SpeedFam-IPEC Corporation

Patent Applications and Registrations

Patent applications and USPTO patent grants for SpeedFam-IPEC Corporation.The latest application filed is for "method and apparatus for controlled slurry distribution".

Company Profile

0.100.20

SpeedFam-IPEC Corporation - Chandler AZ
SPEEDFAM-IPEC CORPORATION - 305 North 54th Street Chandler AZ
SpeedFam-IPEC Corporation -
SpeedFam IPEC Corp. - Chandler AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for controlling slurry distribution Grant 7,314,402 - Laursen , et al. January 1, 2	2008-01-01
Orbiting indexable belt polishing station for chemical mechanical polishing Grant 7,229,343 - Chadda , et al. June 12, 2	2007-06-12
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece Grant 7,140,956 - Korovin , et al. November 28, 2	2006-11-28
Methods and apparatus for the chemical mechanical planarization of electronic devices Grant 7,083,501 - Fruitman August 1, 2	2006-08-01
Clean room facility and construction method Grant 7,083,515 - Rapisarda , et al. August 1, 2	2006-08-01
Method And Apparatus For Controlled Slurry Distribution App 20060151110 - Laursen; Thomas ; et al.	2006-07-13
Apparatus for electrochemically depositing a material onto a workpiece surface Grant 7,033,464 - Emesh , et al. April 25, 2	2006-04-25
Method And Apparatus For Electrochemical Planarization Of A Workpiece App 20060081460 - Emesh; Ismail ; et al.	2006-04-20
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece Grant 7,025,664 - Korovin , et al. April 11, 2	2006-04-11
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece Grant 7,014,541 - Korovin , et al. March 21, 2	2006-03-21
Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector Grant 6,979,034 - McNurlin , et al. December 27, 2	2005-12-27
Method and apparatus for electrochemical planarization of a workpiece Grant 6,974,525 - Emesh , et al. December 13, 2	2005-12-13
Multiprobe detection system for chemical-mechanical planarization tool Grant 6,960,115 - Weldon , et al. November 1, 2	2005-11-01
Multizone carrier with process monitoring system for chemical-mechanical planarization tool Grant 6,923,711 - Laursen , et al. August 2, 2	2005-08-02
Low amplitude, high speed polisher and method Grant 6,913,528 - Schulz , et al. July 5, 2	2005-07-05
Polishing pad window for a chemical-mechanical polishing tool Grant 6,878,039 - Yang , et al. April 12, 2	2005-04-12
Integrated Pressure Control System For Workpiece Carrier App 20050070205 - Korovin, Nikolay ; et al.	2005-03-31
Robotic method of transferring workpieces to and from workstations Grant 6,852,007 - Gonzalez-Martin , et al. February 8, 2	2005-02-08
Apparatus and process for polishing a workpiece Grant 6,849,547 - Chadda , et al. February 1, 2	2005-02-01
Orbiting Indexable Belt Polishing Station For Chemical Mechanical Polishing App 20050009452 - Chadda, Saket ; et al.	2005-01-13
System and method for cleaning workpieces Grant 6,818,604 - Emesh , et al. November 16, 2	2004-11-16
Multiprobe detection system for chemical-mechanical planarization tool Grant 6,805,613 - Weldon , et al. October 19, 2	2004-10-19
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface Grant 6,802,955 - Emesh , et al. October 12, 2	2004-10-12
Method And Apparatus For Electrochemical Planarization Of A Workpiece App 20040195110 - Emesh, Ismail ; et al.	2004-10-07
Wear ring assembly Grant 6,796,887 - Marquardt September 28, 2	2004-09-28
Orbiting indexable belt polishing station for chemical mechanical polishing Grant 6,793,565 - Chadda , et al. September 21, 2	2004-09-21
Method for processing a work piece in a multi-zonal processing apparatus Grant 6,790,123 - Korovin , et al. September 14, 2	2004-09-14
