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Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20140220733 - Hunks; William ;   et al. | 2014-08-07 |
Low Temperature Deposition Of Phase Change Memory Materials App 20140206134 - Roeder; Jeffrey F. ;   et al. | 2014-07-24 |
High-k Perovskite Materials And Methods Of Making And Using The Same App 20140134823 - Hendrix; Bryan C. ;   et al. | 2014-05-15 |
Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 8,709,863 - Hunks , et al. April 29, 2 | 2014-04-29 |
Low temperature deposition of phase change memory materials Grant 8,679,894 - Roeder , et al. March 25, 2 | 2014-03-25 |
Cleaning of semiconductor processing systems Grant 8,603,252 - Dimeo , et al. December 10, 2 | 2013-12-10 |
Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20130029456 - Hunks; William ;   et al. | 2013-01-31 |
Low Temperature Deposition Of Phase Change Memory Materials App 20130005078 - Roeder; Jeffrey F. ;   et al. | 2013-01-03 |
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Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 8,268,665 - Hunks , et al. September 18, 2 | 2012-09-18 |
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Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20110263100 - Hunks; William ;   et al. | 2011-10-27 |
Antimony and germanium complexes useful for CVD/ALD of metal thin films Grant 8,008,117 - Hunks , et al. August 30, 2 | 2011-08-30 |
Fluorine-free precursors and methods for the deposition of conformal conductive films for nanointerconnect seed and fill Grant 7,858,525 - Dominguez , et al. December 28, 2 | 2010-12-28 |
Antimony And Germanium Complexes Useful For Cvd/ald Of Metal Thin Films App 20100317150 - Hunks; William ;   et al. | 2010-12-16 |
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Novel Bismuth Precursors For Cvd/ald Of Thin Films App 20100279011 - Chen; Tianniu ;   et al. | 2010-11-04 |
Cleaning Of Semiconductor Processing Systems App 20100154835 - Dimeo; Frank ;   et al. | 2010-06-24 |
Zirconium, Hafnium, Titanium, And Silicon Precursors For Ald/cvd App 20100112211 - Xu; Chongying ;   et al. | 2010-05-06 |
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Novel Fluorine-Free Precursors and Methods for the Deposition of Conformal Conductive Films for Nanointerconnect Seed and Fill App 20080237861 - Dominguez; Juan E. ;   et al. | 2008-10-02 |
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