Stoeckgen; Uwe Gunter

Patent Applications and Registrations

Patent applications and USPTO patent grants for Stoeckgen; Uwe Gunter.The latest application filed is for "method of reworking a semiconductor structure".

Company Profile

0.4.6

Stoeckgen; Uwe Gunter - Dresden DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of reworking a semiconductor structure Grant 7,476,552 - Preusse , et al. January 13, 2	2009-01-13
Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner Grant 7,150,675 - Kramer , et al. December 19, 2	2006-12-19
Method of reworking a semiconductor structure App 20060194349 - Preusse; Axel ; et al.	2006-08-31
Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner App 20050070209 - Marxsen, Gerd ; et al.	2005-03-31
Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner App 20040242122 - Kramer, Jens ; et al.	2004-12-02
Apparatus and method for chemical mechanical polishing of a substrate Grant 6,752,697 - Stoeckgen , et al. June 22, 2	2004-06-22
Method of selectively removing metal residues from a dielectric layer by chemical mechanical polishing App 20040063318 - Nagel, Rene Kai ; et al.	2004-04-01
Method of reducing a defect level after chemically mechanically polishing a copper-containing substrate by rinsing the substrate with an oxidizing solution App 20040043611 - Stoeckgen, Uwe Gunter ; et al.	2004-03-04
Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing Grant 6,699,107 - Stoeckgen , et al. March 2, 2	2004-03-02
Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing App 20030162486 - Stoeckgen, Uwe Gunter ; et al.	2003-08-28

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