Laminated wear ring Grant 6,758,939 - Marquardt , et al. July 6, 2	2004-07-06
Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector Grant 6,752,442 - McNurlin , et al. June 22, 2	2004-06-22
Workpiece carrier with adjustable pressure zones and barriers Grant 6,746,318 - Mallery , et al. June 8, 2	2004-06-08
Workpiece carrier retaining element Grant 6,736,713 - Lougher , et al. May 18, 2	2004-05-18
Method and apparatus for electrochemical planarization of a workpiece Grant 6,736,952 - Emesh , et al. May 18, 2	2004-05-18
Homogeneous fixed abrasive polishing pad Grant 6,702,866 - Kamboj March 9, 2	2004-03-09
Polishing pad window for a chemical mechanical polishing tool Grant 6,685,537 - Fruitman , et al. February 3, 2	2004-02-03
Multiple vertical wafer cleaner Grant 6,678,911 - Krupa , et al. January 20, 2	2004-01-20
Learning method and apparatus for predictive determination of endpoint during chemical mechanical planarization using sparse sampling Grant 6,676,482 - Bibby, Jr. , et al. January 13, 2	2004-01-13
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece Grant 6,659,850 - Korovin , et al. December 9, 2	2003-12-09
Dynamic slurry distribution control for CMP Grant 6,652,366 - Dyer November 25, 2	2003-11-25
Method and apparatus for distributing fluid to a polishing surface during chemical mechanical polishing Grant 6,641,462 - Eaton November 4, 2	2003-11-04
Method and apparatus for optical endpoint detection during chemical mechanical polishing Grant 6,618,130 - Chen September 9, 2	2003-09-09
Workpiece carrier with adjustable pressure zones and barriers Grant 6,612,903 - Korovin , et al. September 2, 2	2003-09-02
Clean room and method Grant 6,612,084 - Rapisarda , et al. September 2, 2	2003-09-02
Method and apparatus for endpoint detection during chemical mechanical polishing Grant 6,586,337 - Parikh July 1, 2	2003-07-01
Method for controlling a process in a multi-zonal apparatus Grant 6,582,277 - Korovin June 24, 2	2003-06-24
Clean room and method Grant 6,574,937 - Rapisarda , et al. June 10, 2	2003-06-10
Work piece wand and method for processing work pieces using a work piece handling wand Grant 6,558,562 - Mallery , et al. May 6, 2	2003-05-06
Front-reference carrier on orbital solid platen App 20030077986 - Schultz, Stephen C. ; et al.	2003-04-24
Workpiece carrier with adjustable pressure zones and barriers App 20030073381 - Mallery, Daniel S. ; et al.	2003-04-17
Method and apparatus for optical endpoint calibration in CMP Grant 6,549,279 - Adams , et al. April 15, 2	2003-04-15
Laminated wear ring App 20030041967 - Marquardt, David ; et al.	2003-03-06
Load and unload station for semiconductor wafers Grant 6,520,839 - Gonzalez-Martin , et al. February 18, 2	2003-02-18
Method and apparatus for in-situ endpoint detection using electrical sensors Grant 6,515,493 - Adams , et al. February 4, 2	2003-02-04
Method and apparatus for optical endpoint calibration in CMP App 20030020909 - Adams, John A. ; et al.	2003-01-30
Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMP Grant 6,491,569 - Bibby, Jr. , et al. December 10, 2	2002-12-10
Differential Cleaning for semiconductor wafers with copper circuitry App 20020170574 - Quarantello, Justin M.	2002-11-21
Method and apparatus for semiconductor wafer cleaning App 20020166569 - Harvey, Ellis ; et al.	2002-11-14
Multiple vertical wafer cleaner App 20020162181 - Krupa, Frank ; et al.	2002-11-07
Method to mathematically characterize a multizone carrier Grant 6,468,131 - Korovin October 22, 2	2002-10-22
Method and apparatus for a spectrally stable light source using white light LEDs App 20020145728 - Adams, John A. ; et al.	2002-10-10
