Spencer; Shannon
Patent Applications and Registrations
Patent applications and USPTO patent grants for Spencer; Shannon.The latest application filed is for "showerhead electrodes".
- Spencer; Shannon - Huber Heights OH
| Patent | Date |
|---|---|
| Showerhead electrodes Grant 8,268,117 - Bettencourt , et al. September 18, 2 | 2012-09-18 |
| Showerhead Electrodes App 20120160941 - Bettencourt; Greg ; et al. | 2012-06-28 |
| Showerhead electrode assemblies and plasma processing chambers incorporating the same Grant 8,152,954 - Bettencourt , et al. April 10, 2 | 2012-04-10 |
| Electrode/probe assemblies and plasma processing chambers incorporating the same Grant 8,043,470 - Hardin , et al. October 25, 2 | 2011-10-25 |
| Electrode/probe Assemblies And Plasma Processing Chambers Incorporating The Same App 20090126633 - Hardin; Randall A. ; et al. | 2009-05-21 |
| Showerhead Electrode Assemblies And Plasma Processing Chambers Incorporating The Same App 20090095424 - Bettencourt; Greg ; et al. | 2009-04-16 |
| Plasma etching chamber parts made with EDM App 20070284339 - Moore; David O. ; et al. | 2007-12-13 |
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