Stanke; Fred E

Patent Applications and Registrations

Patent applications and USPTO patent grants for Stanke; Fred E.The latest application filed is for "polarimetric scatterometry methods for critical dimension measurements of periodic structures".

Company Profile

0.35.23

Stanke; Fred E - San Jose CA
Stanke; Fred E. - Cupertino CA
Stanke; Fred E. - West Redding CT
Stanke; Fred E - Cupertino CA
Stanke; Fred E. - Ridgefield CT
Stanke; Fred E. - Palo Alto CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection site preparation Grant 9,165,742 - Simmons , et al. October 20, 2	2015-10-20
Polarimetric scatterometry methods for critical dimension measurements of periodic structures Grant 7,471,392 - Norton , et al. December 30, 2	2008-12-30
Polarimetric scatterometry methods for critical dimension measurements of periodic structures App 20080037015 - Norton; Adam E. ; et al.	2008-02-14
Polarimetric scatterometry methods for critical dimension measurements of periodic structures Grant 7,289,219 - Norton , et al. October 30, 2	2007-10-30
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor Grant 7,248,362 - Norton , et al. July 24, 2	2007-07-24
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor App 20070064229 - Norton; Adam E. ; et al.	2007-03-22
Apparatus for imaging metrology Grant 7,177,019 - Stanke , et al. February 13, 2	2007-02-13
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor Grant 7,158,229 - Norton , et al. January 2, 2	2007-01-02
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor App 20060197948 - Norton; Adam E. ; et al.	2006-09-07
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor Grant 7,099,081 - Norton , et al. August 29, 2	2006-08-29
Database interpolation method for optical measurement of diffractive microstructures Grant 7,069,182 - Johnson , et al. June 27, 2	2006-06-27
Method of measuring meso-scale structures on wafers Grant 7,049,633 - Johnson , et al. May 23, 2	2006-05-23
Overlay alignment metrology using diffraction gratings Grant 7,042,569 - Sezginer , et al. May 9, 2	2006-05-09
Apparatus for imaging metrology Grant 7,042,580 - Stanke , et al. May 9, 2	2006-05-09
Database interpolation method for optical measurement of diffractive microstructures App 20050280832 - Johnson, Kenneth C. ; et al.	2005-12-22
Database interpolation method for optical measurement of diffractive microstructures Grant 6,950,780 - Johnson , et al. September 27, 2	2005-09-27
Polarimetric scatterometry methods for critical dimension measurements of periodic structures App 20050174575 - Norton, Adam E. ; et al.	2005-08-11
Wafer metrology apparatus and method Grant 6,919,958 - Stanke , et al. July 19, 2	2005-07-19
Polarimetric scatterometry methods for critical dimension measurements of periodic structures Grant 6,909,507 - Norton , et al. June 21, 2	2005-06-21
Apparatus for imaging metrology App 20050128490 - Stanke, Fred E. ; et al.	2005-06-16
Accurate small-spot spectrometry systems and methods Grant 6,870,617 - Norton , et al. March 22, 2	2005-03-22
Method of measuring meso-scale structures on wafers App 20050057755 - Johnson, Kenneth C. ; et al.	2005-03-17
Optimized aperture shape for optical CD/profile metrology Grant 6,850,333 - Johnson , et al. February 1, 2	2005-02-01
Overlay alignment metrology using diffraction gratings App 20050018190 - Sezginer, Abdurrahman ; et al.	2005-01-27
Integrated surface metrology Grant 6,829,054 - Stanke , et al. December 7, 2	2004-12-07
Overlay alignment metrology using diffraction gratings Grant 6,819,426 - Sezginer , et al. November 16, 2	2004-11-16
Polarimetric scatterometry methods for critical dimension measurements of periodic structures App 20040218179 - Norton, Adam E. ; et al.	2004-11-04
Method of measuring meso-scale structures on wafers Grant 6,806,105 - Johnson , et al. October 19, 2	2004-10-19
Accurate small-spot spectrometry systems and methods App 20040174524 - Norton, Adam ; et al.	2004-09-09
Database interpolation method for optical measurement of diffractive microstructures App 20040167722 - Johnson, Kenneth C. ; et al.	2004-08-26
Polarimetric scatterometer for critical dimension measurements of periodic structures Grant 6,778,273 - Norton , et al. August 17, 2	2004-08-17
Database interpolation method for optical measurement of diffractive microstructures Grant 6,768,967 - Johnson , et al. July 27, 2	2004-07-27
Spectroscopic ellipsometer without rotating components Grant 6,753,961 - Norton , et al. June 22, 2	2004-06-22
Accurate small-spot spectrometry instrument Grant 6,738,136 - Norton , et al. May 18, 2	2004-05-18
Integrated surface metrology App 20040080757 - Stanke, Fred E. ; et al.	2004-04-29
Integrated surface metrology Grant 6,690,473 - Stanke , et al. February 10, 2	2004-02-10
Method of measuring meso-scale structures on wafers App 20040018653 - Johnson, Kenneth C. ; et al.	2004-01-29
Small-spot spectrometry instrument with reduced polarization Grant 6,667,805 - Norton , et al. December 23, 2	2003-12-23
Wafer metrology apparatus and method App 20030184742 - Stanke, Fred E. ; et al.	2003-10-02
Method of measuring meso-scale structures on wafers Grant 6,623,991 - Johnson , et al. September 23, 2	2003-09-23
Accurate small-spot spectrometry instrument App 20030090655 - Norton, Adam ; et al.	2003-05-15
Wafer metrology apparatus and method Grant 6,563,586 - Stanke , et al. May 13, 2	2003-05-13
Polarimetric scatterometer for critical dimension measurements of periodic structures App 20030020912 - Norton, Adam E. ; et al.	2003-01-30
Overlay alignment metrology using diffraction gratings App 20020158193 - Sezginer, Abdurrahman ; et al.	2002-10-31
Method of measuring meso-scale structures on wafers App 20020090743 - Johnson, Kenneth ; et al.	2002-07-11
Bathless wafer measurement apparatus and method App 20020065028 - Weber-Grabau, Michael ; et al.	2002-05-30
Database interpolation method for optical measurement of diffractive microstructures App 20020038196 - Johnson, Kenneth C. ; et al.	2002-03-28
Small-spot spectrometry instrument with reduced polarization App 20020021441 - Norton, Adam E. ; et al.	2002-02-21
Method of detecting residue on a polished wafer App 20020022936 - Stanke, Fred E.	2002-02-21
Optical critical dimension metrology system integrated into semiconductor wafer process tool App 20020018217 - Weber-Grabau, Michael ; et al.	2002-02-14
Method of measuring meso-scale structures on wafers Grant 6,340,602 - Johnson , et al. January 22, 2	2002-01-22
Method and apparatus for inspecting well bore casing Grant 6,188,643 - Liang , et al. February 13, 2	2001-02-13
Apparatus and method for characterizing semiconductor wafers during processing Grant 6,182,510 - Stanke , et al. February 6, 2	2001-02-06
In-situ measurement of deposition on reactor chamber members Grant 6,019,000 - Stanke , et al. February 1, 2	2000-02-01
Method and apparatus for hydraulic isolation determination Grant 6,018,496 - Stanke , et al. January 25, 2	2000-01-25
Apparatus and method for characterizing semiconductor wafers during processing Grant 5,996,415 - Stanke , et al. December 7, 1	1999-12-07
Method of analyzing waveforms Grant 5,859,811 - Miller , et al. January 12, 1	1999-01-12
Method and apparatus for inspecting well bore casing Grant 5,717,169 - Liang , et al. February 10, 1	1998-02-10