SORENSEN; Carl A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for SORENSEN; Carl A..The latest application filed is for "film stress control for plasma enhanced chemical vapor deposition".

Company Profile

11.35.44

SORENSEN; Carl A. - Morgan Hill CA
Sorensen; Carl A. - US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Film Stress Control For Plasma Enhanced Chemical Vapor Deposition App 20210280392 - KAO; Chien-Teh ; et al.	2021-09-09
Film stress control for plasma enhanced chemical vapor deposition Grant 11,094,508 - Kao , et al. August 17, 2	2021-08-17
Rf Choke For Gas Delivery To An Rf Driven Electrode In A Plasma Processing Apparatus App 20210090777 - KUDELA; Jozef ; et al.	2021-03-25
Substrate processing method and apparatus for controlling phase angles of harmonic signals Grant 10,903,048 - Wu , et al. January 26, 2	2021-01-26
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus Grant 10,886,053 - Kudela , et al. January 5, 2	2021-01-05
Large-area High-density Plasma Processing Chamber For Flat Panel Displays App 20200347499 - ANWAR; Suhail ; et al.	2020-11-05
Film Stress Control For Plasma Enhanced Chemical Vapor Deposition App 20200194233 - KAO; Chien-Teh ; et al.	2020-06-18
Rf Choke For Gas Delivery To An Rf Driven Electrode In A Plasma Processing Apparatus App 20190198217 - KUDELA; Jozef ; et al.	2019-06-27
Rf Choke For Gas Delivery To An Rf Driven Electrode In A Plasma Processing Apparatus App 20190189328 - KUDELA; Jozef ; et al.	2019-06-20
CVD thin film stress control method for display application Grant 10,312,475 - Won , et al.	2019-06-04
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus Grant 10,304,607 - Kudela , et al.	2019-05-28
Substrate Processing Method And Apparatus App 20190043695 - WU; Yui Lun ; et al.	2019-02-07
Cvd Thin Film Stress Control Method For Display Application App 20180331328 - WON; Tae Kyung ; et al.	2018-11-15
Asymmetrical RF Drive for Electrode of Plasma Chamber App 20180277351 - Kudela; Jozef ; et al.	2018-09-27
Rf Choke For Gas Delivery To An Rf Driven Electrode In A Plasma Processing Apparatus App 20170327946 - KUDELA; Jozef ; et al.	2017-11-16
Transmission line RF applicator for plasma chamber Grant 9,818,580 - Kudela , et al. November 14, 2	2017-11-14
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus Grant 9,761,365 - Kudela , et al. September 12, 2	2017-09-12
Ground Return For Plasma Processes App 20160305025 - CHOI; Soo Young ; et al.	2016-10-20
Systems and methods for improved radio frequency matching networks Grant 9,425,026 - Anwar , et al. August 23, 2	2016-08-23
Gas Delivery And Distribution For Uniform Process In Linear-type Large-area Plasma Reactor App 20160208380 - WHITE; John M. ; et al.	2016-07-21
Guided wave applicator with non-gaseous dielectric for plasma chamber Grant 9,397,380 - Kudela , et al. July 19, 2	2016-07-19
Ground return for plasma processes Grant 9,382,621 - Choi , et al. July 5, 2	2016-07-05
Systems And Methods For Improved Radio Frequency Matching Networks App 20160049917 - Anwar; Suhail ; et al.	2016-02-18
Transmission Line RF Applicator for Plasma Chamber App 20150340204 - Kudela; Jozef ; et al.	2015-11-26
Transmission line RF applicator for plasma chamber Grant 9,048,518 - Kudela , et al. June 2, 2	2015-06-02
RF bus and RF return bus for plasma chamber electrode Grant 8,992,723 - Sorensen , et al. March 31, 2	2015-03-31
Plasma source with vertical gradient Grant 8,872,428 - Kudela , et al. October 28, 2	2014-10-28
Substrate support with gas introduction openings Grant 8,853,098 - Kim , et al. October 7, 2	2014-10-07
Rf Choke For Gas Delivery To An Rf Driven Electrode In A Plasma Processing Apparatus App 20140216344 - KUDELA; Jozef ; et al.	2014-08-07
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus Grant 8,728,586 - Kudela , et al. May 20, 2	2014-05-20
Large area plasma processing chamber with at-electrode RF matching Grant 8,691,047 - Sorensen , et al. April 8, 2	2014-04-08
Transmission line RF applicator for plasma chamber App 20130221833 - Kudela; Jozef ; et al.	2013-08-29
