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Patent applications and USPTO patent grants for Soyano; Akimasa.The latest application filed is for "radiation-sensitive resin composition, method for forming resist pattern, and polymer and compound".
Patent | Date |
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Radiation-sensitive resin composition, method for forming resist pattern, and polymer and compound Grant 9,261,780 - Asano , et al. February 16, 2 | 2016-02-16 |
Radiation-sensitive resin composition Grant 8,916,333 - Tomioka , et al. December 23, 2 | 2014-12-23 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern, And Polymer And Compound App 20140004463 - Asano; Yusuke ;   et al. | 2014-01-02 |
Radiation-sensitive resin composition, polymer, and compound Grant 8,507,575 - Matsumura , et al. August 13, 2 | 2013-08-13 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern, And Polymer And Compound App 20130143160 - Asano; Yusuke ;   et al. | 2013-06-06 |
Radiation-sensitive Resin Composition App 20130022926 - Tomioka; Hiroshi ;   et al. | 2013-01-24 |
Radiation-sensitive Resin Composition, Polymer, And Compound App 20120065291 - Matsumura; Nobuji ;   et al. | 2012-03-15 |
Radiation-sensitive Resin Composition For Liquid Immersion Lithography, Polymer, And Resist Pattern-forming Method App 20110151378 - MATSUMURA; Nobuji ;   et al. | 2011-06-23 |
Radiation-sensitive Resin Composition App 20110143279 - SHIMOKAWA; Tsutomu ;   et al. | 2011-06-16 |
Photoresist polymer compositions Grant 7,510,817 - Benoit , et al. March 31, 2 | 2009-03-31 |
Watermark Defect Reduction By Resist Optimization App 20080213689 - Kocsis; Michael ;   et al. | 2008-09-04 |
Photoresist polymer compositions App 20060257781 - Benoit; Didier ;   et al. | 2006-11-16 |
Radiation-sensitive resin composition Grant 6,800,419 - Soyano , et al. October 5, 2 | 2004-10-05 |
Radiation-sensitive resin composition App 20030203307 - Soyano, Akimasa ;   et al. | 2003-10-30 |
Radiation-sensitive resin composition Grant 6,623,907 - Numata , et al. September 23, 2 | 2003-09-23 |
Radiation-sensitive resin composition App 20010023050 - Numata, Jun ;   et al. | 2001-09-20 |
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