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Methods and apparatus for three dimensional NAND structure fabrication
Grant 11,430,801 - Koshizawa , et al. August 30, 2 | 2022-08-30 |
Conformal High Concentration Boron Doping Of Semiconductors
App 20220246432 - Gandikota; Srinivas ; et al. | 2022-08-04 |
Conformal high concentration boron doping of semiconductors
Grant 11,328,928 - Gandikota , et al. May 10, 2 | 2022-05-10 |
On stack overlay improvement for 3D NAND
Grant 11,276,569 - Lin , et al. March 15, 2 | 2022-03-15 |
3D-NAND mold
Grant 11,189,635 - Kang , et al. November 30, 2 | 2021-11-30 |
Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
Grant 11,152,248 - Liang , et al. October 19, 2 | 2021-10-19 |
Methods And Apparatus For Three Dimensional Nand Structure Fabrication
App 20210257375 - Koshizawa; Takehito ; et al. | 2021-08-19 |
Methods And Apparatus For Three Dimensional Nand Structure Fabrication
App 20210233918 - Koshizawa; Takehito ; et al. | 2021-07-29 |
Methods and apparatus for three dimensional NAND structure fabrication
Grant 10,998,329 - Koshizawa , et al. May 4, 2 | 2021-05-04 |
Framework for distributed key-value store in a wide area network
Grant 10,924,550 - Xu , et al. February 16, 2 | 2021-02-16 |
Methods And Apparatus For Three Dimensional Nand Structure Fabrication
App 20200373310 - Koshizawa; Takehito ; et al. | 2020-11-26 |
3d-nand Mold
App 20200312874 - Kang; Chang Seok ; et al. | 2020-10-01 |
Cyclic Flowable Deposition And High-density Plasma Treatment Processes For High Quality Gap Fill Solutions
App 20200286773 - LIANG; Jingmei ; et al. | 2020-09-10 |
System And Method For Personalized Add-on Purchase
App 20200258119 - A1 | 2020-08-13 |
Semiconductor process equipment
Grant 10,734,265 - Janakiraman , et al. | 2020-08-04 |
Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
Grant 10,707,116 - Liang , et al. | 2020-07-07 |
System and method for personalized add-on purchase
Grant 10,565,615 - Burr , et al. Feb | 2020-02-18 |
On Stack Overlay Improvement For 3d Nand
App 20200043723 - LIN; Yongjing ; et al. | 2020-02-06 |
Conformal High Concentration Boron Doping Of Semiconductors
App 20190385851 - GANDIKOTA; SRINIVAS ; et al. | 2019-12-19 |
Dielectric-metal stack for 3D flash memory application
Grant 10,475,644 - Han , et al. Nov | 2019-11-12 |
Photo-assisted deposition of flowable films
Grant 10,460,936 - Underwood , et al. Oc | 2019-10-29 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
System and method for upload and synchronization of media content to cloud based media services
Grant 10,380,077 - Suresh , et al. A | 2019-08-13 |
Methods for processing substrates using small plasma chambers
Grant 10,332,727 - Gottscho , et al. | 2019-06-25 |
Processing system containing an isolation region separating a deposition chamber from a treatment chamber
Grant 10,236,197 - Janakiraman , et al. | 2019-03-19 |
Cyclic Flowable Deposition And High-density Plasma Treatment Processes For High Quality Gap Fill Solutions
App 20180330980 - LIANG; Jingmei ; et al. | 2018-11-15 |
Semiconductor Process Equipment
App 20180308735 - JANAKIRAMAN; Karthik ; et al. | 2018-10-25 |
Framework For Distributed Key-value Store In A Wide Area Network
App 20180302474 - Xu; Yuehai ; et al. | 2018-10-18 |
Dielectric-metal Stack For 3d Flash Memory Application
App 20180247808 - HAN; Xinhai ; et al. | 2018-08-30 |
Semiconductor process equipment
Grant 10,056,279 - Janakiraman , et al. August 21, 2 | 2018-08-21 |
Cyclic sequential processes for forming high quality thin films
Grant 10,041,167 - Liang , et al. August 7, 2 | 2018-08-07 |
Framework for distributed key-value store in a wide area network
Grant 10,033,812 - Xu , et al. July 24, 2 | 2018-07-24 |
Integrated Atomic Layer Deposition Tool
App 20180155834 - Srinivasan; Mukund ; et al. | 2018-06-07 |
Methods for Processing Substrates Using Small Plasma Chambers
