ground pin for connecting substrate to ground Grant 8,681,472 - Suuronen , et al. March 25, 2 | 2014-03-25 |
| Method of cooling textured workpieces with an electrostatic chuck Grant 8,672,311 - Stone , et al. March 18, 2 | 2014-03-18 |
| Removal of charge between a substrate and an electrostatic clamp Grant 8,531,814 - Stone , et al. September 10, 2 | 2013-09-10 |
| High Conductivity Electrostatic Chuck App 20130155569 - Suuronen; David ; et al. | 2013-06-20 |
| High Surface Resistivity Electrostatic Chuck App 20130070384 - Cooke; Richard A. ; et al. | 2013-03-21 |
| Triboelectric Charge Controlled Electrostatic Clamp App 20120200980 - Blake; Julian ; et al. | 2012-08-09 |
| Platen Cleaning App 20120017938 - Weaver; William T. ; et al. | 2012-01-26 |
| Method Of Cooling Textured Workpieces With An Electrostatic Chuck App 20110291344 - Stone; Dale K. ; et al. | 2011-12-01 |
| Platen To Control Charge Accumulation App 20110036990 - Stone; Dale K. ; et al. | 2011-02-17 |
| Removal Of Charge Between A Substrate And An Electrostatic Clamp App 20100265631 - Stone; Dale K. ; et al. | 2010-10-21 |
| Coated Graphite Liners App 20100140508 - Blake; Julian G. ; et al. | 2010-06-10 |
| Electrostatic chuck with separated electrodes Grant 7,715,170 - Blake , et al. May 11, 2 | 2010-05-11 |
| Platen For Reducing Particle Contamination On A Substrate And A Method Thereof App 20090317964 - SUURONEN; David E. ; et al. | 2009-12-24 |
| In-vacuum Protective Liners App 20090179158 - Stone; Lyudmila ; et al. | 2009-07-16 |
| Embossed Electrostatic Chuck App 20090122458 - Lischer; D. Jeffrey ; et al. | 2009-05-14 |
| Techniques For Handling Substrates App 20090003979 - Stone; Dale K. ; et al. | 2009-01-01 |
| Electrostatic Chuck With Separated Electrodes App 20080239614 - Blake; Julian G. ; et al. | 2008-10-02 |
| Bellows liner for an ion beam implanter Grant 7,205,556 - Stone , et al. April 17, 2 | 2007-04-17 |
| Removing byproducts of physical and chemical reactions in an ion implanter Grant 7,173,260 - Anc , et al. February 6, 2 | 2007-02-06 |
| High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer Grant 7,151,658 - Kellerman , et al. December 19, 2 | 2006-12-19 |
| Removing byproducts of physical and chemical reactions in an ion implanter App 20060131514 - Anc; Maria J. ; et al. | 2006-06-22 |
| Bellows liner for an ion beam implanter App 20060071181 - Stone; Lyudmila ; et al. | 2006-04-06 |
| High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer App 20040212946 - Kellerman, Peter L. ; et al. | 2004-10-28 |
| Method for capturing and removing contaminant particles from an interior region of an ion implanter Grant 5,670,217 - Blake , et al. September 23, 1 | 1997-09-23 |
| Wafer sensing and clamping monitor Grant 5,436,790 - Blake , et al. July 25, 1 | 1995-07-25 |
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