Patent | Date |
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Tungsten Chemical Mechanical Planarization (CMP) With Low Dishing And Low Erosion Topography App 20210340445 - Stender; Matthias ;   et al. | 2021-11-04 |
Tungsten chemical mechanical planarization (CMP) with low dishing and low erosion topography Grant 11,111,435 - Stender , et al. September 7, 2 | 2021-09-07 |
Sealing Profile For Embedding Into A Moulding Of Curable Material App 20200173586 - Klug; Matthias ;   et al. | 2020-06-04 |
Dishing reducing in tungsten chemical mechanical polishing Grant 10,570,313 - Stender , et al. Feb | 2020-02-25 |
Tungsten Chemical Mechanical Planarization (CMP) With Low Dishing And Low Erosion Topography App 20200040256 - Stender; Matthias ;   et al. | 2020-02-06 |
Tungsten Chemical Mechanical Polishing For Reduced Oxide Erosion App 20200024515 - Lu; Chun ;   et al. | 2020-01-23 |
Sealing Profile For Embedding Into A Moulding Of Curable Material App 20190195070 - Klug; Matthias ;   et al. | 2019-06-27 |
Additives for barrier chemical mechanical planarization Grant 10,253,216 - Stender , et al. | 2019-04-09 |
Stop-On Silicon Containing Layer Additive App 20190062598 - Stender; Matthias ;   et al. | 2019-02-28 |
Stop-on silicon containing layer additive Grant 10,144,850 - Stender , et al. De | 2018-12-04 |
Additives for Barrier Chemical Mechanical Planarization App 20180002571 - Stender; Matthias ;   et al. | 2018-01-04 |
Testing device for testing seals having anchoring feet Grant 9,797,818 - Fischer , et al. October 24, 2 | 2017-10-24 |
Stop-on Silicon Containing Layer Additive App 20170088748 - Stender; Matthias ;   et al. | 2017-03-30 |
Tellurium compounds useful for deposition of tellurium containing materials Grant 9,537,095 - Stender , et al. January 3, 2 | 2017-01-03 |
Dishing Reducing In Tungsten Chemical Mechanical Polishing App 20160237315 - Stender; Matthias ;   et al. | 2016-08-18 |
Testing Device For Testing Seals Having Anchoring Feet App 20160195459 - Fischer; Mark ;   et al. | 2016-07-07 |
Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 9,219,232 - Hunks , et al. December 22, 2 | 2015-12-22 |
Chemical-mechanical polishing composition containing zirconia and metal oxidizer Grant 8,920,667 - Fu , et al. December 30, 2 | 2014-12-30 |
Tellurium Compounds Useful For Deposition Of Tellurium Containing Materials App 20140329357 - Stender; Matthias ;   et al. | 2014-11-06 |
Low temperature deposition of phase change memory materials Grant 8,877,549 - Roeder , et al. November 4, 2 | 2014-11-04 |
Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20140220733 - Hunks; William ;   et al. | 2014-08-07 |
Tellurium compounds useful for deposition of tellurium containing materials Grant 8,796,068 - Stender , et al. August 5, 2 | 2014-08-05 |
Chemical-mechanical Polishing Composition Containing Zirconia And Metal Oxidizer App 20140209566 - Fu; Lin ;   et al. | 2014-07-31 |
Low Temperature Deposition Of Phase Change Memory Materials App 20140206134 - Roeder; Jeffrey F. ;   et al. | 2014-07-24 |
GST CMP slurries Grant 8,778,211 - Stender , et al. July 15, 2 | 2014-07-15 |
Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 8,709,863 - Hunks , et al. April 29, 2 | 2014-04-29 |
Low temperature deposition of phase change memory materials Grant 8,679,894 - Roeder , et al. March 25, 2 | 2014-03-25 |
Gst Cmp Slurries App 20140024216 - STENDER; Matthias ;   et al. | 2014-01-23 |
Tellurium Compounds Useful For Deposition Of Tellurium Containing Materials App 20130288462 - Stender; Matthias ;   et al. | 2013-10-31 |
Precursor compositions for ALD/CVD of group II ruthenate thin films Grant 8,524,931 - Xu , et al. September 3, 2 | 2013-09-03 |
Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20130029456 - Hunks; William ;   et al. | 2013-01-31 |
Low Temperature Deposition Of Phase Change Memory Materials App 20130005078 - Roeder; Jeffrey F. ;   et al. | 2013-01-03 |
Low temperature deposition of phase change memory materials Grant 8,288,198 - Roeder , et al. October 16, 2 | 2012-10-16 |
Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 8,268,665 - Hunks , et al. September 18, 2 | 2012-09-18 |
Amorphous Ge/te Deposition Process App 20120108038 - Chen; Philip S.H. ;   et al. | 2012-05-03 |
Amorphous Ge/Te deposition process Grant 8,093,140 - Chen , et al. January 10, 2 | 2012-01-10 |
Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20110263100 - Hunks; William ;   et al. | 2011-10-27 |
Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 8,008,117 - Hunks , et al. August 30, 2 | 2011-08-30 |
Metal Aminotroponiminates, Bis-oxazolinates And Guanidinates App 20110060165 - Cameron; Thomas M. ;   et al. | 2011-03-10 |
Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20100317150 - Hunks; William ;   et al. | 2010-12-16 |
Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 7,838,329 - Hunks , et al. November 23, 2 | 2010-11-23 |
Novel Bismuth Precursors For Cvd/ald Of Thin Films App 20100279011 - Chen; Tianniu ;   et al. | 2010-11-04 |
Precursor Compositions For Ald/cvd Of Group Ii Ruthenate Thin Films App 20100095865 - Xu; Chongying ;   et al. | 2010-04-22 |
Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20090305458 - Hunks; William ;   et al. | 2009-12-10 |
Method for making alkoxy-siloxane polyether carboxylates terminated with functional olefin groups Grant 7,625,991 - Angeletakis , et al. December 1, 2 | 2009-12-01 |
Tellurium Compounds Useful For Deposition Of Tellurium Containing Materials App 20090215225 - Stender; Matthias ;   et al. | 2009-08-27 |
Copper (i) Amidinates And Guanidinates, Mixed Ligand Copper Complexes, And Compositions For Chemical Vapor Deposition, Atomic Layer Deposition, And Rapid Vapor Deposition Of Copper App 20090162550 - Chen; Tianniu ;   et al. | 2009-06-25 |
Low Temperature Deposition Of Phase Change Memory Materials App 20090124039 - Roeder; Jeffrey F. ;   et al. | 2009-05-14 |
Amorphous Ge/te Deposition Process App 20090112009 - Chen; Philip S.H. ;   et al. | 2009-04-30 |
Method For Making Alkoxy-siloxane Polyether Carboxylates Terminated With Functional Olefin Groups App 20070197741 - Angeletakis; Christos ;   et al. | 2007-08-23 |