Souda; Yasunari
Patent Applications and Registrations
Patent applications and USPTO patent grants for Souda; Yasunari.The latest application filed is for "pattern inspection method and pattern inspection system".
- Souda; Yasunari - Kawasaki JP
| Patent | Date |
|---|---|
| Pattern inspection method and pattern inspection system Grant 8,217,351 - Toyoda , et al. July 10, 2 | 2012-07-10 |
| Charged particle beam apparatus and control method therefor Grant 8,026,482 - Fukuda , et al. September 27, 2 | 2011-09-27 |
| Pattern Inspection Method and Pattern Inspection System App 20100310180 - TOYODA; Yasutaka ; et al. | 2010-12-09 |
| Pattern inspection method and pattern inspection system Grant 7,786,437 - Toyoda , et al. August 31, 2 | 2010-08-31 |
| Charged Particle Beam Apparatus And Control Method Therefor App 20090140143 - FUKUDA; Muneyuki ; et al. | 2009-06-04 |
| Pattern Inspection Method and Pattern Inspection System App 20090039261 - Toyoda; Yasutaka ; et al. | 2009-02-12 |
| Multi-electron beam exposure method and apparatus Grant 7,126,140 - Yoda , et al. October 24, 2 | 2006-10-24 |
| Multi-electron beam exposure method and apparatus Grant 7,067,830 - Yoda , et al. June 27, 2 | 2006-06-27 |
| Multi-electron beam exposure method and apparatus App 20060017021 - Yoda; Haruo ; et al. | 2006-01-26 |
| Multi-electron beam exposure method and apparatus App 20040143356 - Yoda, Haruo ; et al. | 2004-07-22 |
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