App 20180144906 - Gottscho; Richard ; et al. | 2018-05-24 |
Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of A Moving Substrate
App 20180138023 - Ponnekanti; Hari ; et al. | 2018-05-17 |
Dielectric-metal stack for 3D flash memory application
Grant 9,972,487 - Han , et al. May 15, 2 | 2018-05-15 |
Small plasma chamber systems and methods
Grant 9,911,578 - Gottscho , et al. March 6, 2 | 2018-03-06 |
Photo-assisted Deposition Of Flowable Films
App 20180040473 - UNDERWOOD; Brian Saxton ; et al. | 2018-02-08 |
Quad Chamber And Platform Having Multiple Quad Chambers
App 20170194174 - JANAKIRAMAN; Karthik ; et al. | 2017-07-06 |
Deposition of metal doped amorphous carbon film
Grant 9,624,577 - Manna , et al. April 18, 2 | 2017-04-18 |
Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications
Grant 9,613,908 - Padhi , et al. April 4, 2 | 2017-04-04 |
Framework For Distributed Key-value Store In A Wide Area Network
App 20170078387 - Xu; Yuehai ; et al. | 2017-03-16 |
Cyclic Sequential Processes For Forming High Quality Thin Films
App 20160244879 - LIANG; Jingmei ; et al. | 2016-08-25 |
Low-K dielectric gapfill by flowable deposition
Grant 9,412,581 - Thadani , et al. August 9, 2 | 2016-08-09 |
Development of high etch selective hardmask material by ion implantation into amorphous carbon films
Grant 9,412,613 - Manna , et al. August 9, 2 | 2016-08-09 |
Deposition of heteroatom-doped carbon films
Grant 9,406,509 - Manna , et al. August 2, 2 | 2016-08-02 |
Semiconductor Process Equipment
App 20160218029 - JANAKIRAMAN; Karthik ; et al. | 2016-07-28 |
Ultra-thin Dielectric Diffusion Barrier And Etch Stop Layer For Advanced Interconnect Applications
App 20160172239 - PADHI; Deenesh ; et al. | 2016-06-16 |
Processing System Containing An Isolation Region separating a Deposition chamber from a treatment chamber
App 20160133489 - JANAKIRAMAN; Karthik ; et al. | 2016-05-12 |
Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System
App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
Deposition Of Metal Doped Amorphous Carbon Film
App 20160027614 - MANNA; Pramit ; et al. | 2016-01-28 |
Low-k Dielectric Gapfill By Flowable Deposition
App 20160020089 - Thadani; Kiran V. ; et al. | 2016-01-21 |
System And Method For Personalized Add-on Purchase
App 20160005070 - Burr; Jonathan R. ; et al. | 2016-01-07 |
Small plasma chamber systems and methods
Grant 9,111,729 - Gottscho , et al. August 18, 2 | 2015-08-18 |
Cleaning Process For Cleaning Amorphous Carbon Deposition Residuals Using Low Rf Bias Frequency Applications
App 20150228463 - MANNA; Pramit ; et al. | 2015-08-13 |
Deposition Of Heteroatom-doped Carbon Films
App 20150206739 - MANNA; Pramit ; et al. | 2015-07-23 |
Dielectric-metal Stack For 3d Flash Memory Application
App 20150206757 - HAN; XINHAI ; et al. | 2015-07-23 |
Development Of High Etch Selective Hardmask Material By Ion Implantation Into Amorphous Carbon Films
App 20150194317 - MANNA; PRAMIT ; et al. | 2015-07-09 |
Photo-assisted Deposition Of Flowable Films
App 20150187563 - UNDERWOOD; BRIAN SAXTON ; et al. | 2015-07-02 |
Enabling Radical-based Deposition Of Dielectric Films
App 20150167160 - CHEN; Yihong ; et al. | 2015-06-18 |
Integrated capacitive and inductive power sources for a plasma etching chamber
Grant 8,911,590 - Dhindsa , et al. December 16, 2 | 2014-12-16 |
System And Method For Upload And Synchronization Of Media Content To Cloud Based Media Services
App 20140304225 - SURESH; DEEPA ; et al. | 2014-10-09 |
High Throughput Multi-layer Stack Deposition
App 20140287593 - HAN; Xinhai ; et al. | 2014-09-25 |
Small Plasma Chamber Systems and Methods
App 20140151333 - Gottscho; Richard ; et al. | 2014-06-05 |
High lifetime consumable silicon nitride-silicon dioxide plasma processing components
Grant 8,622,021 - Taylor , et al. January 7, 2 | 2014-01-07 |
Hierarchical rate limiting of control packets
