loadpatents
Patent applications and USPTO patent grants for Stengl; Gerhard.The latest application filed is for "particle-optical system".
Patent | Date |
---|---|
Charged particle beam exposure system and beam manipulating arrangement Grant 8,368,030 - Platzgummer , et al. February 5, 2 | 2013-02-05 |
Particle-optical system Grant 8,368,015 - Platzgummer , et al. February 5, 2 | 2013-02-05 |
Charged particle system Grant 8,049,189 - Buschbeck , et al. November 1, 2 | 2011-11-01 |
Particle-Optical System App 20100270474 - Platzgummer; Elmar ;   et al. | 2010-10-28 |
Pattern lock system for particle-beam exposure apparatus Grant 7,772,574 - Stengl , et al. August 10, 2 | 2010-08-10 |
Charged-particle exposure apparatus Grant 7,737,422 - Platzgummer , et al. June 15, 2 | 2010-06-15 |
Pattern Lock System for Particle-Beam Exposure Apparatus App 20090146082 - Stengl; Gerhard ;   et al. | 2009-06-11 |
Charged particle beam exposure system and beam manipulating arrangement App 20090140160 - Platzgummer; Elmar ;   et al. | 2009-06-04 |
Charged-Particle Exposure Apparatus App 20080258084 - Platzgummer; Elmar ;   et al. | 2008-10-23 |
Compensation of magnetic fields Grant 7,436,120 - Buschbeck , et al. October 14, 2 | 2008-10-14 |
Charged Particle System App 20080210887 - Buschbeck; Herbert ;   et al. | 2008-09-04 |
Particle-optical projection system Grant 7,388,217 - Buschbeck , et al. June 17, 2 | 2008-06-17 |
Particle-optical projection system App 20070125956 - Buschbeck; Herbert ;   et al. | 2007-06-07 |
Charged-particle multi-beam exposure apparatus Grant 7,214,951 - Stengl , et al. May 8, 2 | 2007-05-08 |
Particle-optic electrostatic lens Grant 7,199,373 - Stengl , et al. April 3, 2 | 2007-04-03 |
Method of synthesising carbon nano tubes Grant 7,033,647 - Tang , et al. April 25, 2 | 2006-04-25 |
Method Of Synthesising Carbon Nano Tubes App 20060068096 - Tang; Xinhe ;   et al. | 2006-03-30 |
Particle multibeam lithography Grant 6,989,546 - Loschner , et al. January 24, 2 | 2006-01-24 |
Particle-optical projection system App 20050201246 - Buschbeck, Herbert ;   et al. | 2005-09-15 |
Compensation of magnetic fields App 20050195551 - Buschbeck, Herbert ;   et al. | 2005-09-08 |
Ion irradiation of a target at very high and very low kinetic ion energies Grant 6,909,103 - Platzgummer , et al. June 21, 2 | 2005-06-21 |
Charged-particle multi-beam exposure apparatus App 20050104013 - Stengl, Gerhard ;   et al. | 2005-05-19 |
Particle-optic electrostatic lens App 20050072933 - Stengl, Gerhard ;   et al. | 2005-04-07 |
Apparatus for enhancing the lifetime of stencil masks Grant 6,858,118 - Platzgummer , et al. February 22, 2 | 2005-02-22 |
Ion irradiation of a target at very high and very low kinetic ion energies App 20050012052 - Platzgummer, Elmar ;   et al. | 2005-01-20 |
Apparatus for enhancing the lifetime of stencil masks App 20040188243 - Platzgummer, Elmar ;   et al. | 2004-09-30 |
Maskless particle-beam system for exposing a pattern on a substrate Grant 6,768,125 - Platzgummer , et al. July 27, 2 | 2004-07-27 |
Pattern lock system Grant 6,661,015 - Chalupka , et al. December 9, 2 | 2003-12-09 |
Particle Multibeam Lithography App 20030209676 - LOSCHNER, HANS ;   et al. | 2003-11-13 |
Maskless particle-beam system for exposing a pattern on a substrate App 20030155534 - Platzgummer, Elmar ;   et al. | 2003-08-21 |
Field ionization ion source App 20030122085 - Stengl, Gerhard ;   et al. | 2003-07-03 |
Pattern lock system App 20020033457 - Chalupka, Alfred ;   et al. | 2002-03-21 |
Particle-optical imaging system for lithography purposes Grant 6,326,632 - Buschbeck , et al. December 4, 2 | 2001-12-04 |
Ion-optical imaging system Grant 5,436,460 - Stengl , et al. July 25, 1 | 1995-07-25 |
Particle-beam imaging system Grant 5,378,917 - Chalupka , et al. January 3, 1 | 1995-01-03 |
Ion beam lithography Grant 4,985,634 - Stengl , et al. January 15, 1 | 1991-01-15 |
Method and apparatus for image alignment in ion lithography Grant 4,967,088 - Stengl , et al. October 30, 1 | 1990-10-30 |
Ion beam apparatus and method of modifying substrate Grant 4,924,104 - Stengl , et al. May 8, 1 | 1990-05-08 |
Apparatus for demagnification or full-size ion projection lithography Grant 4,894,549 - Stengl January 16, 1 | 1990-01-16 |
Particle or radiation beam mask and process for making same Grant 4,891,547 - Stengl , et al. January 2, 1 | 1990-01-02 |
Ion-projection apparatus Grant 4,835,392 - Loschner , et al. May 30, 1 | 1989-05-30 |
Ion-projection lithographic apparatus with means for aligning the mask image with the substrate Grant 4,823,011 - Stengl , et al. April 18, 1 | 1989-04-18 |
Process for making a transmission mask Grant 4,780,382 - Stengl , et al. October 25, 1 | 1988-10-25 |
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