Spee; Carolus Ida Maria Antonius

Patent Applications and Registrations

Patent applications and USPTO patent grants for Spee; Carolus Ida Maria Antonius.The latest application filed is for "method of manufacturing a multilayer semiconductor element, and a semiconductor element manufactured as such".

Company Profile

0.16.12

Spee; Carolus Ida Maria Antonius - 's-Gravenhage NL
Spee; Carolus Ida Maria Antonius - Helmond NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of manufacturing a multilayer semiconductor element, and a semiconductor element manufactured as such Grant 9,502,654 - Spee , et al. November 22, 2	2016-11-22
Method Of Manufacturing A Multilayer Semiconductor Element, And A Semiconductor Element Manufactured As Such App 20150287925 - Spee; Carolus Ida Maria Antonius ; et al.	2015-10-08
Exposure apparatus Grant 8,830,446 - Boogaard , et al. September 9, 2	2014-09-09
Ex-situ removal of deposition on an optical element Grant 8,598,550 - Banine , et al. December 3, 2	2013-12-03
Exposure Apparatus App 20130286374 - BOOGAARD; Arjen ; et al.	2013-10-31
Exposure apparatus Grant 8,542,341 - Boogaard , et al. September 24, 2	2013-09-24
Ex-situ Removal Of Deposition On An Optical Element App 20120140196 - Banine; Vadim Yevgenyevich ; et al.	2012-06-07
Ex-situ removal of deposition on an optical element Grant 8,134,136 - Banine , et al. March 13, 2	2012-03-13
Method of preparing components, prepared component, lithographic apparatus and device manufacturing method Grant 8,077,287 - Dams , et al. December 13, 2	2011-12-13
Optical apparatus, lithographic apparatus and device manufacturing method Grant 7,935,218 - Moors , et al. May 3, 2	2011-05-03
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,868,304 - Bakker , et al. January 11, 2	2011-01-11
Ex-situ Removal Of Deposition On An Optical Element App 20100290015 - BANINE; Vadim Yevgenyevich ; et al.	2010-11-18
Ex-situ removal of deposition on an optical element Grant 7,767,989 - Banine , et al. August 3, 2	2010-08-03
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,561,247 - Van Herpen , et al. July 14, 2	2009-07-14
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,450,217 - Boogaard , et al. November 11, 2	2008-11-11
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,414,700 - Van Herpen , et al. August 19, 2	2008-08-19
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,355,672 - Van Herpen , et al. April 8, 2	2008-04-08
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus App 20070040999 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al.	2007-02-22
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060175558 - Bakker; Levinus Pieter ; et al.	2006-08-10
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060152696 - Boogaard; Arjen ; et al.	2006-07-13
Device manufacturing method and a lithographic apparatus Grant 7,075,617 - Kolesnychenko , et al. July 11, 2	2006-07-11
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus App 20060115771 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al.	2006-06-01
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus App 20060072084 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al.	2006-04-06
Device manufacturing method and a lithographic apparatus App 20050148211 - Kolesnychenko, Aleksey Yurievich ; et al.	2005-07-07
Method of preparing components, prepared component, lithographic apparatus and device manufacturing method App 20050008978 - Dams, Johannes Adrianus Antonius Theodorus ; et al.	2005-01-13

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