Patent | Date |
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Micro-conformal templates for nanoimprint lithography Grant 8,616,873 - Miller , et al. December 31, 2 | 2013-12-31 |
Materials for imprint lithography Grant 8,076,386 - Xu , et al. December 13, 2 | 2011-12-13 |
Micro-Conformal Templates for Nanoimprint Lithography App 20110183027 - Miller; Michael N. ;   et al. | 2011-07-28 |
Method to provide a layer with uniform etch characteristics Grant 7,939,131 - Xu , et al. May 10, 2 | 2011-05-10 |
Compositions for dark-field polymerization and method of using the same for imprint lithography processes Grant 7,906,060 - Willson , et al. March 15, 2 | 2011-03-15 |
Bifurcated contact printing technique Grant 7,906,058 - GanapathiSubramanian , et al. March 15, 2 | 2011-03-15 |
Technique for separating a mold from solidified imprinting material Grant 7,803,308 - GanapathiSubramanian , et al. September 28, 2 | 2010-09-28 |
Substrate Patterning App 20100112310 - Truskett; Van Nguyen ;   et al. | 2010-05-06 |
Self-aligned process for fabricating imprint templates containing variously etched features Grant 7,547,398 - Schmid , et al. June 16, 2 | 2009-06-16 |
Method of creating a turbulent flow of fluid between a mold and a substrate Grant 7,531,025 - McMackin , et al. May 12, 2 | 2009-05-12 |
Imprint Fluid Control App 20080303187 - Stacey; Nicholas A. ;   et al. | 2008-12-11 |
Compositions for Dark-Field Polymerization and Method of Using the Same for Imprint Lithography Processes App 20080230959 - Willson; C. Grant ;   et al. | 2008-09-25 |
Compositions for dark-field polymerization and method of using the same for imprint lithography processes Grant 7,365,103 - Willson , et al. April 29, 2 | 2008-04-29 |
Self-Aligned Process for Fabricating Imprint Templates Containing Variously Etched Features App 20070243655 - Schmid; Gerard M. ;   et al. | 2007-10-18 |
Composition to provide a layer with uniform etch characteristics Grant 7,282,550 - Xu , et al. October 16, 2 | 2007-10-16 |
System for creating a turbulent flow of fluid between a mold and a substrate Grant 7,270,533 - McMackin , et al. September 18, 2 | 2007-09-18 |
Reverse tone patterning on surfaces having planarity perturbations Grant 7,241,395 - Sreenivasan , et al. July 10, 2 | 2007-07-10 |
Bifurcated contact printing technique App 20070126150 - GanapathiSubramanian; Mahadevan ;   et al. | 2007-06-07 |
Technique for separating a mold from solidified imprinting material App 20070126156 - Mahadevan; GanapathiSubramanian ;   et al. | 2007-06-07 |
Patterning substrates employing multi-film layers defining etch-differential interfaces Grant 7,205,244 - Stacey , et al. April 17, 2 | 2007-04-17 |
Planarization Method of Patterning a Substratte App 20070034600 - Willson; C. Grant ;   et al. | 2007-02-15 |
Method to reduce adhesion between a conformable region and a pattern of a mold Grant 7,157,036 - Choi , et al. January 2, 2 | 2007-01-02 |
Method for providing desirable wetting and release characteristics between a mold and a polymerizable composition App 20060279024 - Choi; Byung-Jin ;   et al. | 2006-12-14 |
Imprint lithography template having a coating to reflect and/or absorb actinic energy App 20060266916 - Miller; Michael N. ;   et al. | 2006-11-30 |
Single phase fluid imprint lithography method Grant 7,090,716 - McMackin , et al. August 15, 2 | 2006-08-15 |
Imprint lithography method to control extrusion of a liquid from a desired region on a substrate App 20060177532 - Fletcher; Edward B. ;   et al. | 2006-08-10 |
Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks App 20060145398 - Bailey; Todd C. ;   et al. | 2006-07-06 |
Method of patterning surfaces while providing greater control of recess anisotropy Grant 7,041,604 - Miller , et al. May 9, 2 | 2006-05-09 |
Patterning substrates employing multi-film layers defining etch differential interfaces App 20060063359 - Stacey; Nicholas A. ;   et al. | 2006-03-23 |
Method of Patterning Surfaces While Providing Greater Control of Recess Anisotropy App 20060063387 - Miller; Michael N. ;   et al. | 2006-03-23 |
Reverse tone patterning on surfaces having surface planarity perturbations App 20060060557 - Sreenivasan; Sidlgata V. ;   et al. | 2006-03-23 |
Method to provide a layer with uniform etch characteristics App 20060035029 - Xu; Frank Y. ;   et al. | 2006-02-16 |
Composition to provide a layer with uniform etch characteristics App 20060036051 - Xu; Frank Y. ;   et al. | 2006-02-16 |
Method of forming a deep-featured template employed in imprint lithography App 20050230882 - Watts, Michael P.C. ;   et al. | 2005-10-20 |
Materials for imprint lithography App 20050187339 - Xu, Frank Y. ;   et al. | 2005-08-25 |
Planarization method of patterning a substrate App 20050156357 - Willson, C. Grant ;   et al. | 2005-07-21 |
Method of creating a turbulent flow of fluid between a mold and a substrate App 20050072757 - McMackin, Ian M. ;   et al. | 2005-04-07 |
Single phase fluid imprint lithography method App 20050072755 - McMackin, Ian M. ;   et al. | 2005-04-07 |
System for creating a turbulent flow of fluid between a mold and a substrate App 20050074512 - McMackin, Ian M. ;   et al. | 2005-04-07 |
Apparatus for selective photosensitization of optical fiber Grant 6,857,293 - Carpenter , et al. February 22, 2 | 2005-02-22 |
Method for selective photosensitization of optical fiber Grant 6,763,686 - Carpenter , et al. July 20, 2 | 2004-07-20 |
Planarization composition and method of patterning a substrate using the same App 20040112862 - Willson, C. Grant ;   et al. | 2004-06-17 |
Compositions for dark-field polymerization and method of using the same for imprint lithography processes App 20040116548 - Willson, C. Grant ;   et al. | 2004-06-17 |
Multiphoton absorption method using patterned light App 20040012872 - Fleming, Patrick R ;   et al. | 2004-01-22 |
Low viscosity high resolution patterning material App 20030235787 - Watts, Michael P.C. ;   et al. | 2003-12-25 |
Photoimageable, aqueous acid soluble polyimide polymers App 20030211425 - Mao, Guoping ;   et al. | 2003-11-13 |
Photothermographic and photographic elements having a transparent support having antihalation properties and properties for reducing woodgrain Grant 6,630,283 - Simpson , et al. October 7, 2 | 2003-10-07 |
Apparatus for selective photosensitization of optical fiber App 20030115911 - Carpenter, James B. ;   et al. | 2003-06-26 |
Method for selective photosensitization of optical fiber App 20020121115 - Carpenter, James B. ;   et al. | 2002-09-05 |
Photoimageable, aqueous acid soluble polyimide polymers App 20020086236 - Eitouni, Hany B. ;   et al. | 2002-07-04 |
Photoimageable, aqueous acid soluble polyimide polymers Grant 6,379,865 - Mao , et al. April 30, 2 | 2002-04-30 |
2-fluoroacrylate ester polymers and use thereof as optical materials Grant 6,018,008 - Stacey , et al. January 25, 2 | 2000-01-25 |
Fluorine containing plastic optical fiber cores Grant 5,223,593 - McAllister , et al. June 29, 1 | 1993-06-29 |
Fluorine-containing acrylate and methacrylate side-chain liquid crystal monomers and polymers Grant 5,087,672 - Babirad , et al. February 11, 1 | 1992-02-11 |