Sterling; William N.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sterling; William N..The latest application filed is for "roughened substrate support".
- Sterling; William N. - Santa Clara CA
| Patent | Date |
|---|---|
| Roughened substrate support Grant 10,434,629 - Lee , et al. O | 2019-10-08 |
| Gas diffuser assembly Grant D756,502 - Lee , et al. May 17, 2 | 2016-05-17 |
| Roughened Substrate Support App 20150202739 - LEE; Dongsuh ; et al. | 2015-07-23 |
| Process Gas Flow Guides For Large Area Plasma Enhanced Chemical Vapor Deposition Systems And Methods App 20140030056 - Lee; Dongsuh ; et al. | 2014-01-30 |
| Roughened Substrate Support App 20140027289 - LEE; Dongsuh ; et al. | 2014-01-30 |
| In-situ Mask Alignment For Deposition Tools App 20120237682 - Hong; Ilyoung Richard ; et al. | 2012-09-20 |
| Shadow frame having alignment inserts Grant 8,251,009 - Duong , et al. August 28, 2 | 2012-08-28 |
| Methods and apparatus for sealing a chamber Grant 8,206,075 - White , et al. June 26, 2 | 2012-06-26 |
| Precise Temperature Control For Teos Application By Heat Transfer Fluid App 20120009347 - Lee; Dongsuh ; et al. | 2012-01-12 |
| Susceptor with insulative inserts Grant 7,959,735 - Sterling , et al. June 14, 2 | 2011-06-14 |
| Valve door with ball coupling Grant 7,845,618 - Kim , et al. December 7, 2 | 2010-12-07 |
| Heated Substrate Support For Chemical Vapor Deposition App 20100282603 - Sterling; William N. ; et al. | 2010-11-11 |
| End effector assembly for supporting a substrate Grant 7,641,247 - Blonigan , et al. January 5, 2 | 2010-01-05 |
| Shadow Frame Having Alignment Inserts App 20090283036 - Duong; Lan ; et al. | 2009-11-19 |
| Clamp Mechanism For A Backing Plate Disposed In A Pecvd Chamber App 20090083953 - KIM; Sam H. ; et al. | 2009-04-02 |
| Susceptor With Insulative Inserts App 20080194169 - Sterling; William N. ; et al. | 2008-08-14 |
| Valve Door With Ball Coupling App 20080001113 - KIM; SAM HYUNGSAM ; et al. | 2008-01-03 |
| Heated substrate support for chemical vapor deposition App 20060011139 - Sterling; William N. ; et al. | 2006-01-19 |
| Methods and apparatus for sealing a chamber App 20050285992 - White, John M. ; et al. | 2005-12-29 |
| End effector assembly App 20040113444 - Blonigan, Wendell T. ; et al. | 2004-06-17 |
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