Stewart; Diane K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Stewart; Diane K..The latest application filed is for "methods and apparatus for statistical characterization of nano-particles".
- Stewart; Diane K. - Ipswich MA
| Patent | Date |
|---|---|
| Methods and apparatus for statistical characterization of nano-particles Grant 8,119,985 - Stewart , et al. February 21, 2 | 2012-02-21 |
| Electron beam processing for mask repair Grant 7,727,681 - Stewart , et al. June 1, 2 | 2010-06-01 |
| Photolithography mask repair Grant 7,662,524 - Stewart , et al. February 16, 2 | 2010-02-16 |
| Methods and Apparatus for Statistical Characterization of Nano-Particles App 20090326866 - Stewart; Diane K. ; et al. | 2009-12-31 |
| Methods and apparatus for statistical characterization of nano-particles Grant 7,544,938 - Stewart , et al. June 9, 2 | 2009-06-09 |
| Photolithography Mask Repair App 20090111036 - Stewart; Diane K. ; et al. | 2009-04-30 |
| Photolithography mask repair Grant 7,504,182 - Stewart , et al. March 17, 2 | 2009-03-17 |
| Charged particle beam system Grant 6,979,822 - Stewart , et al. December 27, 2 | 2005-12-27 |
| Charged Particle Beam System App 20050279934 - Stewart, Diane K. ; et al. | 2005-12-22 |
| Electron beam processing for mask repair App 20040226814 - Stewart, Diane K. ; et al. | 2004-11-18 |
| Photolithography mask repair App 20040151991 - Stewart, Diane K. ; et al. | 2004-08-05 |
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