Low amplitude, high speed polisher and method App 20020132561 - Schulz, Stephen C. ; et al.	2002-09-19
Carriers with concentric balloons supporting a diaphragm Grant 6,447,368 - Fruitman , et al. September 10, 2	2002-09-10
Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor Grant 6,447,379 - Gromko , et al. September 10, 2	2002-09-10
Multi-zone pressure control carrier App 20020094759 - Korovin, Nikolay	2002-07-18
Rotary Union For Semiconductor Wafer Applications App 20020086617 - Garcia, John ; et al.	2002-07-04
Rigid polishing pad conditioner for chemical mechanical polishing tool Grant 6,409,580 - Lougher , et al. June 25, 2	2002-06-25
Reinforced CMP carrier bladders App 20020077049 - Fruitman, Clinton O. ; et al.	2002-06-20
Work piece wand and method for processing work pieces using a work piece handling wand App 20020067985 - Mallery, Daniel S. ; et al.	2002-06-06
Hydrophobic optical endpoint light pipes for chemical mechanical polishing Grant 6,395,130 - Adams , et al. May 28, 2	2002-05-28
Workpiece carrier with adjustable pressure zones and barriers App 20020061716 - Korovin, Nikolay N. ; et al.	2002-05-23
Method and apparatus for improved stability chemical mechanical polishing Grant 6,390,891 - Guha , et al. May 21, 2	2002-05-21
Cleaning station integral with polishing machine for semiconductor wafers Grant 6,390,897 - Gonzalez-Martin , et al. May 21, 2	2002-05-21
Workpiece carrier with adjustable pressure zones and barriers Grant 6,390,905 - Korovin , et al. May 21, 2	2002-05-21
Method for selective removal of copper Grant 6,387,807 - Faubert , et al. May 14, 2	2002-05-14
System for improving the total thickness variation of a wafer Grant 6,379,490 - Bollinger , et al. April 30, 2	2002-04-30
Polishing pad conditioning device with cutting elements Grant 6,371,838 - Holzapfel April 16, 2	2002-04-16
Apparatus and method for spinning a work piece Grant 6,363,623 - Abraham April 2, 2	2002-04-02
Mapping system for semiconductor wafer cassettes Grant 6,364,745 - Gonzalez-Martin , et al. April 2, 2	2002-04-02
Wafer polishing method and apparatus Grant RE37,622 - Karlsrud , et al. April 2, 2	2002-04-02
Method and apparatus for endpoint detection for chemical mechanical polishing Grant 6,361,646 - Bibby, Jr. , et al. March 26, 2	2002-03-26
Micro-adjustable wafer retaining apparatus Grant 6,354,927 - Natalicio March 12, 2	2002-03-12
Method and apparatus for removing a material layer from a substrate App 20020023719 - Epshteyn, Yakov ; et al.	2002-02-28
Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitride Grant 6,347,981 - Holzapfel February 19, 2	2002-02-19
Arrangements for wafer polishing Grant 6,309,279 - Bowman , et al. October 30, 2	2001-10-30
Fluid metering system Grant 6,296,226 - Olsen October 2, 2	2001-10-02
Distributed control system for a semiconductor wafer processing machine Grant 6,292,708 - Allen , et al. September 18, 2	2001-09-18
Workpiece carrier with segmented and floating retaining elements Grant 6,290,584 - Kim , et al. September 18, 2	2001-09-18
System and method for detecting CMP endpoint via direct chemical monitoring of reactions Grant 6,287,171 - Meloni September 11, 2	2001-09-11
Ion milling planarization of semiconductor workpieces Grant 6,288,357 - Dyer September 11, 2	2001-09-11
Non-abrasive conditioning for polishing pads Grant 6,283,836 - Fruitman , et al. September 4, 2	2001-09-04
Wafer sensor utilizing hydrodynamic pressure differential Grant 6,280,291 - Gromko , et al. August 28, 2	2001-08-28
Method and apparatus for disposable bladder carrier assembly Grant 6,264,540 - Fruitman July 24, 2	2001-07-24
