Srichurnam; Dharma Ratnam
Patent Applications and Registrations
Patent applications and USPTO patent grants for Srichurnam; Dharma Ratnam.The latest application filed is for "cleaning assemblies for substrate processing chambers".
- Srichurnam; Dharma Ratnam - Bengaluru IN
- Srichurnam; Dharma Ratnam - Karnataka IN
| Patent | Date |
|---|---|
| Cleaning Assemblies For Substrate Processing Chambers App 20220307129 - Zhang; Yuxing ; et al. | 2022-09-29 |
| Methods for purging a substrate carrier at a factory interface Grant 10,903,102 - Iyer , et al. January 26, 2 | 2021-01-26 |
| Methods For Purging A Substrate Carrier At A Factory Interface App 20200066560 - Iyer; Subramaniam V. ; et al. | 2020-02-27 |
| Systems, apparatus, and methods for purging a substrate carrier at a factory interface Grant 10,510,570 - Iyer , et al. Dec | 2019-12-17 |
| Systems, Apparatus, And Methods For Purging A Substrate Carrier At A Factory Interface App 20160118279 - Iyer; Subramaniam V. ; et al. | 2016-04-28 |
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