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Image acquisition system, image acquisition method, and inspection system
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Apparatus and methods for inspecting extreme ultra violet reticles
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In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
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Inspecting high-resolution photolithography masks
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Image Acquisition System, Image Acquisition Method, And Inspection System
App 20160048969 - ZHAO; Guoheng ; et al. | 2016-02-18 |
In-line Wafer Edge Inspection, Wafer Pre-alignment, And Wafer Cleaning
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Apparatus And Methods For Inspecting Extreme Ultra Violet Reticles
App 20150117754 - Nasser-Ghodsi; Mehran ; et al. | 2015-04-30 |
Apparatus and methods for inspecting extreme ultra violet reticles
Grant 8,953,869 - Nasser-Ghodsi , et al. February 10, 2 | 2015-02-10 |
Inspecting High-resolution Photolithography Masks
App 20140307943 - Stanke; Fred ; et al. | 2014-10-16 |
Method and apparatus for inspecting a reflective lithographic mask blank and improving mask quality
Grant 8,785,082 - Xiong , et al. July 22, 2 | 2014-07-22 |
Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks
Grant 8,711,346 - Stokowski April 29, 2 | 2014-04-29 |
Apparatus And Methods For Inspecting Extreme Ultra Violet Reticles
App 20130336574 - Nasser-Ghodsi; Mehran ; et al. | 2013-12-19 |
Method And Apparatus For Inspecting A Reflective Lithographic Mask Blank And Improving Mask Quality
App 20120238096 - Xiong; Yalin ; et al. | 2012-09-20 |
Inspection Systems And Methods For Detecting Defects On Extreme Ultraviolet Mask Blanks
App 20110181868 - Stokowski; Stanley E. | 2011-07-28 |
Inspection methods and systems for lithographic masks
Grant 7,564,545 - Stokowski July 21, 2 | 2009-07-21 |
Inspection methods and systems for lithographic masks
App 20080226157 - Stokowski; Stanley E. | 2008-09-18 |
Method and Apparatus for Detecting Surface Characteristics on a Mask Blank
App 20080218747 - Stokowski; Stanley E. | 2008-09-11 |
Illumination apparatus and methods
Grant 7,319,229 - Vaez-Iravani , et al. January 15, 2 | 2008-01-15 |
Systems and methods for modifying a reticle's optical properties
Grant 7,303,842 - Watson , et al. December 4, 2 | 2007-12-04 |
Method for determining and correcting reticle variations
Grant 7,300,725 - Watson , et al. November 27, 2 | 2007-11-27 |
Method for monitoring a reticle
Grant 7,300,729 - Watson , et al. November 27, 2 | 2007-11-27 |
Systems and methods for mitigating variances on a patterned wafer using a prediction model
Grant 7,297,453 - Watson , et al. November 20, 2 | 2007-11-20 |
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
Grant 7,218,392 - Biellak , et al. May 15, 2 | 2007-05-15 |
System for Detecting Anomalies and/or Features of a Surface
App 20060256327 - Vaez-Iravani; Mehdi ; et al. | 2006-11-16 |
Systems and methods for mitigating variances on a patterned wafer using a prediction model
App 20060240336 - Watson; Sterling G. ; et al. | 2006-10-26 |
Method for determining and correcting reticle variations
App 20060234145 - Watson; Sterling G. ; et al. | 2006-10-19 |
Method for monitoring a reticle
App 20060234144 - Watson; Sterling G. ; et al. | 2006-10-19 |
Systems and methods for modifying a reticle's optical properties
App 20060234139 - Watson; Sterling G. ; et al. | 2006-10-19 |
System for detecting anomalies and/or features of a surface
Grant 7,088,443 - Vaez-Iravani , et al. August 8, 2 | 2006-08-08 |
Scanning system for inspecting anomalies on surfaces
Grant 7,084,967 - Nikoonahad , et al. August 1, 2 | 2006-08-01 |
System for detecting anomalies and/or features of a surface
App 20060038984 - Vaez-Iravani; Mehdi ; et al. | 2006-02-23 |
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
App 20060007435 - Biellak; Steve ; et al. | 2006-01-12 |
Method and apparatus for detecting surface characteristics on a mask blank
App 20050254065 - Stokowski, Stanley E. | 2005-11-17 |
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
Grant 6,956,644 - Biellak , et al. October 18, 2 | 2005-10-18 |
Illumination apparatus and methods
App 20050141810 - Vaez-Iravani, Mehdi ; et al. | 2005-06-30 |
Scanning system for inspecting anamolies on surfaces
App 20050110986 - Nikoonahad, Mehrdad ; et al. | 2005-05-26 |
Scanning system for inspecting anamolies on surfaces
App 20050036137 - Nikoonahad, Mehrdad ; et al. | 2005-02-17 |
System for detecting anomalies and/or features of a surface
App 20040156042 - Vaez-Iravani, Mehdi ; et al. | 2004-08-12 |
Scanning system for inspecting anamolies on surfaces
App 20040057044 - Nikoonahad, Mehrdad ; et al. | 2004-03-25 |
Efficient phase defect detection system and method
Grant 6,674,522 - Krantz , et al. January 6, 2 | 2004-01-06 |
Scanning system for inspecting anamolies on surfaces
Grant 6,636,302 - Nikoonahad , et al. October 21, 2 | 2003-10-21 |
System and methods for inspection of transparent mask substrates
App 20020196433 - Biellak, Steve ; et al. | 2002-12-26 |
Efficient phase defect detection system and method
App 20020171825 - Krantz, Matthias C. ; et al. | 2002-11-21 |
Scanning system for inspecting anamolies on surfaces
App 20020097393 - Nikoonahad, Mehrdad ; et al. | 2002-07-25 |
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
App 20010052975 - Biellak, Steve ; et al. | 2001-12-20 |
Scanning system for inspecting anamolies on surfaces
App 20010008447 - Nikoonahad, Mehrdad ; et al. | 2001-07-19 |
Scanning system for inspecting anomalies on surfaces
Grant 6,215,551 - Nikoonahad , et al. April 10, 2 | 2001-04-10 |
Scanning system for inspecting anomalies on surfaces
Grant 5,883,710 - Nikoonahad , et al. March 16, 1 | 1999-03-16 |
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