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Pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 11,387,136 - Konkola , et al. July 12, 2 | 2022-07-12 |
Progressive heating of components of substrate processing systems using TCR element-based heaters
Grant 11,183,400 - Chandrasekharan , et al. November 23, 2 | 2021-11-23 |
Wafer positioning pedestal for semiconductor processing
Grant 11,056,380 - Konkola , et al. July 6, 2 | 2021-07-06 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 10,870,922 - Konkola , et al. December 22, 2 | 2020-12-22 |
Controlling showerhead heating via resistive thermal measurements
Grant 10,872,747 - Linebarger, Jr. , et al. December 22, 2 | 2020-12-22 |
Wafer Positioning Pedestal For Semiconductor Processing
App 20200312703 - Konkola; Paul ; et al. | 2020-10-01 |
Wafer positioning pedestal for semiconductor processing
Grant 10,699,937 - Konkola , et al. | 2020-06-30 |
Moment Cancelling Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing
App 20200173016 - Konkola; Paul ; et al. | 2020-06-04 |
Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing
App 20200176301 - Konkola; Paul ; et al. | 2020-06-04 |
Temperature controlled showerhead
Grant 10,584,415 - Meinhold , et al. | 2020-03-10 |
Pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 10,573,549 - Konkola , et al. Feb | 2020-02-25 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 10,570,515 - Konkola , et al. Feb | 2020-02-25 |
Controlling Showerhead Heating Via Resistive Thermal Measurements
App 20200051789 - LINEBARGER, JR.; Nick Ray ; et al. | 2020-02-13 |
Progressive Heating Of Components Of Substrate Processing Systems Using Tcr Element-based Heaters
App 20200051834 - CHANDRASEKHARAN; Ramesh ; et al. | 2020-02-13 |
Wafer Positioning Pedestal For Semiconductor Processing
App 20190341292 - Konkola; Paul ; et al. | 2019-11-07 |
Temperature Controlled Showerhead
App 20190256977 - Meinhold; Henner ; et al. | 2019-08-22 |
Wafer positioning pedestal for semiconductor processing
Grant 10,354,909 - Konkola , et al. July 16, 2 | 2019-07-16 |
Temperature controlled showerhead
Grant 10,221,484 - Meinhold , et al. | 2019-03-05 |
Moment Cancelling Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing
App 20190067071 - Konkola; Paul ; et al. | 2019-02-28 |
Wafer Positioning Pedestal For Semiconductor Processing
App 20180323098 - Konkola; Paul ; et al. | 2018-11-08 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 10,121,689 - Konkola , et al. November 6, 2 | 2018-11-06 |
Moment Cancelling Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing
App 20180211862 - Konkola; Paul ; et al. | 2018-07-26 |
Wafer positioning pedestal for semiconductor processing
Grant 10,020,220 - Konkola , et al. July 10, 2 | 2018-07-10 |
Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing
App 20180158716 - Konkola; Paul ; et al. | 2018-06-07 |
Wafer Positioning Pedestal For Semiconductor Processing
App 20180130696 - Konkola; Paul ; et al. | 2018-05-10 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 9,960,068 - Konkola , et al. May 1, 2 | 2018-05-01 |
Wafer positioning pedestal for semiconductor processing
Grant 9,892,956 - Konkola , et al. February 13, 2 | 2018-02-13 |
Method for depositing a chlorine-free conformal SiN film
Grant 9,670,579 - Hausmann , et al. June 6, 2 | 2017-06-06 |
Temperature Controlled Showerhead
App 20170009344 - Meinhold; Henner W. ; et al. | 2017-01-12 |
Temperature controlled showerhead
Grant 9,476,120 - Meinhold , et al. October 25, 2 | 2016-10-25 |
Plasma activated conformal film deposition
Grant 9,230,800 - LaVoie , et al. January 5, 2 | 2016-01-05 |
Method For Depositing A Chlorine-free Conformal Sin Film
App 20150259791 - Hausmann; Dennis ; et al. | 2015-09-17 |
Method for depositing a chlorine-free conformal sin film
Grant 9,070,555 - Hausmann , et al. June 30, 2 | 2015-06-30 |
Plasma Activated Conformal Film Deposition
App 20140209562 - LaVoie; Adrien ; et al. | 2014-07-31 |
Temperature Controlled Showerhead
App 20140158792 - Meinhold; Henner ; et al. | 2014-06-12 |
Method For Depositing A Chlorine-free Conformal Sin Film
App 20140141626 - Hausmann; Dennis ; et al. | 2014-05-22 |
Plasma activated conformal film deposition
Grant 8,728,956 - LaVoie , et al. May 20, 2 | 2014-05-20 |
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
Grant 8,715,788 - Bandyopadhyay , et al. May 6, 2 | 2014-05-06 |
Temperature controlled showerhead
Grant 8,673,080 - Meinhold , et al. March 18, 2 | 2014-03-18 |
Method for depositing a chlorine-free conformal sin film
Grant 8,592,328 - Hausmann , et al. November 26, 2 | 2013-11-26 |
Method For Depositing A Chlorine-free Conformal Sin Film
App 20130189854 - Hausmann; Dennis ; et al. | 2013-07-25 |
Temperature controlled showerhead
Grant 8,137,467 - Meinhold , et al. March 20, 2 | 2012-03-20 |
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
Grant 8,043,667 - Bandyopadhyay , et al. October 25, 2 | 2011-10-25 |
Plasma Activated Conformal Film Deposition
App 20110256726 - LaVoie; Adrien ; et al. | 2011-10-20 |
PECVD methods for producing ultra low-k dielectric films using UV treatment
Grant 7,906,174 - Wu , et al. March 15, 2 | 2011-03-15 |
Methods for producing low-stress carbon-doped oxide films with improved integration properties
Grant 7,695,765 - Fox , et al. April 13, 2 | 2010-04-13 |
Method for improving mechanical properties of low dielectric constant materials
Grant 7,622,400 - Fox , et al. November 24, 2 | 2009-11-24 |
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
Grant 7,611,757 - Bandyopadhyay , et al. November 3, 2 | 2009-11-03 |
Temperature Controlled Showerhead
App 20090095220 - Meinhold; Henner ; et al. | 2009-04-16 |
Temperature controlled showerhead
App 20090095218 - Meinhold; Henner ; et al. | 2009-04-16 |
Temperature controlled showerhead
App 20090095219 - Meinhold; Henner ; et al. | 2009-04-16 |
Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties
Grant 7,265,061 - Cho , et al. September 4, 2 | 2007-09-04 |
Method to improve mechanical strength of low-k dielectric film using modulated UV exposure
Grant 7,253,125 - Bandyopadhyay , et al. August 7, 2 | 2007-08-07 |
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