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Patent applications and USPTO patent grants for STEGEN; Raphael Nico Johan.The latest application filed is for "fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus".
Patent | Date |
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Fluid Handling Structure, A Lithographic Apparatus, A Method Of Using A Fluid Handling Structure And A Method Of Using A Lithographic Apparatus App 20220035254 - STEGEN; Raphael Nico Johan ;   et al. | 2022-02-03 |
A Process Tool And An Inspection Method App 20210349397 - STEGEN; Raphael Nico Johan ;   et al. | 2021-11-11 |
Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure Grant 11,156,921 - Stegen , et al. October 26, 2 | 2021-10-26 |
Fluid Handling Structure, Lithographic Apparatus, And Method Of Using A Fluid Handling Structure App 20210191275 - STEGEN; Raphael Nico Johan ;   et al. | 2021-06-24 |
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