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Patent applications and USPTO patent grants for Steinberg; George N..The latest application filed is for "solid annular gas discharge electrode".
Patent | Date |
---|---|
Solid annular gas discharge electrode Grant 5,567,255 - Steinberg October 22, 1 | 1996-10-22 |
Electrode assembly useful in confined plasma assisted chemical etching Grant 5,298,103 - Steinberg , et al. March 29, 1 | 1994-03-29 |
Inductively coupled discharge for plasma etching and resist stripping Grant 4,431,898 - Reinberg , et al. February 14, 1 | 1984-02-14 |
Apparatus for the etching for semiconductor devices Grant 4,368,092 - Steinberg , et al. January 11, 1 | 1983-01-11 |
High speed plasma etching system Grant 4,367,114 - Steinberg , et al. January 4, 1 | 1983-01-04 |
High power electrodeless gas arc lamp for pumping lasers Grant 4,032,862 - Huchital , et al. June 28, 1 | 1977-06-28 |
RF Excited electrodeless gas arc lamp for pumping lasers Grant 3,909,736 - Huchital , et al. September 30, 1 | 1975-09-30 |
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