Spady; Blaine R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Spady; Blaine R..The latest application filed is for "image control in a metrology/inspection positioning system".
- Spady; Blaine R. - Lincoln NE
- Spady; Blaine R. - San Jose CA
| Patent | Date |
|---|---|
| Metrology/inspection positioning system Grant 7,295,314 - Spady , et al. November 13, 2 | 2007-11-13 |
| Image control in a metrology/inspection positioning system Grant 7,289,215 - Spady , et al. October 30, 2 | 2007-10-30 |
| Image Control In A Metrology/inspection Positioning System App 20070222991 - Spady; Blaine R. ; et al. | 2007-09-27 |
| Encoder measurement based on layer thickness Grant 6,970,255 - Spady , et al. November 29, 2 | 2005-11-29 |
| Precision polar coordinate stage Grant 6,910,847 - Blaufus , et al. June 28, 2 | 2005-06-28 |
| Stage with two substrate buffer station Grant 6,854,948 - Spady , et al. February 15, 2 | 2005-02-15 |
| High precision substrate prealigner Grant 6,836,690 - Spady , et al. December 28, 2 | 2004-12-28 |
| Compact rotating stage Grant 6,779,278 - Spady , et al. August 24, 2 | 2004-08-24 |
| Compact optical reflectometer system Grant 6,181,427 - Yarussi , et al. January 30, 2 | 2001-01-30 |
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