Srivatsan; Sridharan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Srivatsan; Sridharan.The latest application filed is for "tuning via facet with minimal rie lag".
- Srivatsan; Sridharan - Fremont CA
- Srivatsan; Sridharan - Sunnyvale CA
| Patent | Date |
|---|---|
| Method and apparatus for detecting planarization of metal films prior to clearing Grant 7,690,966 - Gopalan , et al. April 6, 2 | 2010-04-06 |
| Tuning Via Facet With Minimal Rie Lag App 20090068767 - Sirard; Stephen ; et al. | 2009-03-12 |
| Method and apparatus for detecting planarization of metal films prior to clearing Grant 7,413,988 - Gopalan , et al. August 19, 2 | 2008-08-19 |
| Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization process Grant 7,040,952 - Srivatsan , et al. May 9, 2 | 2006-05-09 |
| Method and apparatus for heating polishing pad Grant 6,896,586 - Pham , et al. May 24, 2 | 2005-05-24 |
| Method and apparatus for heating polishing pad App 20030186623 - Pham, Xuyen ; et al. | 2003-10-02 |
| Multi-step polishing system and process of using same App 20030060145 - Li, Youlin J. ; et al. | 2003-03-27 |
| Interlocking Chemical Mechanical Polishing System App 20020185467 - Boyd, John ; et al. | 2002-12-12 |
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