Steger; Robert

Patent Applications and Registrations

Patent applications and USPTO patent grants for Steger; Robert.The latest application filed is for "method and apparatus for controlling spatial temperature distribution".

Company Profile

0.17.13

Steger; Robert - San Jose CA
Steger; Robert - Los Altos CA US
Steger; Robert - Cupertino CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for controlling spatial temperature distribution Grant 9,824,904 - Benjamin , et al. November 21, 2	2017-11-21
Method And Apparatus For Controlling Spatial Temperature Distribution App 20150187619 - Benjamin; Neil ; et al.	2015-07-02
Method for controlling spatial temperature distribution across a semiconductor wafer Grant 8,963,052 - Benjamin , et al. February 24, 2	2015-02-24
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Grant 8,536,494 - Benjamin , et al. September 17, 2	2013-09-17
Electrostatic chuck support assembly Grant 7,939,784 - Steger , et al. May 10, 2	2011-05-10
Method Of Determining A Target Mesa Configuration Of An Electrostatic Chuck App 20110063772 - Steger; Robert	2011-03-17
Method of determining a target mesa configuration of an electrostatic chuck Grant 7,869,184 - Steger January 11, 2	2011-01-11
Method of determining a target mesa configuration of an electrostatic chuck App 20100159712 - Steger; Robert	2010-06-24
Method For Controlling Spatial Temperature Distribution Across A Semiconductor Wafer App 20090215201 - Benjamin; Neil ; et al.	2009-08-27
Electrostatic Chuck Support Assembly App 20090161286 - STEGER; ROBERT ; et al.	2009-06-25
Method of tuning thermal conductivity of electrostatic chuck support assembly Grant 7,501,605 - Steger , et al. March 10, 2	2009-03-10
Method of tuning thermal conductivity of electrostatic chuck support assembly App 20080083736 - Steger; Robert ; et al.	2008-04-10
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Grant 7,274,004 - Benjamin , et al. September 25, 2	2007-09-25
Smart component-based management techniques in a substrate processing system Grant 7,254,510 - Benjamin , et al. August 7, 2	2007-08-07
Smart component-based management techniques in a substrate processing system Grant 7,152,011 - Benjamin , et al. December 19, 2	2006-12-19
Smart component-based management techniques in a substrate processing system App 20060271325 - Benjamin; Neil ; et al.	2006-11-30
Smart component-based management techniques in a substrate processing system App 20060047458 - Benjamin; Neil ; et al.	2006-03-02
System and method for integrated multi-use optical alignment Grant 6,952,255 - Perry , et al. October 4, 2	2005-10-04
Method and apparatus for controlling spatial temperature distribution App 20050211385 - Benjamin, Neil ; et al.	2005-09-29
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support App 20050173404 - Benjamin, Neil ; et al.	2005-08-11
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support App 20050173403 - Benjamin, Neil ; et al.	2005-08-11
Technique for improving chucking reproducibility Grant 6,858,265 - Redeker , et al. February 22, 2	2005-02-22
System and method for integrated multi-use optical alignment App 20050030524 - Perry, Andrew ; et al.	2005-02-10
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Grant 6,847,014 - Benjamin , et al. January 25, 2	2005-01-25
Technique for improving chucking reproducibility App 20030180459 - Redeker, Fred C. ; et al.	2003-09-25
Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof Grant 6,444,083 - Steger , et al. September 3, 2	2002-09-03
Apparatus and method for transferring heat from a hot electrostatic chuck to an underlying cold body Grant 5,730,803 - Steger , et al. March 24, 1	1998-03-24
Method and apparatus for altering magnetic coil current to produce etch uniformity in a magnetic field-enhanced plasma reactor Grant 5,534,108 - Qian , et al. July 9, 1	1996-07-09

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