Patent | Date |
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Electrodeposition Of Cobalt Tungsten Films App 20220102209 - Spurlin; Tighe A. ;   et al. | 2022-03-31 |
Removal of electroplating bath additives Grant 11,280,022 - Spurlin , et al. March 22, 2 | 2022-03-22 |
Monitoring surface oxide on seed layers during electroplating Grant 11,208,732 - Huang , et al. December 28, 2 | 2021-12-28 |
Removal Of Electroplating Bath Additives App 20200308724 - Spurlin; Tighe A. ;   et al. | 2020-10-01 |
Configuration and method of operation of an electrodeposition system for improved process stability and performance Grant 10,745,817 - Ganesan , et al. A | 2020-08-18 |
Removal of electroplating bath additives Grant 10,711,366 - Spurlin , et al. | 2020-07-14 |
Monitoring Surface Oxide On Seed Layers During Electroplating App 20190390361 - Huang; Ludan ;   et al. | 2019-12-26 |
Monitoring surface oxide on seed layers during electroplating Grant 10,443,146 - Huang , et al. Oc | 2019-10-15 |
Removal Of Electroplating Bath Additives App 20190203375 - Spurlin; Tighe A. ;   et al. | 2019-07-04 |
Method And Apparatus For Remote Plasma Treatment For Reducing Metal Oxides On A Metal Seed Layer App 20180350670 - Spurlin; Tighe A. ;   et al. | 2018-12-06 |
Monitoring Surface Oxide On Seed Layers During Electroplating App 20180282894 - Huang; Ludan ;   et al. | 2018-10-04 |
Configuration And Method Of Operation Of An Electrodeposition System For Improved Process Stability And Performance App 20180038007 - Ganesan; Kousik ;   et al. | 2018-02-08 |
Method And Apparatus For Electroplating Semiconductor Wafer When Controlling Cations In Electrolyte App 20180030611 - Spurlin; Tighe A. ;   et al. | 2018-02-01 |
Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer Grant 9,865,501 - Spurlin , et al. January 9, 2 | 2018-01-09 |
Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte Grant 9,816,196 - Spurlin , et al. November 14, 2 | 2017-11-14 |
Method and apparatus for characterizing metal oxide reduction Grant 9,472,377 - Opocensky , et al. October 18, 2 | 2016-10-18 |
Current ramping and current pulsing entry of substrates for electroplating Grant 9,385,035 - Spurlin , et al. July 5, 2 | 2016-07-05 |
Method And Apparatus For Characterizing Metal Oxide Reduction App 20160111342 - Huang; Ludan ;   et al. | 2016-04-21 |
Method And Apparatus For Characterizing Metal Oxide Reduction App 20160111344 - Opocensky; Edward C. ;   et al. | 2016-04-21 |
Atmospheric Plasma Apparatus For Semiconductor Processing App 20150376792 - Spurlin; Tighe A. ;   et al. | 2015-12-31 |
Method And Apparatus For Preparing A Substrate With A Semi-noble Metal Layer App 20150299886 - Doubina; Natalia V. ;   et al. | 2015-10-22 |
Methods for reducing metal oxide surfaces to modified metal surfaces using a gaseous reducing environment Grant 9,070,750 - Spurlin , et al. June 30, 2 | 2015-06-30 |
Method And Apparatus For Remote Plasma Treatment For Reducing Metal Oxides On A Metal Seed Layer App 20150072538 - Spurlin; Tighe A. ;   et al. | 2015-03-12 |
Method And Apparatus For Remote Plasma Treatment For Reducing Metal Oxides On A Metal Seed Layer App 20140256128 - Spurlin; Tighe A. ;   et al. | 2014-09-11 |
Methods For Reducing Metal Oxide Surfaces To Modified Metal Surfaces Using A Gaseous Reducing Environment App 20140256127 - Spurlin; Tighe A. ;   et al. | 2014-09-11 |
Current Ramping And Current Pulsing Entry Of Substrates For Electroplating App 20140224661 - Spurlin; Tighe A. ;   et al. | 2014-08-14 |
Methods For Reducing Metal Oxide Surfaces To Modified Metal Surfaces App 20140199497 - Spurlin; Tighe A. ;   et al. | 2014-07-17 |
Selective Capping of Metal Interconnect Lines during Air Gap Formation App 20130323930 - Chattopadhyay; Kaushik ;   et al. | 2013-12-05 |
Method And Apparatus For Electroplating Semiconductor Wafer When Controlling Cations In Electrolyte App 20130284604 - Spurlin; Tighe A. ;   et al. | 2013-10-31 |