Grant 8,576,866 - Gupta , et al. November 5, 2 | 2013-11-05 |
Methods for RF pulsing of a narrow gap capacitively coupled reactor
Grant 8,337,713 - Loewenhardt , et al. December 25, 2 | 2012-12-25 |
Hierarchical Rate Limiting Of Control Packets
App 20120195323 - Gupta; Anubhav ; et al. | 2012-08-02 |
Process tuning gas injection from the substrate edge
Grant 8,097,120 - Dhindsa , et al. January 17, 2 | 2012-01-17 |
RF pulsing of a narrow gap capacitively coupled reactor
Grant 7,976,673 - Loewenhardt , et al. July 12, 2 | 2011-07-12 |
Small Plasma Chamber Systems And Methods
App 20110132874 - Gottscho; Richard ; et al. | 2011-06-09 |
High Lifetime Consumable Silicon Nitride-silicon Dioxide Plasma Processing Components
App 20110021031 - Taylor; Travis R. ; et al. | 2011-01-27 |
Hardmask Open And Etch Profile Control With Hardmask Open
App 20100327413 - Lee; Jong Pil ; et al. | 2010-12-30 |
Hierarchical Rate Limiting of Control Packets
App 20100278191 - Gupta; Anubhav ; et al. | 2010-11-04 |
High aspect ratio etch using modulation of RF powers of various frequencies
Grant 7,749,353 - Rusu , et al. July 6, 2 | 2010-07-06 |
Etch profile control
Grant 7,645,707 - Rusu , et al. January 12, 2 | 2010-01-12 |
Process for etching dielectric films with improved resist and/or etch profile characteristics
Grant 7,547,635 - Eppler , et al. June 16, 2 | 2009-06-16 |
Multiple frequency plasma processor method and apparatus
Grant 7,405,521 - Dhindsa , et al. July 29, 2 | 2008-07-29 |
Integrated capacitive and inductive power sources for a plasma etching chamber
App 20070199658 - Dhindsa; Rajinder ; et al. | 2007-08-30 |
Process tuning gas injection from the substrate edge
App 20070193688 - Dhindsa; Rajinder ; et al. | 2007-08-23 |
High aspect ratio etch using modulation of RF powers of various frequencies
App 20070012659 - Rusu; Camelia ; et al. | 2007-01-18 |
High aspect ratio etch using modulation of RF powers of various frequencies
Grant 7,144,521 - Rusu , et al. December 5, 2 | 2006-12-05 |
Etch profile control
App 20060226120 - Rusu; Camelia ; et al. | 2006-10-12 |
Chamber configuration for confining a plasma
Grant 7,094,315 - Chen , et al. August 22, 2 | 2006-08-22 |
High aspect ratio etch using modulation of RF powers of various frequencies
App 20060118518 - Rusu; Camelia ; et al. | 2006-06-08 |
Plasma processor in plasma confinement region within a vacuum chamber
Grant 6,984,288 - Dhindsa , et al. January 10, 2 | 2006-01-10 |
Methods of reducing photoresist distortion while etching in a plasma processing system
Grant 6,942,816 - Rusu , et al. September 13, 2 | 2005-09-13 |
Chamber configuration for confining a plasma
App 20050103442 - Chen, Jian J. ; et al. | 2005-05-19 |
Chamber configuration for confining a plasma
Grant 6,872,281 - Chen , et al. March 29, 2 | 2005-03-29 |
Multiple frequency plasma etch reactor
App 20050039682 - Dhindsa, Raj ; et al. | 2005-02-24 |
Stepped upper electrode for plasma processing uniformity
Grant 6,824,627 - Dhindsa , et al. November 30, 2 | 2004-11-30 |
RF pulsing of a narrow gap capacitively coupled reactor
App 20040221958 - Loewenhardt, Peter ; et al. | 2004-11-11 |
Methods of reducing photoresist distortion while etching in a plasma processing system
App 20040155012 - Rusu, Camelia ; et al. | 2004-08-12 |
Probe for direct wafer potential measurements
Grant 6,714,033 - Makhratchev , et al. March 30, 2 | 2004-03-30 |
Process for etching dielectric films with improved resist and/or etch profile characteristics
App 20030232504 - Eppler, Aaron ; et al. | 2003-12-18 |
Dual frequency plasma processor
App 20030029567 - Dhindsa, Rajinder ; et al. | 2003-02-13 |
Stepped upper electrode for plasma processing uniformity
App 20020187647 - Dhindsa, Rajinder ; et al. | 2002-12-12 |
Stepped upper electrode for plasma processing uniformity
Grant 6,391,787 - Dhindsa , et al. May 21, 2 | 2002-05-21 |
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