Sreekala; Subbalakshmi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sreekala; Subbalakshmi.The latest application filed is for "adhesion improvements for oxide-silicon stack".
- Sreekala; Subbalakshmi - Milpitas CA
- Sreekala; Subbalakshmi - Sunnyvale CA US
| Patent | Date |
|---|---|
| Gate stack materials for semiconductor applications for lithographic overlay improvement Grant 9,490,116 - Tsiang , et al. November 8, 2 | 2016-11-08 |
| Adhesion Improvements For Oxide-silicon Stack App 20160260602 - SREEKALA; Subbalakshmi ; et al. | 2016-09-08 |
| Gate Stack Materials For Semiconductor Applications For Lithographic Overlay Improvement App 20160203971 - TSIANG; Michael ; et al. | 2016-07-14 |
| BEOL interconnect with carbon nanotubes Grant 9,305,838 - Narwankar , et al. April 5, 2 | 2016-04-05 |
| Methods For Maintaining Clean Etch Rate And Reducing Particulate Contamination With Pecvd Of Amorphous Silicon Filims App 20140272184 - SREEKALA; Subbalakshmi ; et al. | 2014-09-18 |
| BEOL Interconnect With Carbon Nanotubes App 20130228933 - Narwankar; Pravin K. ; et al. | 2013-09-05 |
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