loadpatents
Patent applications and USPTO patent grants for Steidl; Thomas Andrew.The latest application filed is for "ultrasonic liquid level sensing systems".
Patent | Date |
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Ultrasonic Liquid Level Sensing Systems App 20210003442 - Birtcher; Charles Michael ;   et al. | 2021-01-07 |
Ultrasonic liquid level sensing system Grant 10,809,115 - Birtcher , et al. October 20, 2 | 2020-10-20 |
Aerosol-free Vessel For Bubbling Chemical Precursors In A Deposition Process App 20200131630 - Birtcher; Charles Michael ;   et al. | 2020-04-30 |
Delivery container with flow distributor Grant 10,480,070 - Birtcher , et al. Nov | 2019-11-19 |
Vessel and method for delivery of precursor materials Grant 10,443,128 - Birtcher , et al. Oc | 2019-10-15 |
Ultrasonic liquid level sensing systems Grant 10,151,618 - Birtcher , et al. Dec | 2018-12-11 |
Ultrasonic Liquid Level Sensing System App 20180023994 - Birtcher; Charles Michael ;   et al. | 2018-01-25 |
Delivery Container with Flow Distributor App 20170327945 - Birtcher; Charles Michael ;   et al. | 2017-11-16 |
Vessel With Filter App 20170137936 - Birtcher; Charles Michael ;   et al. | 2017-05-18 |
Vessel with filter Grant 9,598,766 - Birtcher , et al. March 21, 2 | 2017-03-21 |
Ultrasonic liquid level sensing systems Grant 9,550,260 - Birtcher , et al. January 24, 2 | 2017-01-24 |
Vessel And Method For Delivery Of Precursor Materials App 20160305019 - Birtcher; Charles Michael ;   et al. | 2016-10-20 |
Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel Grant 9,435,027 - Birtcher , et al. September 6, 2 | 2016-09-06 |
Ultrasonic Liquid Level Sensing Systems App 20160207153 - Birtcher; Charles Michael ;   et al. | 2016-07-21 |
Ultrasonic liquid level sensing systems Grant 9,316,525 - Birtcher , et al. April 19, 2 | 2016-04-19 |
Ultrasonic Liquid Level Sensing Systems App 20160061645 - Birtcher; Charles Michael ;   et al. | 2016-03-03 |
Solid source container with inlet plenum Grant 9,109,287 - Birtcher , et al. August 18, 2 | 2015-08-18 |
Ultrasonic liquid level sensing systems Grant 8,959,998 - Birtcher , et al. February 24, 2 | 2015-02-24 |
Splashguard for high flow vacuum bubbler vessel Grant 8,944,420 - Birtcher , et al. February 3, 2 | 2015-02-03 |
Ultrasonic Liquid Level Sensing Systems App 20140338443 - Birtcher; Charles Michael ;   et al. | 2014-11-20 |
Ultrasonic Liquid Level Sensing Systems App 20140338442 - Birtcher; Charles Michael ;   et al. | 2014-11-20 |
Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel App 20140193578 - Birtcher; Charles Michael ;   et al. | 2014-07-10 |
Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel App 20140191423 - Birtcher; Charles Michael ;   et al. | 2014-07-10 |
Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel Grant 8,708,320 - Steidl , et al. April 29, 2 | 2014-04-29 |
Vessel with Filter App 20130312855 - Birtcher; Charles Michael ;   et al. | 2013-11-28 |
Splashguard For High Flow Vacuum Bubbler Vessel App 20130015594 - Birtcher; Charles Michael ;   et al. | 2013-01-17 |
Splashguard for high flow vacuum bubbler vessel Grant 8,162,296 - Birtcher , et al. April 24, 2 | 2012-04-24 |
Cross purge valve and container assembly Grant 8,002,247 - Birtcher , et al. August 23, 2 | 2011-08-23 |
High Volume Delivery System For Gallium Trichloride App 20100242835 - Arena; Chantal ;   et al. | 2010-09-30 |
Splashguard for High Flow Vacuum Bubbler Vessel App 20100237085 - Birtcher; Charles Michael ;   et al. | 2010-09-23 |
Cross Purge Valve and Container Assembly App 20100043918 - Birtcher; Charles Michael ;   et al. | 2010-02-25 |
Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel App 20080143002 - Steidl; Thomas Andrew ;   et al. | 2008-06-19 |
Solid Source Container With Inlet Plenum App 20080092816 - Birtcher; Charles Michael ;   et al. | 2008-04-24 |
Cabinet for chemical delivery with solvent purging and removal Grant 7,334,595 - Birtcher , et al. February 26, 2 | 2008-02-26 |
High Flow GaCl3 Delivery App 20080018004 - Steidl; Thomas Andrew ;   et al. | 2008-01-24 |
Method and vessel for the delivery of precursor materials Grant 7,261,118 - Birtcher , et al. August 28, 2 | 2007-08-28 |
High purity chemical container with diptube and level sensor terminating in lowest most point of concave floor Grant 7,124,913 - Birtcher , et al. October 24, 2 | 2006-10-24 |
Purgeable container for low vapor pressure chemicals Grant 6,966,348 - Steidl , et al. November 22, 2 | 2005-11-22 |
Cabinet for chemical delivery with solvent purging and removal App 20050229970 - Birtcher, Charles Michael ;   et al. | 2005-10-20 |
Cabinet for chemical delivery with solvent purging Grant 6,953,047 - Birtcher , et al. October 11, 2 | 2005-10-11 |
Purgeable container for low vapor pressure chemicals App 20050051234 - Steidl, Thomas Andrew ;   et al. | 2005-03-10 |
Method and vessel for the delivery of precursor materials App 20050039794 - Birtcher, Charles Michael ;   et al. | 2005-02-24 |
High purity chemical container with diptube and level sensor terminating in lowest most point of concave floor App 20040262327 - Birtcher, Charles Michael ;   et al. | 2004-12-30 |
Purgeable manifold for low vapor pressure chemicals containers Grant 6,648,034 - Birtcher , et al. November 18, 2 | 2003-11-18 |
Cabinet for chemical delivery with solvent purging App 20030131885 - Birtcher, Charles Michael ;   et al. | 2003-07-17 |
Chemical delivery system with spill containment door Grant 6,276,404 - Birtcher , et al. August 21, 2 | 2001-08-21 |
Chemical delivery system with ultrasonic fluid sensors Grant 6,264,064 - Birtcher , et al. July 24, 2 | 2001-07-24 |
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