Stehle; Jean-Louis

Patent Applications and Registrations

Patent applications and USPTO patent grants for Stehle; Jean-Louis.The latest application filed is for "equipment and method for monitoring an immersion lithography device".

Company Profile

0.8.6

Stehle; Jean-Louis - Colombes FR
Stehle; Jean-Louis - Colorbes FR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Protected pattern mask for reflection lithography in the extreme UV or soft X-ray range Grant 7,763,394 - Stehle July 27, 2	2010-07-27
Equipment and method for monitoring an immersion lithography device Grant 7,714,992 - Piel , et al. May 11, 2	2010-05-11
Equipment and Method for Monitoring an Immersion Lithography Device App 20090116001 - Piel; Jean-Philippe ; et al.	2009-05-07
Protected pattern mask for reflection lithography in the extreme uv or soft x-ray range App 20070160913 - Stehle; Jean-Louis	2007-07-12
Compact spectroscopic ellipsometer Grant 7,230,701 - Stehle , et al. June 12, 2	2007-06-12
Focused beam spectroscopic ellipsometry method and system App 20050105090 - Piwonka-Corle, Timothy R. ; et al.	2005-05-19
Focused beam spectroscopic ellipsometry method and system App 20040100632 - Piwonka-Corle, Timothy R. ; et al.	2004-05-27
Focused beam spectroscopic ellipsometry method and system Grant 6,734,967 - Piwonka-Corle , et al. May 11, 2	2004-05-11
Compact spectroscopic ellipsometer App 20040070760 - Stehle, Jean-Louis ; et al.	2004-04-15
Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like Grant 6,687,002 - Stehle , et al. February 3, 2	2004-02-03
Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like App 20020024668 - Stehle, Jean-Louis ; et al.	2002-02-28
Focused beam spectroscopic ellipsometry method and system Grant 5,910,842 - Piwonka-Corle , et al. June 8, 1	1999-06-08
Focused beam spectroscopic ellipsometry method and system Grant 5,608,526 - Piwonka-Corle , et al. March 4, 1	1997-03-04
Spectroscopic ellipsometry apparatus including an optical fiber Grant 5,329,357 - Bernoux , et al. July 12, 1	1994-07-12

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