Ultrasonic methods and apparatus for the in-situ detection of workpiece loss Grant 6,264,532 - Meloni July 24, 2	2001-07-24
Sacrificial deposit to improve damascene pattern planarization in semiconductor wafers Grant 6,258,711 - Laursen July 10, 2	2001-07-10
Robot assisted method of polishing, cleaning and drying workpieces Grant 6,227,946 - Gonzalez-Martin , et al. May 8, 2	2001-05-08
Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing Grant 6,217,410 - Holzapfel , et al. April 17, 2	2001-04-17
Integral machine for polishing, cleaning, rinsing and drying workpieces Grant 6,213,853 - Gonzalez-Martin , et al. April 10, 2	2001-04-10
Method for obtaining a desired film thickness using chemical mechanical polishing Grant 6,213,844 - Lenkersdorfer April 10, 2	2001-04-10
Self-powered carrier for polishing or planarizing wafers Grant 6,213,855 - Natalicio April 10, 2	2001-04-10
Chemical mechanical polishing tool components with improved corrosion resistance Grant 6,203,417 - Dyer , et al. March 20, 2	2001-03-20
Tilt mechanism for wafer cassette Grant 6,190,118 - Allen , et al. February 20, 2	2001-02-20
Oscillating orbital polisher and method Grant 6,184,139 - Adams , et al. February 6, 2	2001-02-06
Apparatus and method for the face-up surface treatment of wafers Grant 6,168,683 - Cesna January 2, 2	2001-01-02
Wafer polishing with improved backing arrangement Grant 6,142,857 - Cesna November 7, 2	2000-11-07
Method for simultaneous non-contact electrochemical plating and planarizing of semiconductor wafers using a bipiolar electrode assembly Grant 6,143,155 - Adams , et al. November 7, 2	2000-11-07
Wafer planarization carrier having floating pad load ring Grant 6,113,468 - Natalicio September 5, 2	2000-09-05
Polishing apparatus with improved alignment of polishing plates Grant 6,113,478 - Anderson, III , et al. September 5, 2	2000-09-05
Method and apparatus for improving die planarity and global uniformity of semiconductor wafers in a chemical mechanical polishing context Grant 6,113,465 - Kim , et al. September 5, 2	2000-09-05
Method and apparatus for endpoint detection for chemical mechanical polishing Grant 6,106,662 - Bibby, Jr. , et al. August 22, 2	2000-08-22
Semiconductor wafer carrier with automatic ring extension Grant 6,106,379 - Mosca August 22, 2	2000-08-22
Semiconductor wafer polishing apparatus with a variable polishing force wafer carrier head Grant 6,056,632 - Mitchel , et al. May 2, 2	2000-05-02
Tilt mechanism for wafer cassette Grant 6,033,521 - Allen , et al. March 7, 2	2000-03-07
Methods for spin drying a workpiece Grant 6,029,369 - Gonzalez-Martin , et al. February 29, 2	2000-02-29
Method and apparatus for immersion cleaning of semiconductor devices Grant 6,021,791 - Dryer , et al. February 8, 2	2000-02-08
Workpiece carrier with monopiece pressure plate and low gimbal point Grant 5,989,104 - Kim , et al. November 23, 1	1999-11-23
Semiconductor wafer carrier Grant 5,985,094 - Mosca November 16, 1	1999-11-16
Methods and apparatus for polishing using an improved plate stabilizer Grant 5,980,366 - Waddle , et al. November 9, 1	1999-11-09
Method and apparatus for processing workpieces with multiple polishing elements Grant 5,975,991 - Karlsrud November 2, 1	1999-11-02
Index table and drive mechanism for a chemical mechanical planarization machine Grant 5,975,986 - Allen , et al. November 2, 1	1999-11-02
Apparatus for spin drying a workpiece Grant 5,974,681 - Gonzalez-Martin , et al. November 2, 1	1999-11-02
Methods and apparatus for cleaning and drying wafers Grant 5,950,327 - Peterson , et al. September 14, 1	1999-09-14

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