Patent | Date |
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Support, Vibration Isolation System, Lithographic Apparatus, Object Measurement Apparatus, Device Manufacturing Method App 20220290734 - VAN DE WIJDEVEN; Jeroen Johan Maarten ;   et al. | 2022-09-15 |
Vibration isolation system and lithographic apparatus Grant 11,422,477 - Jacobs , et al. August 23, 2 | 2022-08-23 |
Projection System And Lithographic Apparatus Comprising Said Projection System App 20220082947 - MUTSAERS; Marinus Engelbertus Cornelis ;   et al. | 2022-03-17 |
Frame assembly, lithographic apparatus and device manufacturing method Grant 11,269,262 - Butler , et al. March 8, 2 | 2022-03-08 |
Pneumatic support device and lithographic apparatus with pneumatic support device Grant 11,169,450 - Butler , et al. November 9, 2 | 2021-11-09 |
Frame Assembly, Lithographic Apparatus and Device Manufacturing Method App 20210240090 - BUTLER; Hans ;   et al. | 2021-08-05 |
Vibration Isolation System and Lithographic Apparatus App 20210080835 - JACOBS; Roy Hendrikus Emilie Maria ;   et al. | 2021-03-18 |
Pneumatic Support Device and Lithographic Apparatus with Pneumatic Support Device App 20210080834 - BUTLER; Hans ;   et al. | 2021-03-18 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method Grant 10,838,312 - Starreveld , et al. November 17, 2 | 2020-11-17 |
Vibration isolator, lithographic apparatus and device manufacturing method Grant 10,816,910 - Butler , et al. October 27, 2 | 2020-10-27 |
Lithographic Apparatus, Lithographic Projection Apparatus And Device Manufacturing Method App 20200057379 - STARREVELD; Jeroen Pieter ;   et al. | 2020-02-20 |
Lithographic apparatus and device manufacturing method Grant 10,503,086 - Butler , et al. Dec | 2019-12-10 |
Vibration Isolator, Lithographic Apparatus And Device Manufacturing Method App 20190049852 - Butler; Hans ;   et al. | 2019-02-14 |
Lithographic Apparatus And Device Manufacturing Method App 20190011838 - BUTLER; Hans ;   et al. | 2019-01-10 |
Support device, lithographic apparatus and device manufacturing method Grant 9,977,349 - Butler , et al. May 22, 2 | 2018-05-22 |
Imprint lithographic apparatus and imprint lithographic method Grant 9,715,171 - Butler , et al. July 25, 2 | 2017-07-25 |
Support Device, Lithographic Apparatus And Device Manufacturing Method App 20160334718 - BUTLER; Hans ;   et al. | 2016-11-17 |
Lithographic apparatus and stage system Grant 9,097,990 - Van Der Toorn , et al. August 4, 2 | 2015-08-04 |
Lithographic Apparatus And Stage System App 20120242271 - VAN DER TOORN; Jan-Gerard Cornelis ;   et al. | 2012-09-27 |
Lithographic apparatus and device manufacturing method Grant 8,184,266 - Starreveld , et al. May 22, 2 | 2012-05-22 |
Imprint Lithographic Apparatus And Imprint Lithographic Method App 20110163477 - Butler; Hans ;   et al. | 2011-07-07 |
Lithographic Apparatus and Device Manufacturing Method App 20090246703 - Starreveld; Jeroen Pieter ;   et al. | 2009-10-01 |
Optimized correction of wafer thermal deformations in a lithographic process Grant 7,595,496 - Ottens , et al. September 29, 2 | 2009-09-29 |
Optimized correction of water thermal deformations in a lithographic process App 20070257209 - Ottens; Joost Jeroen ;   et al. | 2007-11-08 |
Optimized correction of wafer thermal deformations in a lithographic process Grant 7,250,237 - Ottens , et al. July 31, 2 | 2007-07-31 |
Optimized correction of wafer thermal deformations in a lithographic process App 20050136346 - Ottens, Joost Jeroen ;   et al. | 2005-06-23 |