loadpatents
Patent applications and USPTO patent grants for Stanke; Fred.The latest application filed is for "inspecting high-resolution photolithography masks".
Patent | Date |
---|---|
Inspecting high-resolution photolithography masks Grant 9,619,878 - Stanke , et al. April 11, 2 | 2017-04-11 |
Inspecting High-resolution Photolithography Masks App 20140307943 - Stanke; Fred ;   et al. | 2014-10-16 |
Diffraction order sorting filter for optical metrology Grant 8,107,073 - Norton , et al. January 31, 2 | 2012-01-31 |
Calibration method for optical metrology Grant 7,924,422 - Stanke , et al. April 12, 2 | 2011-04-12 |
Diffraction Order Sorting Filter For Optical Metrology App 20100202055 - NORTON; Adam ;   et al. | 2010-08-12 |
Calibration Method For Optical Metrology App 20100201981 - STANKE; Fred ;   et al. | 2010-08-12 |
Matching optical metrology tools using hypothetical profiles Grant 7,446,887 - Stanke , et al. November 4, 2 | 2008-11-04 |
Matching optical metrology tools using diffraction signals Grant 7,446,888 - Stanke , et al. November 4, 2 | 2008-11-04 |
Matching optical metrology tools using hypothetical profiles App 20070268497 - Stanke; Fred ;   et al. | 2007-11-22 |
Matching optical metrology tools using diffraction signals App 20070268498 - Stanke; Fred ;   et al. | 2007-11-22 |
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