Linear Pecvd Apparatus App 20130206068 - KUDELA; Jozef ; et al.	2013-08-15
Asymmetrical RF Drive for Electrode of Plasma Chamber App 20130186859 - Kudela; Jozef ; et al.	2013-07-25
Guided Wave Applicator with Non-Gaseous Dielectric for Plasma Chamber App 20130126331 - Kudela; Jozef ; et al.	2013-05-23
Gas Delivery And Distribution For Uniform Process In Linear-type Large-area Plasma Reactor App 20130068161 - White; John M. ; et al.	2013-03-21
Asymmetrical RF drive for electrode of plasma chamber Grant 8,343,592 - Kudela , et al. January 1, 2	2013-01-01
Transmission Line RF Applicator for Plasma Chamber App 20120326592 - Kudela; Jozef ; et al.	2012-12-27
Plasma Source with Vertical Gradient App 20120217874 - Kudela; Jozef ; et al.	2012-08-30
Substrate Support with Gas Introduction Openings App 20120149194 - KIM; SAM H. ; et al.	2012-06-14
Apparatus and methods for using high frequency chokes in a substrate deposition apparatus Grant 8,163,191 - Sorensen April 24, 2	2012-04-24
Remote inductively coupled plasma source for CVD chamber cleaning Grant 8,075,734 - Sorensen , et al. December 13, 2	2011-12-13
Apparatus And Methods For Using High Frequency Chokes In A Substrate Deposition Apparatus App 20110259362 - Sorensen; Carl A.	2011-10-27
Large Area Plasma Processing Chamber With At-electrode Rf Matching App 20110135844 - Sorensen; Carl A. ; et al.	2011-06-09
RF Bus and RF Return Bus for Plasma Chamber Electrode App 20100206483 - Sorensen; Carl A. ; et al.	2010-08-19
Ground Return For Plasma Processes App 20100196626 - Choi; Soo Young ; et al.	2010-08-05
Substrate Support With Gas Introduction Openings App 20100184290 - Kim; Sam H. ; et al.	2010-07-22
Rf Return Path For Large Plasma Processing Chamber App 20100089319 - Sorensen; Carl A. ; et al.	2010-04-15
Method And Apparatus For Controlling Plasma Uniformity App 20090197015 - Kudela; Jozef ; et al.	2009-08-06
Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber Grant 7,570,130 - Sorensen , et al. August 4, 2	2009-08-04
Asymmetrical RF Drive for Electrode of Plasma Chamber App 20090159423 - Kudela; Jozef ; et al.	2009-06-25
Rf Choke For Gas Delivery To An Rf Driven Electrode In A Plasma Processing Apparatus App 20090022905 - Kudela; Jozef ; et al.	2009-01-22
Remote Inductively Coupled Plasma Source For Cvd Chamber Cleaning App 20090008239 - SORENSEN; CARL A. ; et al.	2009-01-08
Rigid Rf Transmission Line With Easy Removal Section App 20080276868 - Sorensen; Carl A. ; et al.	2008-11-13
Apparatus and methods for using high frequency chokes in a substrate deposition apparatus App 20070051388 - Sorensen; Carl A.	2007-03-08
Apparatus and methods for a low inductance plasma chamber App 20060027327 - Sorensen; Carl A. ; et al.	2006-02-09
Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber App 20060017386 - Sorensen; Carl A. ; et al.	2006-01-26
Semiconductor processing using an efficiently coupled gas source App 20030129106 - Sorensen, Carl A. ; et al.	2003-07-10
RF matching network with distributed outputs Grant 6,552,297 - Blonigan , et al. April 22, 2	2003-04-22
Deposition of TEOS oxide using pulsed RF plasma App 20020192475 - Goto, Haruhiro H. ; et al.	2002-12-19
Deposition of TEOS oxide using pulsed RF plasma Grant 6,451,390 - Goto , et al. September 17, 2	2002-09-17
RF matching network with distributed outputs App 20020046989 - Blonigan, Wendell T. ; et al.	2002-04-25
RF matching network with distributed outputs Grant 6,359,250 - Blonigan , et al. March 19, 2	2002-03-19
Heating element with a diamond sealing material Grant 5,977,519 - Sorensen , et al. November 2, 1	1999-11-02
Fast transition RF impedance matching network for plasma reactor ignition Grant 5,815,047 - Sorensen , et al. September 29, 1	1998-09-29
Method of depositing a thin film using an optical pyrometer Grant 5,782,974 - Sorensen , et al. July 21, 1	1998-07-21
Optical pyrometer for a thin film deposition system Grant 5,549,756 - Sorensen , et al. August 27, 1	1996-08-27