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Patent applications and USPTO patent grants for Stamp; Michael R..The latest application filed is for "bubbler for substrate processing".
Patent | Date |
---|---|
Bubbler for substrate processing Grant 7,370,848 - Stamp , et al. May 13, 2 | 2008-05-13 |
Bubbler For Substrate Processing App 20060237861 - Stamp; Michael R. ;   et al. | 2006-10-26 |
Bubbler for substrate processing Grant 7,077,388 - Stamp , et al. July 18, 2 | 2006-07-18 |
Low/high temperature substrate holder to reduce edge rolloff and backside damage App 20050092439 - Keeton, Tony J. ;   et al. | 2005-05-05 |
Method of loading a wafer onto a wafer holder to reduce thermal shock Grant 6,861,321 - Keeton , et al. March 1, 2 | 2005-03-01 |
Bubbler for substrate processing App 20040084149 - Stamp, Michael R. ;   et al. | 2004-05-06 |
Method of loading a wafer onto a wafer holder to reduce thermal shock App 20030190823 - Keeton, Tony J. ;   et al. | 2003-10-09 |
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