Spiller; Eberhard A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Spiller; Eberhard A..The latest application filed is for "area x-ray or uv camera system for high-intensity beams".

Company Profile

0.8.5

Spiller; Eberhard A. - Livermore CA
Spiller; Eberhard A. - Mt. Kisco NY
Spiller; Eberhard A. - Mount Kisco NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Area X-ray or UV camera system for high-intensity beams Grant 7,672,430 - Chapman , et al. March 2, 2	2010-03-02
Area x-ray or UV camera system for high-intensity beams App 20090116619 - Chapman; Henry N. ; et al.	2009-05-07
Planarization of substrate pits and scratches App 20050118533 - Mirkarimi, Paul B. ; et al.	2005-06-02
Optimized capping layers for EUV multilayers Grant 6,780,496 - Bajt , et al. August 24, 2	2004-08-24
Low-cost method for producing extreme ultraviolet lithography optics Grant 6,634,760 - Folta , et al. October 21, 2	2003-10-21
Ion-assisted deposition techniques for the planarization of topological defects App 20030164998 - Mirkarimi, Paul B. ; et al.	2003-09-04
Low-cost method for producing extreme ultraviolet lithography optics App 20030043483 - Folta, James A. ; et al.	2003-03-06
Optimized capping layers for EUV multilayers App 20030008180 - Bajt, Sasa ; et al.	2003-01-09
Method to adjust multilayer film stress induced deformation of optics Grant 6,134,049 - Spiller , et al. October 17, 2	2000-10-17
Phase retardation element and prism for use in an optical data storage system Grant 4,595,261 - Baasch , et al. June 17, 1	1986-06-17
Method for fabricating self-aligned high resolution non planar devices employing low resolution registration Grant 4,268,952 - Gaensslen , et al. May 26, 1	1981-05-26
Fabrication of high aspect ratio masks Grant 4,018,938 - Feder , et al. April 19, 1	1977-04-19
Method for preparing positive resist image Grant 3,984,582 - Feder , et al. October 5, 1	1976-10-05

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