Starikov; Alexander

Patent Applications and Registrations

Patent applications and USPTO patent grants for Starikov; Alexander.The latest application filed is for "process variable of interest monitoring and control".

Company Profile

0.6.4

Starikov; Alexander - Palo Alto CA
Starikov; Alexander - Fishkill NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Process variable of interest monitoring and control Grant 7,369,697 - Starikov May 6, 2	2008-05-06
Process compensation for step and scan lithography Grant 7,289,198 - Starikov , et al. October 30, 2	2007-10-30
Defect compensation of lithography on non-planar surface Grant 7,006,208 - Starikov , et al. February 28, 2	2006-02-28
Process variable of interest monitoring and control App 20050281451 - Starikov, Alexander	2005-12-22
Substrate confinement apparatus and method App 20050181711 - Starikov, Alexander ; et al.	2005-08-18
Process compensation for step and scan lithography App 20050094132 - Starikov, Alexander ; et al.	2005-05-05
Defect compensation of lithography on non-planar surface App 20040130689 - Starikov, Alexander ; et al.	2004-07-08
Multi-layer integrated imaging/image recording process with improved image tolerances Grant 6,309,809 - Starikov , et al. October 30, 2	2001-10-30
Image recording process with improved image tolerances using embedded AR coatings Grant 5,879,866 - Starikov , et al. March 9, 1	1999-03-09
Accuracy of alignment and O/L measurement systems by means of tunable source and handling of signal Grant 5,276,337 - Starikov January 4, 1	1994-01-04

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