| Patent | Date |
|---|
Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
Grant 11,337,292 - Niimi , et al. May 17, 2 | 2022-05-17 |
Tin Trap Device, Extreme Ultraviolet Light Generation Apparatus, And Electronic Device Manufacturing Method
App 20220141945 - NIIMI; Gouta ; et al. | 2022-05-05 |
Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device
Grant 11,145,429 - Ueda , et al. October 12, 2 | 2021-10-12 |
Extreme Ultraviolet Chamber Apparatus, Extreme Ultraviolet Light Generation System, And Method For Manufacturing Electronic Device
App 20200312479 - UEDA; Atsushi ; et al. | 2020-10-01 |
Extreme ultraviolet light generation device
Grant 10,455,679 - Saito , et al. Oc | 2019-10-22 |
Extreme ultraviolet light generation device
Grant 10,136,510 - Nagai , et al. November 20, 2 | 2018-11-20 |
Extreme Ultraviolet Light Generation Device
App 20180103534 - SAITO; Takashi ; et al. | 2018-04-12 |
Spheroidal Mirror Reflectivity Measuring Apparatus For Extreme Ultraviolet Light
App 20170336282 - KOBAYASHI; Yohei ; et al. | 2017-11-23 |
Extreme Ultraviolet Light Generation Device
App 20170238407 - NAGAI; Shinji ; et al. | 2017-08-17 |
Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target
Grant 9,661,730 - Ueda , et al. May 23, 2 | 2017-05-23 |
Extreme Ultraviolet Light Generation System And Extreme Ultraviolet Light Generation Method
App 20170127505 - SUNAHARA; Atsushi ; et al. | 2017-05-04 |
Extreme Ultraviolet Light Generation Apparatus
App 20160255707 - UEDA; Atsushi ; et al. | 2016-09-01 |
Extreme Ultra Violet Light Source Device
App 20140021376 - KOMORI; Hiroshi ; et al. | 2014-01-23 |
Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
Grant 8,592,787 - Moriya , et al. November 26, 2 | 2013-11-26 |
Extreme ultra violet light source device
Grant 8,586,953 - Komori , et al. November 19, 2 | 2013-11-19 |
Extreme ultraviolet light source apparatus
Grant 8,513,630 - Ueno , et al. August 20, 2 | 2013-08-20 |
Semiconductor exposure device using extreme ultra violet radiation
Grant 8,507,885 - Moriya , et al. August 13, 2 | 2013-08-13 |
Apparatus for and method of withdrawing ions in EUV light production apparatus
Grant 8,492,738 - Ueno , et al. July 23, 2 | 2013-07-23 |
Extreme ultra violet light source apparatus
Grant 8,354,657 - Soumagne , et al. January 15, 2 | 2013-01-15 |
Extreme Ultra Violet Light Source Device
App 20120261596 - KOMORI; Hiroshi ; et al. | 2012-10-18 |
Apparatus for and method of withdrawing ions in EUV light production apparatus
Grant 8,288,743 - Ueno , et al. October 16, 2 | 2012-10-16 |
Semiconductor Exposure Device Using Extreme Ultra Violet Radiation
App 20120256105 - MORIYA; Masato ; et al. | 2012-10-11 |
Mirror For Extreme Ultra Violet, Manufacturing Method For Mirror For Extreme Ultra Violet, And Far Ultraviolet Light Source Device
App 20120248342 - MORIYA; Masato ; et al. | 2012-10-04 |
Apparatus For And Method Of Withdrawing Ions In Euv Light Production Apparatus
App 20120217414 - UENO; Yoshifumi ; et al. | 2012-08-30 |
Semiconductor exposure device using extreme ultra violet radiation
Grant 8,227,778 - Moriya , et al. July 24, 2 | 2012-07-24 |
Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
Grant 8,198,613 - Moriya , et al. June 12, 2 | 2012-06-12 |
Extreme Ultraviolet Light Source Apparatus
App 20120097869 - Ueno; Yoshifumi ; et al. | 2012-04-26 |
Extreme ultra violet light source device
Grant 8,143,606 - Komori , et al. March 27, 2 | 2012-03-27 |
Extreme ultraviolet light source apparatus
Grant 8,067,756 - Ueno , et al. November 29, 2 | 2011-11-29 |
Extreme Ultra Violet Light Source Apparatus
App 20110163247 - SOUMAGNE; Georg ; et al. | 2011-07-07 |
Extreme ultra violet light source apparatus
Grant 7,928,418 - Soumagne , et al. April 19, 2 | 2011-04-19 |
Extreme ultra violet light source apparatus
Grant 7,915,600 - Ueno , et al. March 29, 2 | 2011-03-29 |
Extreme Ultraviolet Light Source Apparatus
App 20100213395 - UENO; Yoshifumi ; et al. | 2010-08-26 |
Extreme Ultra Violet Light Source Apparatus
App 20100176312 - Komori; Hiroshi ; et al. | 2010-07-15 |
Mirror For Extreme Ultra Violet, Manufacturing Method For Mirror For Extreme Ultra Violet, And Far Ultraviolet Light Source Device
App 20090289205 - Moriya; Masato ; et al. | 2009-11-26 |
Semiconductor Exposure Device Using Extreme Ultra Violet Radiation
App 20090267003 - MORIYA; Masato ; et al. | 2009-10-29 |
Extreme ultra violet light source apparatus
App 20090261277 - Soumagne; Georg ; et al. | 2009-10-22 |
Apparatus For And Method Of Withdrawing Ions In Euv Light Production Apparatus
App 20090261242 - UENO; Yoshifumi ; et al. | 2009-10-22 |
Extreme Ultra Violet Light Source Apparatus
App 20080087840 - UENO; Yoshifumi ; et al. | 2008-04-17 |
Extreme ultra violet light source device
App 20070228298 - Komori; Hiroshi ; et al. | 2007-10-04 |
Prism unit and laser device
Grant 7,006,309 - Wakabayashi , et al. February 28, 2 | 2006-02-28 |
Prism unit and laser device
App 20030103280 - Wakabayashi, Osamu ; et al. | 2003-06-05 |
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