STEVENSON; Tom

Patent Applications and Registrations

Patent applications and USPTO patent grants for STEVENSON; Tom.The latest application filed is for "coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus".

Company Profile

0.17.20

STEVENSON; Tom - Morgan Hill CA
Stevenson; Tom - Metuchen NJ US
Stevenson; Tom - Gilroy CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Coating System And Method For Coating Interior Fluid Wetted Surfaces Of A Component Of A Semiconductor Substrate Processing Apparatus App 20180127868 - XU; Lin ; et al.	2018-05-10
Showerhead electrode assemblies for plasma processing apparatuses Grant 9,899,228 - Stevenson , et al. February 20, 2	2018-02-20
Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus Grant 9,873,940 - Xu , et al. January 23, 2	2018-01-23
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof Grant 9,546,432 - Shih , et al. January 17, 2	2017-01-17
Dense Oxide Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof App 20150337450 - SHIH; Hong ; et al.	2015-11-26
Pet Spa Chair App 20150289475 - Stevenson; Tom ; et al.	2015-10-15
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof Grant 9,123,651 - Shih , et al. September 1, 2	2015-09-01
Pet Carrier With Geometric-shaped Porthole Window App 20150201580 - Stevenson; Tom ; et al.	2015-07-23
Component Of A Plasma Processing Apparatus Including An Electrically Conductive And Nonmagnetic Cold Sprayed Coating App 20150187615 - Daugherty; John ; et al.	2015-07-02
Coating System And Method For Coating Interior Fluid Wetted Surfaces Of A Component Of A Semiconductor Substrate Processing Apparatus App 20150184296 - Xu; Lin ; et al.	2015-07-02
Film adhesive for semiconductor vacuum processing apparatus Grant 9,028,646 - Larson , et al. May 12, 2	2015-05-12
Pressure controlled heat pipe temperature control plate Grant 8,975,817 - Kellogg , et al. March 10, 2	2015-03-10
Methods for stabilizing contact surfaces of electrostatic chucks Grant 8,906,164 - Kimball , et al. December 9, 2	2014-12-09
Dense Oxide Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof App 20140295670 - Shih; Hong ; et al.	2014-10-02
Showerhead Electrode Assemblies For Plasma Processing Apparatuses App 20140154888 - Stevenson; Tom ; et al.	2014-06-05
Composite showerhead electrode assembly for a plasma processing apparatus Grant 8,701,268 - Larson , et al. April 22, 2	2014-04-22
Pressure Controlled Heat Pipe Temperature Control Plate App 20140103806 - Kellogg; Michael C. ; et al.	2014-04-17
Showerhead electrode assemblies for plasma processing apparatuses Grant 8,679,288 - Stevenson , et al. March 25, 2	2014-03-25
Film Adhesive For Semiconductor Vacuum Processing Apparatus App 20130292048 - Larson; Dean J. ; et al.	2013-11-07
Composite Showerhead Electrode Assembly For A Plasma Processing Apparatus App 20130244441 - Larson; Dean Jay ; et al.	2013-09-19
Plasma processing chamber component having adaptive thermal conductor Grant 8,529,729 - Stevenson , et al. September 10, 2	2013-09-10
Film adhesive for semiconductor vacuum processing apparatus Grant 8,449,786 - Larson , et al. May 28, 2	2013-05-28
Components Of Plasma Processing Chambers Having Textured Plasma Resistant Coatings App 20130102156 - Stevenson; Tom ; et al.	2013-04-25
Composite showerhead electrode assembly for a plasma processing apparatus Grant 8,418,649 - Larson , et al. April 16, 2	2013-04-16
Methods For Stabilizing Contact Surfaces of Electrostatic Chucks App 20120031427 - Kimball; Chris ; et al.	2012-02-09
Plasma Processing Chamber Component Having Adaptive Thermal Conductor App 20110300714 - Stevenson; Tom ; et al.	2011-12-08
Light-up Prevention In Electrostatic Chucks App 20110024049 - Stevenson; Tom ; et al.	2011-02-03
Film Adhesive For Semiconductor Vacuum Processing Apparatus App 20100304571 - Larson; Dean J. ; et al.	2010-12-02
Showerhead electrode assemblies for plasma processing apparatuses App 20090305509 - Stevenson; Tom ; et al.	2009-12-10
Composite Showerhead Electrode Assembly For A Plasma Processing Apparatus App 20090163034 - LARSON; DEAN JAY ; et al.	2009-06-25

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